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I. I 

Description

SECTION  I 

GENERAL  INFORMATION 

The 

2

70  ionization  gauge  controller  is  a  prec1s1on  instrument  designed  to  indicate 

vacuum  pressures  from  I  Torr  to  10-8  Torr,  I  mbar  to  10-8  mbar,  or  100  Pascal  to  10 -6 

Pascal,  air  equivalent.  The  basic unit  is  comprised  of a  power  supply,  electrometer,  emission 

controller,  and  ion  gauge  meter.  Dual  thermocouple  gauge  capability  and  process controls on 

the  ion  gauge  and  thermocouple  gauges  are  included  on  some  models.  Recorder  outputs 

provide capability for remote indication as well as continuous monitoring. 

In the  basic controller  the 

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70  will  display  pressure  data  in five linear decades,  10-4  to 

10 -8  Torr.  The range  of  readable data  is from  0.3  x  IQ-8  to  1

x  10-4 Torr.  The controller 

is  designed  to  utilize  a  Bayard-Alpert  type transducer  with  sensitivity  ranging  from  10/Torr

to 

2

5/Torr.  The unit is shipped  pre-adjusted for directly indicating pressure of a  gauge having

a  sensitivity of  I 0/Torr,  corresponding  to an emission current of 

mAdc. 

Degas  is  provided  by  conventional  resistive  (  1

2

R)  heating  of  the  grid  surfaces  with  a

nominal  80 watts of  power.  Ion  gauge pressure measurements are not possible during  degas. 

Ion  gauge  process  controls,  when  included,  provide  two  independent  set  points  which 

· operate individual  SPOT  relay  contacts.  Set  point  adjustment  over  the  entire  measurement

range  is by means of recessed front pane I controls.  Interlocks are  provided to  al low  operation

only  during  auto range operation when the filament is on and  the  gauge has had sufficient time

to  stabilize.

The thermocouple  section is comprised of two independent measuring circuits and,  when 

included,  extend  the  measurement range  of  the  controller  to  I  Torr  or  I  mbar.  Indication  is 

provided  by  two  I ½1  inch taut band ruggedized  meters.  Recorder outputs are also provided for 

each  of  the  thermocouple  circuits.  The  thermocouple  circuitry  is  designed  to  operate  with 

Granville-Phillips 

2

70006  or comparable transducers. 

Thermocouple  process controls,  when included,  provide  an individual  SPOT relay  contact 

set  point for  each  thermocouple  gauge. 

Set  point  adjustment  over  the  thermocouple's 

measurement range  is adjustable by  means  of recessed front panel controls.  The  controller is 

wired  such  that  the  set point for  thermocouple  No. 

can  be  used  to  switch  the  ion  gauge 

filament on and off,  thus  allowing  fully  automatic operation. 

Alt  Series 

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70  controllers  come  with  an  automatic  ranging  feature  which  can  be 

defeated  placing  the  controller  in a  manual  ranging  mode.  Autoranging  points are preset  to

occur  at  .95  x  IO-x  and  11.7  x  IO-x  •  While  in  the  manual  mode  the  controller  is capable  of 

readings  from  0.0  x  IO-x  to  1

2

.0  x  10-x.  Autoranging  eliminates  troublesome range  changing

in  a  variable  system  and  prevents unnecessary  shutdowns  due  to  momentary  pressure  bursts. 

The manual/auto range function is selected via a front panel switch. 

The 

2

70  ion  gauge  controller  provides direct  ion  gauge  pressure readout  in either  Torr, 

mbar  or  Pascal.  The  unit  of  measure  is  selectable  by  means  of  a  jumper  plug  inside  the 

controller  and  appropriate  front  panel  labeling. 

The  pressure  signal  is  converted  and 

displayed  in  the  desired  format,  thus  eliminating  cumbersome  conversion  tables  or 

calculations. 

1-1 

Summary of Contents for 270001 004

Page 1: ...1 H S D ENGINEERING INC 10828 BANCROFT AVE OAKLAND CA 94603 SERIES 270 IONIZATION GAUGE CONTROLLER INSTRUCTION MANUAL GRANVILLE PHILLIPS G1...

Page 2: ...on 1 3 for part number explanations 270001 004 270002 004 270003 003 270004 003 270014 003 270015 003 270016 003 270017 003 270019 003 270020 003 270021 003 270022 003 270038 002 270039 001 270043 101...

Page 3: ...ompany will at its option repair or replace or refund the selling price of an item which proves to be defective during the warranty period provided the item is returned to Granville Phillips Company t...

Page 4: ...for Troubleshooting 6 1 6 3 Input Power Problems 6 3 6 4 Power Supply Problems 6 3 6 5 Filament Turn on and Emission Problems 6 4 6 6 Electrometer Circuit 6 7 6 7 Autoranging Problems 6 8 6 8 Ion Gau...

Page 5: ...d sufficient time to stabilize The thermocouple section is comprised of two independent measuring circuits and when included extend the measurement range of the controller to I Torr or I mbar Indicati...

Page 6: ...mpedance is 2 Kohm 2 0 to 5V corresponding to IV decade of pressure Output impedance is 2 Kohms 0 to 2V corresponding to 0 to I Torr 0 to 1 33 mbar of air output impedance is 1 86 Kohms 1 up 117 FS do...

Page 7: ...rce regulations in order to file a valid claim with the carrier Any damaged material including all containers and packing should be held for carrier inspection Contact our Customer Service Department...

Page 8: ...t the voltage ratio is not changing with time If Voltage shunted 83 or more Voltage unshunted this should prevent the plasma from creating a dangerous voltage between these grounds If more than 10 vol...

Page 9: ...OLLER POWER IS ON EVEN WHEN FILAMENT IS OFF THEREFORE TO ELIMINATE POSSIBILITY OF ELECTRICAL SHOCK MAKE GAUGE CONNECTIONS FIRST Gauge cable assemblies with catalog numbers 270009 270010 and 270041 are...

Page 10: ...HALF NOT 5 IOWN 7YP PLUG SUPPLIED W TflSHELL TO B INSTALLED IN ALL UNVSED CABLE ACCESS HOLES D 0 0 TYP CABLE TIE UP TO 5 PLCS TYP CABLE REF 0 0 c CJ r l 10 FIG 3 3A CONNECTOR PICTORIAL SCREW ZPLCS NU...

Page 11: ...lug The jumper plug is located on the main printed circuit board directly behind the ion gauge panel meter see Fig 6 1 Place the appropriate label supplied over the range units lettering on the front...

Page 12: ...et II I recessed pot for adjusting the set point corresponding to decade and meter reading where the IG process relay II I energizes PC Set 112 recessed pot for adjusting the set point corresponding t...

Page 13: ...he range and autoronge switches until a meter zero is obtained Check the remaining ranges to assure a zero in all ranges 1f 4 5 Ion Gauge Process Control Set Point Adjustment The IG process control fe...

Page 14: ...wed if the system pressure is between 5 x IO 7 Torr Fig 4 3 can be used to control a process where a large pressure rise is expected once the process is initiated In the example shown the process woul...

Page 15: ...l scale Process control is operational only when the autorange switch is on 4 During autorange operation the electrometer will always return to the 10 decade any time the filament relay de energizes 4...

Page 16: ...d grid wire size is increased to maintain a line resistance of less than 06 ohms per lead Consult Granville Phillips for long cables Degas power of 80 watts nominal is available using a 10 foot cable...

Page 17: ...the speed of the electron In the ion gauge tube the grid is placed at a positive voltage such that most of the electrons emitted at the filament are accelerated through the grid structure and into a d...

Page 18: ...0 3 to 1 2 volts depending upon the setting of the emission adjust potentiometer R28 to pin 2 of IC I0 A results in a negative going output from IC I0 A This increases the output of the current source...

Page 19: ...le is less than I x 10 3 Torr Amplifier ICI I is a low drift inverting amplifier with a DC gain of 200 Initial adjustment of the amplifier is made by adjusting R54 for an output of 2 0V de with the 27...

Page 20: ...lorado 80303 Telephone 303 443 7660 Repairs properly made with equivalent electronic parts and rosin core solder which do not damage other portions of the unit do not represent a violation of the warr...

Page 21: ...troller requirements Connect controIler to proper source of power or reset selector switching as shown in Fig 4 2 2 Incorrect fuse rating 3 Defective component of power supply P C board Remove gauge c...

Page 22: ...QII Q 17 and associated components I0 Defective triac SCRI or pulse transformer TI Using an oscilloscope check for firing pulses on SCRl gate to anode I across C23 during period when light is on If p...

Page 23: ...or J3 H I Defective relay K3 Pins 14 and 15 open I Defective emission current amplifier IC I0 B or related circuit component Fig 5 4 6 6 Electrometer Circuit Refer to Fig 5 5 and Fig 6 1 I Zero meter...

Page 24: ...its inoperative 2 One process control circuit inoperative I Normal operation Autoranging switch is in the manual position 2 Defective delay circuit component Ql6 Ql5 R36 R37 or Cl3 Check for 23V de on...

Page 25: ...circuit will not its associated relay 2 One P C circuit will not de energ its associated relay 3 Both P C circuits cannot be set I Defective amplifier IC13 A or B or associated component Check the vo...

Page 26: ...C 27 I I 3 _ 4 cJ h D I cm C 31 1 c21 I U 1 3 B 5 EJ g B R47 cR33 c J 8 n 28 r G t 0 G J I R i T4 Rm r11 n R f CR3 y lJ1 jJ u uz L____ K4 I f 1 p 7 1R53 a C2B l 110 l I I CR 3 5 I r 5 QZ2 I FIG 6 2 C...

Page 27: ...Field effect transistor Selected U235 Protector Surge Voltage RCA SGT03U13 Diodes Zener diode 12Y I OW IN4742A Zener diode 6 0Y I OW 1 Schauer SZ6 0 1 IO mA Zener modified D38W14 Signal diode IN4007 S...

Page 28: ...carbon Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Resistor Array Pot I0 0 Kohm 20 I OW Switches Switch fil control man SPOT on x mom C K 7...

Page 29: ...Switch power SPOT PCV sit on x on V C K 7101SAV 2Q I IC t s uq A Switch degas DPDT PCV sil on x on C K 720lSAV 2Q L t s w9Av c K I I I s t q r v i 112 Fuses Fuse 1 25 Amp 250V slow blow English Litte...

Page 30: ...I 2 Vo ks s J vi 2 cJ _ e J c r f v l us c l J _ v r L 1 c J l l c u _ _c 1 s V V v _ 1 __ 2 OD U u J J o 0 V O P _ i2t4c J _ C ll l e c Q t _ i _ S L J 0 uc J S t1 oo __ _ _ z_...

Page 31: ...ANGING TO AUTORANGING 7 NOTES 1 ALL RESISTORS IN OHMS SW 5 UULESS OTHERWISE NOTED 2 RESISTOR ARRAYS RA TYPES 118W 3 7 DENOTES SIGNAL GROUND 4 rnDENOTES CHASSIS GROUND 5 DENOTES TEST POINTS 12V 1 _ I C...

Page 32: ...6 RA6 S 22K A40 1M 14 11 6 ICS 14516 UP DOWN COUNTER RESET 12voc _lC18 0 1 FD 1R42 2M Efr_ c L OVDC R41 2M 1 3 4 SEC r C 17 0 1pFD CLOCK U D COUNTER TRUTH TABCE IC4 i PIN i PIN 3 I 4 ii N 1 1 r 0 I 1...

Page 33: ...OENTIFICATION J3 1G ACCESSORY A57 10K 013 A37 100K PROCESS DELAY K 1 2 SK NOTES C13 6S F 23V R39 5K 20 015 012 K2 2 5K PROCESS CONTROL 2 1 ALL RESISTORS ARE IN OHMS 5W 5l UNLESS OTHERWISE NOTED 2 RESI...

Page 34: ...6 7 79 3 __ J6 8 t r 5 NOTE At L REfSt STOR S A E IN OHIVS SV t 5 C Nt ESS OTNERW t SC SPe Cl l D e Pcfi StSTOJ S IN ARRAYS RA TYPES ARE f 8 Iv 3 DEN OTCS S G NAL G 0 IN 7 DE VOTE S CHASS c RO 1 IID C...

Page 35: ...02 FIG 5 8 THERMOCOUPLE SCHEMATIC 5 11 n 004973 103 5 12 r 11 Wl 1 r u 0 ___ __ 4 _ M ll t u a g I 1 I _ rJ t Zi I_ t t...

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