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Quick Guide
EC-Link-Software (PAT-Tray, PAT-Stand-16, PAT-Chamber-16)
Release 2.5
The information in this manual has been carefully checked and believed to be accurate;
however, no responsibility is assumed for inaccuracies.
EL-CELL GmbH maintains the right to make changes without further notice to products
described in this manual to improve reliability, function, or design. EL-CELL GmbH does not
assume any liability arising from the use or application of this product.
EL-CELL GmbH
Tempowerkring 8
21079 Hamburg - Germany
phone: +49 (0)40 790 12 733
fax: +49 (0)40 790 12 736
e-mail:
web:
www.el-cell.com
