3. STEM mode
(a) Find an area of interest at a low magnification (~10 k);
(b) In the
STEM
menu click
STEM
, Diffraction mode will be activated; press
the Diffraction button to deactivate the Diffraction mode;
(c) Under the
Direct Alignments
, perform Beam Shift, Beam-Tilt Pivot Points X/Y, and
Rotation Center (turn the outer ring of the objective focus know counter-clock wise to
stop the wobbling), correct the Condenser astigmatism (triangular shape);
(e) Press the Diffraction button to return back to the Diffraction mode;
(f) Insert the appropriate STEM detector.
(g) Choose a proper camera length (~ 100 – 150 mm for LM STEM) and spot size;
(h) Click
Search
or
Preview
to view the image, and click
Focus
and move the red box to
a contrasty area to adjust focus using the objective focus knob;
(i) Click
Acquire
to obtain an image. In the TIA analysis mode, select the image or panel
and save them by right-clicking and choosing
Export Data
.
4. Finishing
(a) Close the column valves (under the
Setup
menu, Fig. 1);
(b) Reset the specimen holder position, take it out from the microscope, remove your
specimen from the holder, and re-insert the holder back;
(c) Retract the objective and diffraction apertures.
(d) Check the web scheduler. If you are the last user for the day, remove the LN
2
dewar,
place a paper towel on the dewar stand and immediately go to the
Vacuum
panel
under the
Setup
menu (Fig. 1), click flap-out menu
, in the
Cryo
tab click
Cryo
Cycle
(it takes 4 hrs to complete the process);
