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Easy Rate Sensor
PN 074-677-P1A
The standard cable length from the sensor to the feedthrough is:
25.4 cm (10 in.) for In-vacuum cable PN 783-500-023, which is used in the following
Easy Rate Sensor configurations: ERS-X1XE1XX and ERD-X1E1XX
76.2 cm (30 in.) for In-vacuum cable PN 783-500-024, which is used in the following
Easy Rate Sensor configurations: ERS-X2XE1XX and ERD-X2E1XX
NOTE:
Refer to the Easy Rate Sensor data sheet (located at inficon.com) for
information on part number configuration. The cable length from the crystal to
the oscillator should not exceed 91.44 cm (36 in.) unless a ModeLock instrument
is used. Refer to the instrument operating manual for cable length limitations.
Operation
The information below describes normal use of the sensor.
Crystal Handling
Any contamination of the crystal or scratches on the surface will reduce crystal life and
cause rate noise. Contamination and scratches also interfere with adhesion of the
deposited material on the crystal.
To avoid crystal contamination:
insert the crystal directly from its package into the crystal holder
never handle the crystal with bare or gloved fingers
never drop or place the crystal onto a work area
Crystal Replacement
When transporting the crystal from the package to the crystal holder, use Teflon
™
tweezers or a vacuum pencil. Touch the crystal only at the perimeter, never in the center
region.
1
Wearing clean nylon gloves, grip the crystal holder and pull it straight out of the
sensor body. For dual and single shuttered sensors, remove the shutter using the
thumb screw prior to this step.
2
If a crystal is already installed, invert the crystal holder and push on the crystal from
the deposited electrode face of the crystal until the crystal is free from the spring
contact.
NOTE:
Crystal will potentially break using this method. If the crystal needs to be
preserved for analytical reasons, gently pressing in two of the spring tab
contacts holding the crystal in place should allow for the crystal to be freed
without damaging it.
