IGM EMI-SSD-1M, Tuning Manual

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MRBP.424321.001G2 Version 1.0 15/06/2020
№ Gas Formula
Measurement
units
Maximal
value
Threshold 1 Threshold 2
51 Arsine AsH
3
ppm 1,00 0,30 0,60
52 Phosphine PH
3
ppm 5,00 0,30 0,60
53 Monosilane SiH
3
ppm 50,0 5,0 10,0
54 Carbonyl chloride COCl
2
ppm 1,00 0,60 0,80
55 Methylmercaptan CH
3
SH ppm 10,0 4,0 8,0
56 Ozone O
3
ppm 25 16 21
57 Bromine Br
2
ppm 5,0 1,0 2,0
58 Formaldehyde CH
2
O ppm 10,0 1,0 2,0
59 Ethyl mercaptan C
2
H
5
SH ppm 14,0 1,9 3,8
60 Ethylen oxide(LOC) C
2
H
4
O ppm 100,0 1,6 3,2
61 Ethylen(LOC) C
2
H
4
ppm 100,0 10,0 20,0
62 Ethanol(LOC) C
2
H
5
OH ppm 200,0 10,0 20,0
63 Styrene С
8
Н
8
% LFL 100,0 10,0 20,0