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Introduction
A590-00-880 Issue D
1.3
Description
1.3.1
The iH HTX system
For enhanced performance on harsh duty processes, especially those prone to condensation of process gases inside
the pumping system. This is achieved by:
z
Increased dry pump operating temperature
z
Increased gas purge capacity
z
Increased exhaust diameter and exhaust TMS (Thermal Management System)
z
Provision for optional heated exhaust purge.
1.3.2
The iH NRV systems
For Flat Panel Display processes.
1.4
Priority of control
The system can be controlled by a number of modules: the Pump Display Terminal (PDT), from the tool through the
IM interface and communications module, iTIM, or from the Single Equipment Monitor (refer to
Figure 3
). Only one
of these can have control of the iH system at any one time. That is, once one of these has control of the iH system,
control requests from the others are denied.
The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate
to indicate 'in control'. Please refer to
Figure 2
.
Figure 2 - Priority of control
1. PDT
2. iM
3. iTIM
4. None in control
Take
Release
Summary of Contents for iH1000
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