Edwards EPX HiVac Series, Instruction Manual, Page: 21 / 72

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Technical data
A419-00-880 Issue F
2 Technical data
2.1 General
2.2 Performance
Table 6 - General
EPX180 EPX500
Dimensions Refer to Figure 12 , 13 , 14 , and 15
Mass:
EPX L
EPX N
EPX LE
EPX NE 43.5 kg
45.5 kg
44.6 kg
46.6 kg 45.2 kg
47.2 kg
46.3 kg
48.3 kg
Inlet ISO63 ISO160
Inlet fittings (not supplied) One ISO63 centring ring.
4 Claw clamps
One ISO160 centring ring.
8 Claw clamps
Outlet NW25
Ambient operating temperature range 5 to 40
o
C, 41 to 104
o
F
Maximum ambient operating humidity 90% RH non-condensing
Noise level <59 dB(A)
Vibration <0.25 g
Maximum operating tilt angle 5
o
Handling The pump must not be laid on its side or inverted
Topple angle >15°
Maximum exhaust pressure <1200 mbar absolute
Lubricating oil The EPX pump has a sealed lubricating oil system. For health and
safety information, refer to the Material Safety Data Sheet for Fomblin
6/6: MSDS No. P120-01-015.
Ingress protection IP44 (with inlet and exhaust connected)
(E-series pumps are rated to IP40)
Table 7 - Performance
EPX180 EPX500
Warm-up time
(to nominal performance) 30 minutes
Peak pumping speed 170 m
3
hr
-1
103.0 cfm 500 m
3
hr
-1
294.3 cfm
Ultimate vacuum
*
*
The time taken to reach ultimate vacuum is dependent upon vacuum system cleanliness and foreline
conductance.
<1 x 10
-4
mbar,
<1 x 10
-2
Pa,
<7.5 x 10
-5
Torr
<1 x 10
-6
mbar,
<1 x 10
-4
Pa,
<7.5 x 10
-7
Torr
Maximum leak rate 1 x 10
-5
mbar l s
-1
, 1 x 10
-3
Pa l s
-1
, 2.1 x 10
-8
atm ft
3
min
-1