Inficon SQM-160, Operating Manual

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SQM-160 Operating Manual
3.5 Sensor Selection
The SQM-160 comes standard with two sensor inputs. Four additional sensors are
available by adding a Sensor Option Card. A specific sensor can be assigned to
each film, or multiple sensors can be averaged for a film. The averaging option
provides more uniform coverage of the deposition area and provides a backup
sensor capability. If one of multiple sensors assigned to a film fails, the sensor is
automatically removed from rate/thickness calculations.
NOTE: If Relay 2 Dual is selected in the System Menu, Sensors 1 and 2 are set
up as a primary/secondary sensor pair. In that case, sensor averaging is
disabled. See
section 3.12 on page 3-10 for information on dual sensors.
To assign a sensor, or sensors, to a film:
1
Press Program to enter Program mode.
2
Use the Control Knob to scroll to the desired Film # (1-9).
3
Press the Control Knob or Next to enter the film parameters for the selected
film.
4
Press Next until SENS AVG is shown.
5
Use the Control Knob to scroll through the sensors in Display 2.
6
Press the Control Knob to toggle the sensor on/off.
Sensor status can be seen by observing the Crystal Status LEDs:
 If the LED is not illuminated, the crystal is disabled.
 If the LED is illuminated, the crystal is enabled and receiving valid readings.
 If the LED is blinking, the crystal is enabled, but is not receiving valid
readings.
7
Continue selecting sensors until the Crystal Status LEDs indicate the desired
setup.
8
Press Program to exit the Film Menu and return to normal mode.
9
Turn the Control Knob to sequence though each sensor's reading on Display 1.
When a single number is shown in Display 2 it is the sensor number whose
readings are shown in Display 1. When time is shown in Display 2, Display 1
shows the average of all assigned sensors.