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Page 17
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Installation
A590-00-880 Issue D
3.6
Connect the nitrogen supply
CAUTION
Ensure that your nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn't,
the flow sensors may not operate correctly, the gas pipelines may become blocked or the iH system may be
damaged.
Refer to
Figure 3
, item 8.
For optimum nitrogen, ensure that your nitrogen supply complies with
Table 2
.
3.6.1
Flammable/pyrophoric materials
When flammable or pyrophoric materials are present within the equipment you must:
z
Not allow air to enter the equipment
z
Ensure that the system is leak tight
z
Ensure that pumped gases do not enter their flammable range. This can be achieved by diluting flammable
gases/vapours or oxidisers in the pump by supplying sufficient inert gas purge, for example dilution with
nitrogen to below one quarter LEL (lower explosive limit) or, if that is not practical, to below 60% LOC
(limiting oxidant concentration).
z
For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-
090) or contact Edwards: refer to the address page at the rear of this manual for details of your nearest
Edwards company.
WARNING
You must obey the instructions and take note of any precautions given below to ensure that
pumped gases do not enter their flammable ranges.
Summary of Contents for iH1000
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