System Overview
:
System Capabilities
C O N F I D E N T I A L – FEI Limited Rights Data
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System Capabilities
The Scios is a combination of two systems:
•
Scanning Electron Microscope (SEM): produces enlarged images of a variety of specimens achieving
magnification over 100 000× providing high resolution imaging in a digital format.
•
Focused Ion Beam (FIB) system: capable of fast and precise milling of the specimen material, revealing the
structure under the surface layer, making cross sections, deposition layers, etc. The ion system produces high
resolution images as well.
The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three
dimensions.
This important and widely used analytical tool provides exceptional field of view, minimal specimen preparation,
and the ability to combine the technique with X-ray microanalysis.
Users can switch between the two beams for quick and accurate navigation and milling. Convergence of the SEM
and FIB at a short working distance allows precision “slice-and-view” cross-sectioning and analysis at high
resolution. The instrument provides optimum throughput, resolution and automation.
FIB/SEM instrument provide an expanded range of capabilities not possible with separate FIB and SEM tools:
•
High-resolution electron beam images of FIB cross sections without eroding the feature of interest
•
Real-time cross-section images and videos with the electron beam during FIB milling
•
Focused electron beam charge neutralization during FIB milling
•
High resolution elemental microanalysis of defect cross sections
•
Imaging of sample surfaces with the electron beam during navigation without erosion or gallium implantation
from the ion beam
•
TEM sample preparation with
in situ
conductive coating
System Performance
The equipment is intended as a standalone system.
The main instrument components used for imaging of the samples are:
•
Electron / Ion source
The beam of electrons or ions (particles) is emitted within a small spatial volume with a small angular spread
and selectable energy.
•
Lens system
The beam enters the lens system consisting of several electromagnetic or electrostatic lenses and exits to hit
the specimen surface.
•
Scan unit
The scan generator signal, fed to the deflection systems, moves the beam in a raster pattern over the specimen
area. This signal, modulated by the detection system signal produces the onscreen imaging of the specimen
surface.
•
Detection unit
Particles striking the specimen react with atoms of the sample surface in various manners:
– The electron beam produces electrons and photons (X-rays).
– The ion beam produces ions, electrons and photons (X-rays).
The detector system picks up the particles or photons, converts them into a digital signal which is then sent to
the control PC and shown on the monitor.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...