Edwards AIGX-S-DN16CF, Instruction Manual, Page: 5 / 26

© Edwards Limited 2013. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
D048-50-880 Issue E
1 INTRODUCTION
1.1 Scope
This manual provides installation, operation and maintenance instructions for the Edwards Active Ion Gauge (AIGX).
You must use the AIGX as specified in the manual. Read this manual before installing and operating the AIGX.
Important safety information is highlighted as WARNING and/or CAUTION instructions which must be followed. The
use of WARNINGS and/or CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to SI international system of measurement followed by imperial units
in parenthesis; SI (imperial).
In accordance with the recommendations of IEC1010, the following warning symbols are on the pump:
1.2 Description
The AIGX is an ion gauge head and gauge controller in a single compact unit. The gauge operates as a hot filament
ionisation gauge, in which the pressure is measured indirectly as a function of the current.
The measurement range of the AIGX is 5 x 10
-10
to 5 x 10
-2
torr (6.6 x 10
-10
to 6.6 x 10
-2
mbar). Three types of
vacuum connections are available: DN16CF, DN40CF and NW25.
The AIGX requires a 14.5 - 30 V d.c. power supply; it has a 0 to 10 V d.c. analogue output which is related to pressure.
The AIGX is compatible with Edwards Controllers. Alternatively, you can use an independent power supply and you
can read the output signal with a voltmeter or analogue to digital converter.
An 8-way electrical connector socket on the AIGX ( Figure 1 , item 1) is used to connect the AIGX to your Controller or
electrical supply and voltmeter. Electrical cables fitted with suitable connectors are available as accessories. A
gauge identification signal is available on the electrical connector: this signal is used by Edwards Controllers to
identify which type of active gauge is connected.
The AIGX is supplied with two filaments. A switch on top of the gauge selects between filament 1 and 2 ( Figure 1 ,
item 2).
There are two levels of emission currents: 0.1 and 1 mA. The gauge will automatically select 1 mA emission current
at low pressure, and 0.1 mA at high pressure.
A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10
-2
torr.
The AIGX can be degassed using the degas feature. During degas, the grid voltage is 500 V and the emission current
is 10 mA. The degas is inhibited at high pressure. The maximum duration of degas is three minutes, after which the
gauge returns automatically to its normal mode.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying
documentation. From August 2005, Edwards will offer
European customers a recycling service.