FD TMS, Installation And Operation Manual

Page: 35 / 38

- 35 -
31 Hydrogen (H
2
) 3.4224 0.0899 1.0040
32 Hydrogen Bromide (HBr) 0.0861 3.61 0.9940
33 Hydrogen Chloride (HCI) 0.1911 1.627 0.9940
34 Hydrogen Fluoride (HF) 0.3482 0.893 0.9940
35 Hydrogen Iodide (HI) 0.0545 5.707 0.9930
36 Hydrogen Sulfide (H
2
S) 0.2278 1.52 0.8390
37 Helium (He) 1.2418 0.1786 1.4066
38 Krypton (Kr) 0..0593 3.739 1.4066
39 nitrogen (N
2
) 0.2486 1.25 0.9940
40 Neon (Ne) 0.2464 0.9 1.4066
41 Ammonia (NH
3
) 0.5005 0.76 0.7147
42 Nitric Oxide (NO) 0.2378 1.339 0.9702
43 Nitrogen Dioxide (NO
2
) 0.1923 2.052 0.7366
44 Nitrous Oxide (N
2
O) 0.2098 1.964 0.7048
45 Oxygen (O
2
) 0.2196 1.427 0.9861
46 Phosphorus Trichloride (PCI
3
) 0.1247 6.127 0.3559
47 Phosphorane (PH
3
) 0.261 1.517 0.6869
48 Phosphorus Pentafluoride (PF
5
) 0.1611 5.62 0.3002
49 Phosphorus Oxychloride (POCI
3
) 0.1324 6.845 0.3002
50 Silicon Tetrachloride (SiCI
4
) 0.127 7.5847 0.2823
51 Silicon Fluoride (SiF
4
) 0.1692 4.643 0.3817
52 Silane (SiH
4
) 0.3189 1.433 0.5954
53 Dichlorosilane (SiH
2
CI
2
) 0.1472 4.506 0.4095
54 Trichlorosilane (SiHCI
3
) 0.1332 6.043 0.3380
55 Sulfur Hexafluoride (SF
6
) 0.1588 6.516 0.2624
56 Sulfur Dioxide (SO
2
) 0.1489 2.858 0.6829
57 Titanium Tetrachloride (TiCI
4
) 0.1572 8.465 0.2048
58 Tungsten Hexafluoride (WF
6
) 0.0956 13.29 0.2137
59 Xenon (Xe) 0.0379 5.858 1.4066