Software Control:
Preferences Dialog
C O N F I D E N T I A L – FEI Limited Rights Data
3-49
Low Vacuum
The specimen chamber purging procedure (see Chapter 2) can be customized at this section.
FIGURE 3-27
Low Vacuum Preferences
For highly outgassing samples the procedure can take very long time. In this case the
Fast Low Vacuum Pumping
Through High Vacuum
check box must be cleared; the specimen chamber is then pumped to a pressure slightly
lower then a desired LoVac pressure (see custom settings bellow) and proper purging ensures good water vapor or
gaseous atmosphere in the chamber.
Purge Mode
area contains following radio buttons:
•
No Purge
– the purging is switched off and the chamber pressure goes directly to the set Low Vacuum mode
value. The gas mixture in the chamber slowly changes to the new gas type.
•
Automatic
– all purging parameters are set automatically, according to the mounted Low Vacuum detector
(Cone).
•
Custom
– custom settings (see below) are used.
Purge Settings
area contains following
Automatic
/
Custom
settings and controls:
•
Minimum Pressure
•
Maximum Pressure
•
Number of cycles
Set above three parameters desired values for the procedure.
•
The
Purge
button enables to start the purging (using the actual Purge Settings) manually when the system is
already pumped to the Low Vacuum; otherwise, the button is disabled. When the purging is running, the Purge
button becomes highlighted. Clicking on the highlighted button stops the actual purging procedure and returns
the system to operation in Low Vacuum.
Note
During the purging procedure, the chamber pressure is not ready for SEM operation (the vacuum status is Pumping).
Therefore, clicking the Purge button automatically switches off the accelerating voltage.
The Purge Settings is not remembered separately for each user. If it is of any importance, please check these Preferences
before starting the Low Vacuum operation.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...