Edwards xds35i, Instruction Manual, Page: 20 / 40

A730-01-880 Issue E
Page 14 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
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Support the vacuum pipeline to prevent loading of the coupling joints.
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If necessary, incorporate flexible bellows in your system pipelines to reduce the transmission of vibration and
to prevent loading of the coupling joints. If you use flexible bellows, you must ensure that you use bellows
that have a maximum pressure rating which is greater than the highest pressure that can be generated in
your system. We recommend that you use Edwards bellows.
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Incorporate an inlet isolation valve in the pipeline from the vacuum system to the pump, so that you can
isolate the vacuum system from the pump when it is switched off and prevent the suckback of process gases
and debris into the vacuum system.
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Ensure that the sealing surfaces are clean and scratch-free.
We recommend that you use an exhaust extraction system suitable for use with all of the process gases you will pump.
Ensure that the exhaust extraction system cannot become blocked or obstructed when the pump is operating.
A small amount of tip seal wear product may collect in the exhaust duct of the pump. The dust may be blown out
with the initial burst of air after the pump has been vented. This is quite common and the amount of dust seen will
reduce over time.
3.7 Leak test the system
After you have installed the XDS pump, leak test the system and seal any leaks found.