ENTEGRIS, INC.
USER GUIDE
11
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Mechanical Installation
The standard InVue Integrated Flow
Controller must be used with the
proper tubing size and fittings.
NOTE:
For detailed tube flaring
instructions, see ”Flaretek tube fit
ting flare and assembly procedures”
at www.entegrisfluidhandling.com
(follow the Fittings>Tube Fittings>
Flaretek Tube Fittings links).
For detailed Super 300 Type Pillar
tube fitting assembly instructions,
contact Nippon Pillar Packaging
Company, Ltd.
CAUTION: Over-tightening of
the nuts will result in damage
to the fitting.
!
Flare each tube end
prior to installation
Connect Fluid Lines
Process fluid tube
Slide the nut onto the tube
Prepare Fluid Lines
Process fluid tube
