P.16
PM10U
EBARA
CORPORATION
3.4 Product Specifications
Specification Table
EV-A03
Model
Item
EV-A03-1
(Single Phase 100V)
EV-A03-2
(Single Phase 200V)
EV-A03-3
(Three Phase 200V)
Max. Pumping Speed [50/60 Hz]
250 L/min
1.0 Pa
Note1
）
w/ gas ballast OFF
Ultimate Pressure
10 Pa
Note1
）
w/ gas ballast ON
N2 Gas ballast
Note2
）
N2 supply pressure (Gauge press.)
Regulator set pressure
0.01 – 0.05 MPa
Max. Inlet Pressure
Atmospheric pressure
Max. Back Pressure (Gauge press.)
3 kPa or less
Max. water vapor pumping rate
Note3
）
250 g/h
Motor Rated Power
0.4 kW
Operating current
［
50/60 Hz
］
（
Primary current
）
Note4
）
5.0 – 7.5 A
3.2 – 4.0 A
1.5 – 2.3 A
Inlet
NW25 (Quick Flange)
Flange Size
Outlet
NW25 (Quick Flange)
Publication Oil
0.12 litter (Synthetic oil)
Weight
Approx. 23 kg
Size
210W x 385L x 250H
Atmosphere
temperature
15 to 30 deg. C
Operating
condition
Relative
Humidity
20 to 80%
(condensation must not exist)
Pollution Degree
Pollution Degree 2
Maximum Operating Altitude
2000m
Utility Requirements
Voltage [50/60 Hz]
100-120 V
200-240 V
200-240 V
Tolerable voltage
fluctuation
Note5
）
±10
％
Note6
）
±10
％
(Max 250V)
Power
Supply
Capacity 0.8
kVA
Note7
）
Safety standard
NRTL
（
UL61010-1
）
CE Marking