Edwards AIGX-S-DN16CF, Instruction Manual

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Contents
DO48-50-880 Issue E
Contents
Section Page
1 INTRODUCTION .................................................................................... 1
1.1 Scope ...................................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA ................................................................................. 3
2.1 Mechanical Data ......................................................................................................... 3
2.2 Performance, Operating and Storage Conditions ................................................................... 3
2.3 Electrical Data ........................................................................................................... 3
2.3.1 Electrical Supply ......................................................................................................... 3
2.3.2 Output Signal ............................................................................................................. 3
2.3.3 Gauge and Degas Enable ................................................................................................ 4
2.3.4 Set-point ................................................................................................................. 4
2.3.5 Gauge Identification .................................................................................................... 4
2.3.6 Electrodes ................................................................................................................. 4
2.4 Materials Exposed to Vacuum .......................................................................................... 5
3 INSTALLATION ..................................................................................... 7
3.1 Unpack and Inspect ...................................................................................................... 7
3.2 Fit the AIGX to the Vacuum System ................................................................................... 7
3.3 Electrical Connections .................................................................................................. 7
3.3.1 Connect to Edwards Controller ........................................................................................ 7
3.3.2 Connect to Your Own Supply and Control Equipment .............................................................. 7
3.3.3 Maximum Cable Length ................................................................................................. 9
4 OPERATION ...................................................................................... 11
4.1 Enable and Disable the AIGX ..........................................................................................11
4.2 Pressure Measurement .................................................................................................11
4.2.1 Calibration in Different Gases ........................................................................................12
4.3 Emission Current ........................................................................................................13
4.4 Degas the AIGX ..........................................................................................................13
4.5 Over-pressure Protection ..............................................................................................13
4.6 Filament Selection ......................................................................................................13
4.7 LED Status ................................................................................................................13
4.8 Set-point Adjustment ..................................................................................................14
4.9 Error Indication .........................................................................................................14
4.10 Bakeout ................................................................................................................... 14
5 MAINTENANCE ................................................................................... 17
5.1 Fault Finding Guide .....................................................................................................17
5.2 Replace the Body Tube ................................................................................................17
5.3 Replace the Internal Fuse .............................................................................................17
5.4 Calibration Service .....................................................................................................18
6 STORAGE AND DISPOSAL ....................................................................... 19
6.1 Storage ...................................................................................................................19
6.2 Disposal ................................................................................................................... 19
7 SPARES AND ACCESSORIES ..................................................................... 21
7.1 Introduction .............................................................................................................21
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