Inficon SQM-160, Operating Manual

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SQM-160 Operating Manual
3.8 Display Units
The SQM-160 can display crystal measurements in several different units. To
select the display units:
1
Press Program to enter Program mode.
2
Press Prev to enter the System Menu.
3
Press Next until DSP..... is shown.
4
Turn the Control Knob left or right to select the desired display mode:
 THCK — Rate in Å/s, Thickness in kÅ
 nAnM — Rate in nM/s, Thickness in µM
 MASS — Rate in ng/cc/s, Mass in µg (micrograms)
 FREQ — Frequency in Hz
NOTE: When Nanometers is selected a small "n" appears between the rate
and thickness displays. When Mass is selected a small "m" appears
between the rate and thickness displays.
5
Press the Control Knob to accept the choice.
6
Press Program to exit the System Menu and return to normal mode.
3.9 Crystal Life
The SQM-160 calculates the remaining crystal life based on the FMin/Max values
set in the System Menu (refer to
section 3.4 on page 3-4 ).
To display the remaining crystal life for the sensors used by the currently active film:
1
Press the Xtal Life switch in the front panel Control section.
2
The sensor is shown in Display 1 and the % remaining life is shown in Display 2.
3
Turn the Control Knob to display the % life of other sensors active for this film.
4
Press Xtal Life again to return to normal rate/thickness, or frequency display.
NOTE: You cannot enter program mode while the crystal life display is active.
3.10 Zero Thickness
Before starting each film deposition, reset the SQM-160 Thickness value to zero.
To zero Thickness, press the Zero switch in the front panel Control section.
In addition to zeroing Thickness, pressing the Zero switch has these effects:
 The Time display is reset to its programmed value and starts counting down.
 The Thickness Setpoint and Timer relays open.
 The Time SP, Thk SP, and Final Thk LEDs extinguish.