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Terranova® 752A

Dual Ion Pump Power Supply

Instructions Manual

Revision - 0817NC

Summary of Contents for Terranova 752A

Page 1: ...8811 TOLL FREE US Canada 800 446 8811 FAX 650 965 0764 EMAIL info duniway com WEB www duniway com 1 of 38 Terranova 752A Dual Ion Pump Power Supply Instructions Manual Revision 0817NC 2017 Duniway Sto...

Page 2: ...oss Restart 10 Restoring Default Values 11 MODE OF OPERATION 11 ION PUMP OPERATION 13 Start Phase 13 Normal Operation 15 Cool down Mode 15 Shutdown Mode 16 SET POINT OPERATION 16 ANALOG OUTPUT 19 SERI...

Page 3: ...tions Two 10 kV Kings connectors Two Fischer style connectors Overload Protection Fuse for line power Automatic power adjustment during Start Phase Automatic shutdown for shorted output Display Voltag...

Page 4: ...for two control units 10KV 100M Test plug Custom cable lengths available upon request Terranova 752A Control Unit Options Part No Description T 752A K110 Two 10 kV Kings Connectors 110 V AC T 752A F11...

Page 5: ...acks cabinets See Figure 1 for control unit dimensions A half rack adapter kit for a single control unit item 8000 0934 00 and a rack adapter kit for two control units item 8000 0934 01 are available...

Page 6: ...va 752A to the ion pump s 1 Secure the ion pump cable end to the ion pump high voltage feedthrough s 2 Secure the ion pump cable to the respective HIGH VOLTAGE OUT connector 3 Secure the required seco...

Page 7: ...ircuit is open To restart high voltage operation user must correct the grounding issue Table 1 lists various ground sense connection conditions and effects on high voltage operation Case Primary Cable...

Page 8: ...less of selected communication standard Setup Mode Terranova 752A unit parameters for CHANNEL 1 or CHANNEL 2 can be set or modified by the following six step operation 1 Press the SELECT button to set...

Page 9: ...will illuminate during adjustment 6 Press the SELECT button a sixth time to return the unit to Standby mode A BEEP will be emitted with each SELECT button depression All display segments will momentar...

Page 10: ...ss restart The automatic restart function is by default disabled To enable the power loss restart 1 Turn the unit OFF via the POWER switch 2 Remove the power cord and ion pump cable 3 Remove the six s...

Page 11: ...752A has three different user selectable operation modes Mode 0 default Mode 1 and Mode 2 In all three modes high voltage operation may be controlled through the HIGH VOLTAGE ON OFF button of each res...

Page 12: ...interrupted if an open circuit or ground fault is detected or if the TTL output voltage level is HIGH If user attempts to start high voltage operation with the second interlock circuit open error cod...

Page 13: ...Larger ion pumps with higher current requirements or heavily used ion pumps may also be started with the Terranova 752A but at lower pressures See Table 4 for recommended starting pressure for a numbe...

Page 14: ...ase of an ion pump If high voltage output increases or remains constant as current decreases user should isolate the ion pump chamber from the roughing system to help start the ion pump If this isolat...

Page 15: ...or example if the MAX VOLTAGE value is set to 6 00 kV and the PUMP SIZE value is set to 100 L s V 6000 V and S 100 L s Therefore if the current reading on the CURRENT display is 1 0 mA or 1 0 x 10 3 A...

Page 16: ...put is shorted to ground or power output remains relatively high This can occur either through a malfunction of the ion pump or ion pump cable When a channel enters a shutdown state high voltage opera...

Page 17: ...closed NC See Set Point Operation 3 Earth Ground 4 Digital Ground 5 Voltage Output 15 V See NOTES 6 Voltage Output 15 V See NOTES 7 Voltage Output 5 V See NOTES 8 CHANNEL 1 TTL Output 5 V See Mode of...

Page 18: ...18 CHANNEL 2 SET POINT Relay Sense 5 V See NOTES 19 N A N A N A 20 N A N A N A 21 CHANNEL 2 HV Sense 12 V See NOTES 22 CHANNEL 2 HV Sense 12 V See NOTES 23 CHANNEL 1 Current Analog Output See Analog...

Page 19: ...through PIN 14 of the MISCELLANEOUS I O port or PIN 24 of the AUXILIARY I O port for CHANNEL 1 and PIN 9 of the AUXILIARY I O port for CHANNEL 2 Current Output Three different user selectable voltage...

Page 20: ...the fan plug 5 Remove top cover 6 Locate DIP Switch S1 and DIP Switch S3 see Figure 3 7 Set the individual switches to desired output according to Table 8 for CHANNEL 1 or CHANNEL 2 8 Connect the fan...

Page 21: ...Tx 3 RxD Rx 4 DTR 5 Common Common 6 DSR 7 CTS Rx 8 RTS Tx 9 RI Table 9 SERIAL I O 9 pin D sub port pin configuration Query Characters The following input format is used by the Terranova 752A to output...

Page 22: ...ng X XX e X A PR1 PR2 Pressure Reading X X e X Selected pressure unit VO1 VO2 High Voltage Reading XXXX V ST1 ST2 Terranova 752A Status 00 OFF 01 Running 02 Cooling X X Cool down Cycle 03 Shutdown 04...

Page 23: ...485 serial communication see Changing the RS 485 Address The checksum value is a two character value used to conduct checksums with external devices when DIP Switch S3 5 is ON The comma mark must be i...

Page 24: ...R switch 2 Remove the power cord and ion pump cable 3 Remove the six screws along the edge of the top cover 4 Carefully lift the top cover and disconnect the fan plug 5 Remove top cover 6 Locate DIP S...

Page 25: ...address is 00000101 in binary notation or 5 in decimal notation Figure 6 DIP Switch S2 diagram To change the Terranova 752A RS 485 address 1 Turn the unit OFF via the POWER switch 2 Remove the power...

Page 26: ...return unit to Duniway Stockroom High voltage does not turn on when HIGH VOLTAGE ON OFF button is depressed 1 Safety interlock circuit is open 2 Ion pump cable ground sense is open 3 Control unit is i...

Page 27: ...t the discharge user can either lightly tap the ion pump body with a non magnetic object or temporarily apply a higher than normal voltage When the ion pump successfully starts current should temporar...

Page 28: ...eated user should turn ON the control unit and observe both the current and voltage reading A functional control unit should output the open circuit voltage and low to zero current Any current output...

Page 29: ...Current Analog Output 2 mA V S1 8 ON CHANNEL 2 Current Analog Output 2 mA V S3 1 ON RS 232 Enabled S3 2 ON S3 5 OFF Checksum Function Disabled S3 7 OFF Current Analog Output Linear S3 8 OFF CHANNEL 2...

Page 30: ...onnector Positive polarity J2 POS Negative polarity J2 NEG 12 Re install the HV diode in the proper orientation CHANNEL 1 Positive polarity Stripe should face towards the inside of the unit Negative p...

Page 31: ...Switch S3 8 control the symbol on the HIGH VOLTAGE display for CHANNEL 1 and CHANNEL 2 respectively 15 Locate jumper JP8 for CHANNEL 1 or jumper JP13 for CHANNEL 2 As shown in Figure 9 user will need...

Page 32: ...estart the unit via the POWER switch Once the Terranova 752A is powered ON the unit will commence the Self Test Thereafter Terranova 752A operation may be resumed Changing Fuses The Terranova 752A con...

Page 33: ...mming instruction due to such defects DSC does not warrant that the operation of the firmware or hardware will be uninterrupted or error free If this product is returned to DSC for warranty service Bu...

Page 34: ...to which this declaration relates are in conformity with the following standards or normal documents EMC Directive 89 336 EEC 93 68 EEC Electromagnetic Compatibility Standards EN 50081 1 1992 EN 5008...

Page 35: ...FR Ion pump cable with M FR connectors 10 ft Example of ion pump cable part number breakdown V 110N 10 V Ion pump connector 1 Cable type 10 Cable length in feet N Type of external cable sheath 10 Cont...

Page 36: ...1 maximum current varies from 2 A at 30 V DC 60 V AC to 0 4 A at 150 V DC 300 V AC for resistive loads Protective Circuits for Inductive Loads A protective circuit or component is recommended when swi...

Page 37: ...if Figure 2 shows a 0 1 A LOAD with a 110 V AC source connected in series with the Terranova relay I 0 1 A and E 110 V AC Therefore Equation 1 provides a capacitance value of 0 001 F Equation 2 provid...

Page 38: ...ild and rebuild almost any ion pump Duniway Stockroom offers a full complement of ion pump services and parts including but not limited to New line of Duniway ion pumps New and rebuilt classic Varian...

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