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ENTEGRIS, INC.

USER GUIDE

INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520

Table of Contents

Introduction

.......................

Identifying Nonstandard

Product Configurations

...... 2

Principle of Operation

......... 2

Factory Configured

............. 3

Continuous versus

Batch Control

................. 3

Calibration Reference

Conditions

..................... 3

General Considerations

.........

Power Supply Requirements ... 4
Storage Temperature Range

... 4

Operating Ambient

Temperature Range

.......... 4

Operating Process

Temperature Range

.......... 4

Line Pressure ....................  4
Pressure Drop ....................  4
Dimensions  ......................  5

Installation

........................

Provided Equipment

........... 9

Mounting Requirements

...... 10

Mechanical Installation

...... 11

Power Supply Requirements .. 12
Electrical Connections

....... 14

Wiring Diagram

................ 16

Optional Connections

......... 17

Setpoint Signal Setup

......... 18

Calibration Graphs

............ 19

Unit Operation

..................

Operating Environment

...... 20

Performance

................... 21

Operational Reliability

........ 22

Status and Alarming

.......... 22

LED Status Codes

............. 23

Diagnostic Guide

.................

Maintenance

....................

Normal Operation

............. 27

Re-zero Function

.............. 27

Reference

...........................

Physical Specifications

....... 28

Electrical Specifications

..... 28

Performance Specifications ... 28

Ordering Information

..........

Certifications

...................

CE Compliance

................ 32

Repair and Warranty Service

...

Technical Support

..............

For More Information

.........

Terms and Conditions

.........

Product Warranties

............

Summary of Contents for InVue NT6510

Page 1: ...INVUE INTEGRATED FLOW CONTROLLERS MODELS NT6510 NT6520 User guide P N 01 1032525 Rev A 09 15 CRITICAL MATERIALS HANDLING ...

Page 2: ......

Page 3: ...rovided Equipment 9 Mounting Requirements 10 Mechanical Installation 11 Power Supply Requirements 12 Electrical Connections 14 Wiring Diagram 16 Optional Connections 17 Setpoint Signal Setup 18 Calibration Graphs 19 Unit Operation 20 Operating Environment 20 Performance 21 Operational Reliability 22 Status and Alarming 22 LED Status Codes 23 Diagnostic Guide 24 Maintenance 27 Normal Operation 27 R...

Page 4: ...TE Nonstandard InVue Inte grated Flow Controllers may be iden tified by the model number found on the product label Specifications for nonstandard InVue Integrated Flow Controllers are available by contacting Entegris Nonstandard InVue Integrated Flow Controllers Model NT6510 are identified with an N followed by a number code For example in part number 6510 T2 F03 B06 A P7 U3 N02 the N02 designate...

Page 5: ...roller type is for appli cations requiring flow rate control where the integral valve module will fully close between batch dispense cycles If total volume needs to be controlled an additional separate totalizer device must be employed Calibration Reference Conditions Unless otherwise noted the speci fications listed for the InVue Inte grated Flow Controller are referenced under the following oper...

Page 6: ...bient Temperature Range The flow controller is designed to operate in ambient temperature cleanroom environments It is speci fied to operate at temperatures of 10 C 65 C 50 F 149 F Operating Process Temperature Range The flow controller is designed to operate in process temperatures of 10 C 65 C 50 F 149 F Line Pressure Depending on the operating range of the flow controller being used the system ...

Page 7: ...m 0 67 195 1 mm 7 68 The following fitting size and flow range combinations are available Flaretek and Pillar unless otherwise noted Fitting Size Flow Range mL min TL 0 15 TT 0 25 T0 Y0 0 50 T1 Y1 0 125 T2 Y2 0 250 T3 Y3 0 500 T4 Y4 0 1250 1 4 Yes Yes Yes Yes Yes Yes Yes 3 8 Yes Yes Yes Yes Yes Yes Yes 1 2 Yes Yes Flaretek only Note The operating range for T code flow ranges default is 10 100 of f...

Page 8: ... FLOW CONTROLLERS MODELS NT6510 NT6520 A End View Top View Side View B C Super 300 Type Pillar Tube Fittings Inlet Outlet Port Connection Dimensions A B C 1 4 117 9 mm 4 64 17 0 mm 0 67 159 3 mm 6 27 3 8 117 9 mm 4 64 17 0 mm 0 67 167 1 mm 6 58 ...

Page 9: ... 98 3 4 129 0 mm 5 08 23 6 mm 0 93 234 2 mm 9 22 The following fitting size and flow range combinations are available Flaretek and Pillar unless otherwise noted Flow Range mL min Fitting Size T5 Y5 0 2 5 T6 Y6 0 5 T7 Y7 0 10 T8 Y8 0 20 T9 Y9 0 40 3 8 Yes Yes 1 2 Yes Yes Yes 3 4 Yes Yes Note The operating range for T code flow ranges default is 10 100 of full scale flow The operating range for Y co...

Page 10: ...T6510 NT6520 NT6520 Super 300 Type Pillar Tube Fittings End View Top View Side View B A C Inlet Outlet Port Connection Dimensions A B C 3 8 117 3 mm 4 62 15 7 mm 0 62 200 2 mm 7 88 1 2 120 9 mm 4 76 18 3 mm 0 72 205 2 mm 8 08 3 4 129 0 mm 5 08 23 6 mm 0 93 214 1 mm 8 43 ...

Page 11: ...his unit has been assembled and double bagged under cleanroom conditions To maintain purity only open under cleanroom conditions CAUTION Do not tighten the nuts that protect the tube connections during shipment See the Prepare Fluid Lines Section on page 9 Tightening these nuts without the proper tubing installed may damage the unit s tube connections ...

Page 12: ...rify the valve and the electrical cable are free from mechanical stress from the surrounding equipment NOTE The flow controller requires mounting in the direction of the fluid flow Mounting Requirements The flow controller may be mounted in any orientation The unit does not require straight lengths of tubing at the inlet or the outlet connection Recommended hardware 10 M4 Pan head 10 M4 Flat washe...

Page 13: ...fit ting flare and assembly procedures at www entegrisfluidhandling com follow the Fittings Tube Fittings Flaretek Tube Fittings links For detailed Super 300 Type Pillar tube fitting assembly instructions contact Nippon Pillar Packaging Company Ltd CAUTION Over tightening of the nuts will result in damage to the fitting Flare each tube end prior to installation Connect Fluid Lines Process fluid tu...

Page 14: ...sed only to power similar measure ment type devices The power supply must not be used to power other inductive loads such as motors relays or solenoids These devices may produce electrical transients that may affect unit measurements An induced power spike creating an interruption in power greater than 10 milliseconds in duration may cause the unit to reset In addition to providing clean power the...

Page 15: ... unit Short Protection The flow controller will not be damaged or compromised in any way if any combination of wires are shorted together Circuit Protection Fuse the three input power lines to each individual InVue Integrated Flow Controller The three lines are 2 Red Pin R 24 VDC main power 1 0 Amp nominal 3 Orange Pin M Flow output 24 VDC supply 4 Yellow Pin T Pressure output 24 VDC supply Use a ...

Page 16: ...E CONNECTIONS PIGTAIL CABLE Wire Color Marker No Function Yellow 4 Pressure output 24 VDC supply Brown 1 Pressure output 4 20 mA output Orange 3 Flow output 24 VDC supply Blue 5 Flow output 4 20 mA output Green 9 Re zero input Pink 11 Setpoint voltage 0 10 or 0 5 VDC Gray 12 Setpoint common Tan 10 Setpoint current 4 20 mA Black 8 Ground 24 VDC common Red 2 24 VDC Violet 6 Factory use only do not c...

Page 17: ... connected to 10 Tan Pin U wire 4 20 mA setpoint and 12 Gray Pin S wire common setpoint or to 11 Pink Pin G wire voltage set point and 12 Gray Pin S wire common setpoint Connect 9 Green Pin J re zero input to switched normally open 24 VDC 10 main power supply in order to have the same ground as the 8 Black Pine E ground NOTE The 24 VDC connected to re zero must be the main power supply in order to...

Page 18: ... 0 10 VDC For re zeroing Electrical cable Electrical cable 09 Green Pin J 02 Red Pin R 08 Black Pin E 12 Gray Pin S 10 Tan Pin U 02 Red Pin R 08 Black Pin E 12 Gray Pin S 11 Pink Pin G 09 Green Pin J 03 Orange Pin M 05 Blue Pin L 04 Yellow Pin T 01 Brown Pin A 13 Stripes Pin C 14 Stripes Pin N 02 Red Pin R 09 Green Pin J 06 Violet Pin O 07 White Pin P A V 11 Pink Pin G 10 Tan Pin U 12 Gray Pin S 8...

Page 19: ...or inlet pressure apply 24 VDC to 4 Yellow Pin T wire and measure the 4 20 mA pressure output signal from 1 Brown Pin A wire These outputs are electronically isolated from all other circuit connections Using a separate power supply is possible Power supply 24 VDC 10 Flow display measurement device Pressure display measurement device Electrical cable 03 Orange Pin M Flow loop 05 Blue Pin L 04 Yello...

Page 20: ...formulas to adjust your setpoint signal output device to match the flow range of the unit Repeat the calculations for multiple control points FLOW 6510 T4 F02 B06 K P1 U3 99999 1 4 Flaretek 0 1250 mL min Flow Range 0 1250 mL min 4 mA or 0 VDC at 0 mL min 20 mA or 5 or 10 VDC at 1250 mL min Formulas and Example Calculations ...

Page 21: ...erate below 10 psig mAdc Output vs Full Scale Flow 10 100 of Full Scale Flow T Code Flow Range mA Output vs Pressure 24 20 16 12 8 4 0 Percent of Full Scale Flow mAdc Output 0 20 40 60 80 100 120 Output not specified below 4 8 mA 5 FS flow mAdc Output vs Full Scale Flow 5 100 of Full Scale Flow Y Code Flow Range For product with operating range 5 100 of full scale flow Y code flow range do not ope...

Page 22: ...n viscosity and specific gravity of the liquid The unit must be re zeroed at operating process temperature conditions and after any temperature change for the accuracy specifica tions to apply See the Maintenance Section on page 27 for re zeroing instructions The P8 PFA code sensor interface is recom mended for process temperatures higher than 40 C 104 F For operation above 65 C 149 F contact Ente...

Page 23: ...outputs the flow to a pressurized canister at 69 kPa 10 psig the differential pressure available to the unit will only be 34 kPa 5 psig 103 kPa 15 psig inlet pressure minus 69 kPa 10 psig canister pres sure This scenario does not meet the pressure drop requirement of 69 kPa 10 psig for this unit and it may not perform within the specification For this example either increase the inlet pressure or ...

Page 24: ...ching the interior of the device in the case of a primary seal failure Weep holes are provided from the secondary containment regions Drop and Topple If the unit topples over from a 45 degree angle onto a bench top the performance will not be com promised and the unit will not be externally damaged Cable Pull The cable will withstand a static pull test of 9 1 kg 20 lbs straight and 4 5 kg 10 lbs a...

Page 25: ...g Trip point P1 15 62 kPa 9 psig fixed Delay time P delay P delay default Ø Only active with setpoint 0 Will not trip on P2 Pressure P1 return to normal after P delay Config urable Disabled Config urable Factory Enabled G Off G Off Off Off G Off 6 SETPOINT NOT EQUAL TO FLOW Delta SP flow Delay time SP delay SP delay default Ø Only active with setpoint 0 Flow return to normal after SP delay Config ...

Page 26: ...ored instead of the flow output Check the wiring to ensure the flow output is wired correctly 4 Current output is extremely high 25 mA The incorrect wires are connected to the flow monitoring device Confirm wiring Wire functions are printed on the unit label The 4 20 mA flow signal is shorted to power 24 V Examine all electrical connections Please note if wires are stripped back too far before ins...

Page 27: ...ee Symptom 6 Insufficient line pressure insufficient pressure drop Verify the inlet pressure is adequate as described in the Operating Pressure Drop Requirements on page 21 Verify the pressure drop meets the requirements according to the Operating Pressure Drop Requirements on page 21 8 Flow output is not res ponsive to changes in setpoint signal Incorrect wiring of setpoint signal Review Wiring D...

Page 28: ...responding to a setpoint 24 VDC is continuously applied to 9 Green Pin J re zero input line Re zero input line should only be energized when re zero is needed 10 Unit opens port to port leak when power is turned off Line pressure can push the motorized valve open Keep power applied to unit Do not pressurize unit while powered off ...

Page 29: ...as the ground 8 Black Pin E wire Do not continuously apply 24 VDC to this 9 Green Pin J wire In most applications the re zero procedure may be automated using switches a PLC or other logic controller devices When the re zero function is activated the flow controller valve module will close fully to ensure that fluid is not flowing The unit will verify the no flow condition and then re zero the flo...

Page 30: ... 250 ohm Lift off voltage for current loops 12 VDC Load effect on 4 20 mA outputs RLoad 0 600 ohms no effect Electrical connection FEP jacketed or PVC jacketed cable Performance Specifications Operating range options 10 100 of full scale flow Code T flow range default 5 100 of full scale flow Code Y flow range Flow measurement 1 of full scale calibrated using DI water 23 C 73 Pressure accuracy 1 o...

Page 31: ...are available in the following fitting sizes and flow range combinations Flaretek and Pillar unless otherwise noted InVue NT6510 Fitting Size Flow Range mL min TL 0 15 TT 0 25 T0 Y0 0 50 T1 Y1 0 125 T2 Y2 0 250 T3 Y3 0 500 T4 Y4 0 1250 1 4 Yes Yes Yes Yes Yes Yes Yes 3 8 Yes Yes Yes Yes Yes Yes Yes 1 2 Yes Yes InVue NT6520 Fitting Size Flow Range L min T5 Y5 0 2 5 T6 Y6 0 5 T7 Y7 0 10 T8 Y8 0 20 T...

Page 32: ...plication and chemical media Please contact Entegris for best selection Inlet Outlet Port Connection F02 1 4 Flaretek tube fitting F03 3 8 Flaretek tube fitting F04 1 2 Flaretek tube fitting W02 1 4 Super 300 type Pillar tube fitting W03 3 8 Super 300 type Pillar tube fitting Flow Range TL 0 15 mL min TT 0 25 mL min T0 0 50 mL min T1 0 125 mL min T2 0 250 mL min T3 0 500 mL min T4 0 1250 mL min Y0...

Page 33: ...in Y5 0 2 5 L min Y6 0 5 L min Y7 0 10 L min Y8 0 20 L min Y9 0 40 L min Sensor Interface P7 CTFE for acids bases and oxidants typically P8 PFA for solvents and temperatures 40 C typically Note Selection is dependent on application and chemical media Please contact Entegris for best selection Code T flow ranges are scaled to zero flow measurement is from 10 100 of full scale flow range Code Y flow...

Page 34: ...copy of the Material Safety Data Sheet MSDS for each hazardous substance identified must be in cluded with the returned product WARNING Mishandling products exposed to a hazardous substance may result in death or serious injury Technical Support For technical support contact Entegris at 1 800 394 4084 Please have the complete model number chemical and application information ready when calling For...

Page 35: ...ENTEGRIS INC USER GUIDE 33 INVUE INTEGRATED FLOW CONTROLLERS MODELS NT6510 NT6520 ...

Page 36: ... 2015 Entegris Inc All rights reserved Printed in USA P N 01 1032525 Rev A 09 15 3963 7965ENT 0915 Entegris the Entegris Rings Design Creating a Material Advantage InVue and Flaretek are trademarks of Entegris Inc Turck is a registered trademark of Turck Inc Kalrez and Viton are trademarks of E I du Pont de Nemours and Company Pillar is a registered trademark of Nippon Pillar Packaging Company Ltd...

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