Inficon SQM-160, Operating Manual

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SQM-160 Operating Manual
6.4 Crystal Sensor Emulator
IPN 760-601-G2
NOTE: 760-601-G2 is fully compatible with all Thin Film Deposition Controllers.
The Crystal Sensor Emulator option is used in conjunction with the Thin Film
Deposition Controller to rapidly diagnose problems with the Deposition Controller's
measurement system. See
Figure 6-7 .
Figure 6-7 Crystal Sensor Emulator
The Crystal Sensor Emulator may be attached at various points in the
measurement system, from the oscillator to the sensor head. It provides a known
good monitor crystal with known good electrical connections. Using the emulator
and the controller in a systematic manner provides a fast means of isolating
measurement system, cable, or sensor problems. See
Figure 6-8 .
Figure 6-8 Crystal Sensor Emulator Attachment Points
CAUTION
This product is designed as a diagnostic tool, and is not
intended for use in vacuum. Do not leave the Crystal
Sensor Emulator installed in the vacuum system during
processing.
Female
BNC
Connector
Female
Microdot
Connector
Sensor
Cover
Connector
Thin Film
Controller
Crystal Interface
Unit (Oscillator)
Sensor Head
A
B
C