Inficon SQM-160, Operating Manual

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SQM-160 Operating Manual
If the Communications Setup dialog box is displayed, no Monitor was found on the
expected comm port. Follow the instructions in
section 4.7, Communications
Menu, on page 4-9 of this manual to establish communications. The top tool bar
is only visible if communications has been established with an SQM-160.
Otherwise, an SQM-160 Offline status message is displayed.
The main window menus allow additional configuration of the program, and the
connected SQM-160 Thin Film Monitor. Some menu selections are not available
during data acquisition, or if SQM-160 communications are not established. The
main window control functions are shown below.
Film . . . . . . . . . . . . . . . . . . . . . . . . . This drop-down list box selects the film on the
SQM-160 that will be used for rate/thickness
measurements. Defaults on startup to the
first SQM-160 film.
Start/Stop . . . . . . . . . . . . . . . . . . . . Causes the program to start/stop SQM-160
data acquisition. Graphing and display of
readings from the SQM-160 start/stop
immediately when this control is toggled.
Open/Close Shutter . . . . . . . . . . . . Toggles the SQM-160 shutter relay. Opening
the shutter automatically starts SQM-160
data acquisition. However, closing the
shutter does not automatically stop data
acquisition.
Zero . . . . . . . . . . . . . . . . . . . . . . . . . Zeros the thickness reading on the
SQM-160.
The remaining main window controls display readings from the SQM-160 Monitor.
Graph . . . . . . . . . . . . . . . . . . . . . . . . Displays rate readings from the SQM-160. A
graph of each sensor assigned to the film, or
an average of all assigned sensors, can be
selected on the View menu.
Elapsed Time . . . . . . . . . . . . . . . . . Displays the elapsed deposition time since
the Start switch was pressed.
Time Remaining . . . . . . . . . . . . . . . Displays the calculated deposition time
remaining based on the current thickness
and current rate, and final thickness setpoint.
Final Thickness . . . . . . . . . . . . . . . The desired deposition thickness for the
selected film. Final thicknesss setpoint can
be set on the Film menu (see
section 4.5 ).
Average Thickness . . . . . . . . . . . . . The current film thickness, based on the
average of all sensors assigned to the
selected film.