6. Maintenance
6.1 Safety information
WARNING:
Obey the safety instructions in this section and take note of appropriate precautions.
Failure to observe these instructions may result in injury to people and damage to
equipment.
WARNING:
In order to maintain the ATEX certification, all maintenance work must be carried out
in accordance with this nXDS instruction manual, the Replacement tip seal manual
and the nXDS maintenance manual, only using our genuine spare parts.
WARNING:
Disconnect the pump and other components from the electrical supply to prevent
accidental operation.
WARNING:
The pump may be contaminated with the process chemicals that have been pumped
during operation. If so, ensure that the pump is decontaminated before maintenance
and take correct precautions to protect people from the effects of dangerous
substances if contamination has occurred.
WARNING:
Do not touch or inhale the thermal breakdown products of fluorinated materials
which may be present in the pump if the pump has been heated to 260 °C and above.
Fluorinated materials are safe in normal use but can decompose into very dangerous
substances (which may include hydrofluoric acid) if heated to 260 °C and above. The
pump may have overheated if it was misused or if it was in a fire. Safety Data Sheets
for fluorinated materials used in the pump are available on request; contact us or the
supplier.
CAUTION:
External surfaces of the pump should be cleaned using a damp cloth. Care must be
taken with solvent
‑
based cleaning fluids as they may remove important information
from the product labels.
The pump is designed to require little user maintenance. Observe the following
guidelines when carrying out maintenance on the pump:
Page 38
A73501880_G - Maintenance
Summary of Contents for nXDS10i nXDS15i
Page 57: ...Page 55 A73501880_G Service ...
Page 58: ...edwardsvacuum com ...
