System Options
:
C O N F I D E N T I A L – FEI Limited Rights Data
7-2
•
ResolveRT
•
DualBeam Course
– Acht
•
Scios Course
– Hillsboro / China / Japan
•
Advanced Course DualBeam
– Acht
•
DualBeam Short Course
– Acht
•
On-site Training
/
Support
(1 day) – North America / China / Japan
•
MEMS Hetaing Stage –
For further up-to-date information on system options please contact your local FEI representative.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...