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®

GRANVILLE-PHILLIPS

6450 Dry Creek Parkway

 

Longmont, CO, U.S.A.

80503

 

Phone

303–652–4400

15 Elizabeth Drive

 

Chelmsford, MA, U.S.A.

01824

 

Phone

978–262–2400

To obtain a copy of this instruction manual online,

 

visit our website at 

www.brooks.com

 

(Adobe

®

 Reader

®

 version 5.0 or higher required)

 

© 2000, 2006, Brooks Automation.

Series 275

Mini-Convectron

®

 Vacuum 

Gauge Module with 

DeviceNet

®

 Digital Interface

Installation, Operation and Service Instructions

Summary of Contents for Mini-Convectron 275 Series

Page 1: ...GRANVILLE PHILLIPS Series 275 Mini Convectron Vacuum Gauge Module with DeviceNet Digital Interface Installation Operation and Service Instructions...

Page 2: ......

Page 3: ...844 Email co csr brooks com 2003 2006 Brooks Automation All rights reserved Granville Phillips Micro Ion Conductron Convectron and Stabil Ion are registered trademarks of Brooks Automation All other t...

Page 4: ......

Page 5: ...2 1 7 UL Listed 2 Chapter 2 Safety 3 Chapter 3 Introduction 5 3 1 General Description 5 3 2 Specifications 6 3 3 Power Supply Requirements 8 3 4 Component Description 9 3 5 Front Panel 10 Digital Disp...

Page 6: ...10 Vacuum Gauge Module Process Chamber Baking 31 Chapter 5 Troubleshooting 33 5 1 Introduction 33 5 2 Troubleshooting Procedures 33 5 3 Status Information 34 Chapter 6 Service 37 6 1 Introduction 37...

Page 7: ...onfiguring Trip Point Relays 22 Table 4 7 Checking 275 Mini Convectron Vacuum Gauge Module Status 23 Table 4 8 Zero Vacuum Adjust Example 23 Table 4 9 1x10 2 Vacuum Adjust Example 23 Table 4 10 Atmosp...

Page 8: ...iv Mini Convectron Module with DeviceNet Digital Interface...

Page 9: ...tems are missing or damaged the airfreight forwarder or airline making delivery to the customs broker must be notified within 15 days of delivery If an airfreight forwarder handles the shipment and th...

Page 10: ...uant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment gener...

Page 11: ...ions that may cause equipment to burst violently due to excessive pressures Make sure systems are depressurized before attempting to work on them WARNING Do not use the gauge tube to measure the press...

Page 12: ...d for safe operation When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at earth ground The power cord...

Page 13: ...as safety interlock valve digital input for a scanner or programmable logic controller The relay trip points can be set to customized pressure settings to turn power ON or OFF to the appropriate devi...

Page 14: ...2 2 in 55 88 mm PROCESS CONTROL CONNECTOR COMMUNICATIONS CONNECTOR 0 07 in 17 78 mm Table 3 1 Vacuum Connection Height Dimensions Vacuum Connections Height Dimensions inches mm 1 8 NPT Pipe Thread 1 2...

Page 15: ...ip Point Relays Single pole double throw relays SPDT Silver alloy gold clad contacts 1A 30 VDC resistive load or AC non inductive Table 3 3 Physical Specifications Parameter Specification Vacuum Conne...

Page 16: ...le 3 4 Surge current is the maximum momentary current when power is first applied Operating current is the steady state current during normal operation Current ratings for DeviceNet power are MAXIMUM...

Page 17: ...275 Mini Convectron Vacuum Gauge Module End Plate TO MEET PERFORMANCE SPECIFICATIONS GAUGE MUST USED IN ACCORDANCE WITH INSTRUCTIONS FOR USE WARNING POSSIBILITY OF INJURY EXISTS IF NOT BE INSTALLED W...

Page 18: ...P 2 control relays are energized 3 6 Side Panel Process Control Connector The Process Control Connector provides a connection to the 275 Mini Convectron Vacuum Gauge Module trip point relay contacts...

Page 19: ...ork master uses to address the 275 Mini Convectron Vacuum Gauge Module The addresses range from 0 63 00x 3Fx The switch setting is read when power is applied or when the device is reset MOD NET Status...

Page 20: ...eted the DUP_MAC_ID test yet The module may not be powered look at module status LED Self Test Flashing Red Green Module is in self test On line Not Connected Flashing Green Module has passed the Dup_...

Page 21: ...the sensor All other resistors of the bridge are mounted upon the exterior electrical feed through pins of the gauge tube Pin 4 serves as an electrical terminal for construction of the compensating n...

Page 22: ...14 Mini Convectron Module with DeviceNet Digital Interface...

Page 23: ...ll occur at pressures above 1 Torr if the gauge tube is not horizontal 2 For readings above 1 Torr the 275 Mini Convectron Vacuum Gauge must be installed in a horizontal position 3 It is recommended t...

Page 24: ...l cause forced convection at high pressure and provide erroneous readings 9 Do not bake the 275 Mini Convectron Vacuum Gauge electronics module at temperatures greater than 85 C 10 Do not install the...

Page 25: ...odule Installation DeviceNet Digital Interface Install 275 Mini Convectron Vacuum Gauge Module on Vacuum Chamber Refer to Page 18 START Install Trip Point Cable Refer to Page 19 Turn Power ON and Conf...

Page 26: ...e Installation 1 8 NPT Mount The 275 Mini Convectron Vacuum Gauge is designed to fit a standard 1 8 NPT female fitting 1 Remove the plug from the 275 Mini Convectron Vacuum Gauge tube port 2 Apply Tef...

Page 27: ...Connect the trip point cable to the connector on the 275 Mini Convectron Vacuum Gauge Module 3 Proceed with DeviceNet Digital Interface Installation WARNING If an NW type flange is being used ground t...

Page 28: ...n Table 4 2 and Table 4 3 An explicit message connection must be allocated to allow a polled connection to be allocated They may be allocated simultaneously as shown in Table 4 2 6 Configure the expec...

Page 29: ...t causes the trip point to change state as pressure is going down The trip point will clear when pressure rises above Trip_Point_Value Hysteresis Trip_Point_Value For the default hysteresis of 20 the...

Page 30: ...00 AF 43 hex Set Trip Point 1 Hysteresis 10hex 35hex 01hex 0Ahex CD CC 4C 3E hex default 20 Enable Trip Point Relay 1 10hex 35hex 01hex 6 1 Disable Trip Point Relay 2 10hex 35hex 02hex 6 0 Normal Pola...

Page 31: ...performing the following procedures Vacuum Adjustment 1 Evacuate the chamber 2 If you know the pressure is less than 1x10 4 Torr send zeroes with the Zero Adjust Service If the base pressure is betwe...

Page 32: ...0 Atmospheric Adjustment Parameters Altitude Above Sea Level feet Air or N2 Pressure Torr 0 760 1 000 733 2 000 707 3 000 681 4 000 656 5 000 632 6 000 609 7 000 586 8 000 564 9 000 543 10 000 523 Tab...

Page 33: ...to pressure Table 4 13 UINT Counts versus Pressure Pressure UINT Count Pressure UINT Count 0 0001 453 6 5 5490 0 001 464 10 5986 0 01 566 15 6246 0 015 613 20 6523 0 02 660 30 6736 0 05 885 50 6912 0...

Page 34: ...ommonly used gases Table 4 14 will help to locate the proper graph for a specific application 1 mbar 100 Pa 1 33 Torr so the charts may be used for pascal and mbar units A useful interpretation of the...

Page 35: ...p from 10 Torr N2 equivalent indicated pressure to the Argon curve and then horizontally to the left to a true pressure of 250 Torr Thus 250 Torr Argon pressure produces an indication of 10 Torr N2 eq...

Page 36: ...l Interface Chapter 4 Figure 4 2 Gas Pressures 1 x 10 4 to 1 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalent...

Page 37: ...Digital Interface 29 Figure 4 3 Gas Pressures 1 x 10 2 to 1000 Torr First Gas Set Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressur...

Page 38: ...ce Chapter 4 Figure 4 4 Gas Pressures 1 x 10 2 to 1000 Torr Second Gas Set Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit e...

Page 39: ...cess chamber at the desired temperature for the specified period of time 6 Allow the chamber to cool below 85 C 158 F 7 Hold the PC board gauge tube assembly and carefully push the end of the gauge tu...

Page 40: ...32 Mini Convectron Module with DeviceNet Digital Interface Chapter 4 Figure 4 5 Module Removal for Baking the Process Chamber...

Page 41: ...t surge upon power up If a switching power supply is used size current limit to two times working load Refer to Table 3 4 for power requirements 275 Mini Convectron Vacuum Gauge always reads 9 99e 09...

Page 42: ...uge tube 3 Refer to page 40 and replace gauge tube Cleaning will not solve this problem Readout indicating a pressure in the system that is very different than being observed by supporting gauges 1 Ga...

Page 43: ...error condition 2 Configured unrelated to error condition 8 Minor recoverable fault same as bit 3 Analog Sensor Status 11 Major unrecoverable fault same as bit 1 Analog Sensor Status Table 5 5 I O St...

Page 44: ...36 Mini Convectron Module with DeviceNet Digital Interface...

Page 45: ...the internal components of the gauge tube with trichloroethelyne perchloroethelyne toluene or acetone is possible but must be done carefully to prevent damage to the sensor wire Use the following pro...

Page 46: ...38 Mini Convectron Module with DeviceNet Digital Interface Chapter 6 Figure 6 1 Gauge Tube Removal from Module...

Page 47: ...he port is facing down as shown in Figure 6 2 Allow all the solvent to drain from the gauge tube 9 Allow the gauge tube to dry for 12 hours while pointing down 10 Make sure the solvent odor has disapp...

Page 48: ...ket in the direction of the arrow shown in Figure 6 1 5 Using a volt ohm meter measure the gauge tube pins listed in Table 6 1 and as shown in Figure 6 3 Figure 6 3 Mini Convectron Gauge Tube Pin Iden...

Page 49: ...the PC board gauge tube assembly 10 Install the eight end plate screws 11 Connect the Trip Point and DeviceNet cable connectors Gauge tube failures are most frequently caused by one of the following c...

Page 50: ...Yes please list the types of gas chemicals common names specific chemical biological materials or other potentially contaminating or harmful materials exposed to the product during its use ___________...

Page 51: ......

Page 52: ...U S A 01824 Phone 978 262 2400 To obtain a copy of this instruction manual online visit our website at www brooks com Adobe Reader version 5 0 or higher required 2000 2006 Brooks Automation Series 27...

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