Cold Cathode Gauge
MAG050
MAG060
Operating Manual
Incl. EU Declaration of Conformity
tinb43e1 (2018-06)
Product Identification
In all communications with INFICON, please specify the
information on the product nameplate. For convenient
reference copy that information into the space provided
below.
Validity
This document applies to products with part number
399-840
(MAG050, DN 25 ISO-KF)
399-841
(MAG050, DN 40 ISO-KF)
399-842
(MAG050, DN 40 CF-F)
399-845
(MAG060, DN 40 ISO-KF)
399-846
(MAG060, DN 40 CF-F)
The part number (PN) can be taken from the product name-
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the product with vacuum
connection DN 40 ISO-KF. They apply to the products with
other vacuum connections by analogy.
Intended Use
The above Cold Cathode Gauges have been designed for
vacuum measurement in the pressure range of
MAG050:
2×10
-9
... 5×10
-3
hPa
│mbar
MAG060:
1×10
-10
... 5×10
-3
hPa
│mbar.
They are used together with a INFICON measurement and
control unit of the type VGC083C.
Functional Principle
Over the whole measurement range, the measuring signal is
output as logarithm of the pressure.
The MAG050 / MAG060 function with a cold cathode ioniza-
tion measurement circuit (according to the inverted magne-
tron principle).
Safety
Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and envi-
ronmental damage.
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Note
Personnel Qualification
All work described in this document may only be carried
out by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
•
Adhere to the applicable regulations and take the neces-
sary precautions for the process media used.
•
Consider possible reactions between the materials
(
→
Technical Data) and the process media.
•
Consider possible reactions (e.g. explosion) of the pro-
cess media due to the heat generated by the product.
•
Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
•
Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety
distance of ≥10 cm between
the magnet and the heart pacemaker or prevent
the influence of strong magnetic fields by anti-
magnetic shielding.
Communicate the safety instructions to all other users.
Responsibility and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•
disregard the information in this document
•
use the product in a non-conforming manner
•
make any kind of interventions (modifications, alterations,
etc.) on the product
•
use the product with accessories not listed in the corre-
sponding product documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination are not covered by the
warranty.
Technical Data
Admissible temperatures
Storage
–40 °C … +80 °C
Operation
MAG050
+5 °C … +80 °C
(with normal cable)
+5 °C … +150 °C
(with high temperature cable)
MAG060
+5 °C … +80 °C
(with normal cable)
+5 °C … +250 °C
(with high temperature cable)
Bakeout
MAG050
+150 °C (without cable)
MAG060
+250 °C (without cable)
Relative humidity
max. 80% at temperatures
up to +31 °C, decreasing to
50% at +40 °C
Use
indoors only
altitude up to 2000 m NN
Measurement range (air, N
2
)
MAG050
2×10
-9
… 5×10
-3
hPa
│mbar
MAG060
1×10
-10
… 5×10
-3
hPa
│mbar
Accuracy (N
2
, typical)
30% of reading
Repeatability (typical)
5% of reading
Gas type dependence
Protection type
IP 40
Overpressure
≤900 kPa (≤9 bar)
for inert gases and tempera-
tures <55 °C only
Radiation resistance
MAG050
–
MAG060
10
9
rad
Operating voltage
(in measuring chamber)
≤3.3 kV
Operating current
(in measuring chamber)
≤700 µA
Electrical connection
Connector
Type
SHV
coaxial cable
Cable length between gauge
and measurement unit
MAG050
max. 100 m
(40 m if the lower limit of the
measurement range is used
→
[1], Operating Manual
VGC083C)
MAG060
max. 100 m
(6 m if the lower limit of the
measurement range is used,
→
[1], Operating Manual
VGC083C)
Materials on the
vacuum side
Vacuum connection
Measuring chamber
DN 25 ISO-KF
DN 40 ISO-KF / CF-F
Feedthrough isolation
Internal seal
MAG050
MAG060
Anode
Ignition aid
stainless steel (1.4306)
stainless steel (1.4104)
stainless steel (1.4306)
ceramic (Al
2
O
3
)
FPM
Ag
Mo
stainless steel (1.4310)
Internal volume
≈
20 cm³
Dimensions [mm]
Weight
600 g (DN 25 ISO-KF, DN 40 ISO-KF)
850 g (DN 40 CF-F)
Installation
Vacuum Connection
D A N G E R
Overpressure in the vacuum system >100 kPa
(>1 bar)
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
D A N G E R
Overpressure in the vacuum system >250 kPa
(>2.5 bar)
KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centering
ring.
D A N G E R
Protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
•
CF connections fulfill this requirement
•
For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
When CF vacuum connections are made, it can be advanta-
geous to temporarily remove the magnet unit (
Mount the gauge so that no vibrations occur. Vibrations at
the gauge cause a deviation of the measured values.
The gauge may be mounted in any orientation.
To keep condensates and particles from getting into
the measuring chamber preferably choose a hori-
zontal to upright position.
Remove the protective lid and connect the product to the
vacuum system.
Keep the protective lid.
Removing the Magnet Unit
(CF vacuum connection only)
For reasons of tolerance, the same magnet unit has
to be used again when reassembling the gauge.
Tools Required
•
Allen wrench AF 1.5
•
Open-end wrench AF 7
Procedure
Unfasten the hex head screw (3) on the magnet unit (4)
and remove the magnet unit.
The magnetic force and the tendency to tilt
make it more difficult to separate the magnet
unit and the measuring chamber (7).
Make the vacuum connection between the gauge and
the vacuum system.
Mount the magnet unit and lock it with the hex head
screw (3).
Electrical Connection
•
Make sure the vacuum connection is properly
made.
•
The VGC083C control unit must be turned off
before any work is performed on the gauge or
sensor cable.
Connect the sensor cable to the gauge and to the INFICON
measurement unit.
Operation
The gauge is ready for operation as soon as it has been
connected.
Gas type Dependence
The measuring signal depends on the type of gas being
measured. The value displayed is accurate for dry air, N
2
, O
2
and CO. It can be mathematically converted for other gases.
This can be done by entering the corresponding calibration
factor on the INFICON measurement unit (
→
Appendix).
Ignition Delay
When cold cathode measurement systems are activated, an
ignition delay occurs. The delay time increases at low pres-
sures and for clean, degassed gauges it is typically:
1×10
-7
hPa
│mbar
≈
0.1 minute
1×10
-8
hPa
│mbar
≈
1 minute
1×10
-9
hPa
│mbar
≈
5 minutes
1×10
-10
hPa
│mbar
≈
20 minutes (MAG060 only)
The ignition is a statistical process. Already a small amount
of depositions on the inner surfaces can have a strong in-
fluence on it.
Contamination
Gauge failures due to contamination are not covered by the
warranty.
Cold cathode gauges are subject to contamination. The de-
gree of contamination and subsequently the accuracy of the
measured value depend on:
•
the pressure in the vacuum chamber
•
contaminants inside the vacuum chamber (vapors, pro-
cess particles, etc.)
•
the measurement current.
To avoid extensive contamination switch the gauge
on only at pressures of <10
-2
hPa
│mbar.
Contamination generally has the effect that the pressure indi-
cation is too low. If the contamination is severe, instability
occurs. Contamination layers can peel off in the measuring
chamber and cause short circuits.
Depending on the operating conditions, cleaning may there-
fore be necessary after a few days or after a few years.
Deinstallation
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Procedure
Turn off the VGC083C control unit.
Vent the vacuum system and disconnect the sensor
cable from the gauge.
Remove gauge from the vacuum system and install the
protective lid.
Maintenance
Sensor failures due to contamination are not covered by the
warranty.
Cleaning the Gauge / Changing Parts
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Model:
PN:
SN:
INFICON AG, LI-9496 Balzers
ø63.5
9
2
9
7.
5
DN 40 CF-F
DN 25 ISO-KF
DN 40 ISO-KF
AF 7
Vacuum
chamber
4
3
7
Original: English
t i nb43e1