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PCU LED
38
10. Monitoring
Explanation of the parametric representation in the final screen in the user level
Presentation Meaning
216
Sequence number (number of exposure jobs)
01/01/2000
Date
01:17:35
Time
040
LED – intensity of the upper panel in %
040
LED – intensity of the lower panel in %
0800
Exposure time [place 1 and 2: minutes; place 3 and 4: seconds]
1
Vacuum ON [1 – ON; 0 – OFF]
0
Nitrogen OFF [1 – ON; 0 – OFF]
Breakdown of the error codes in the final screen in the user level
Code
Status
Background display
00
Accurate work flow
Green
01
Pump runs during the exposure process
Green
02
Pump cannot draw any vacuum
Red
03
LED do not function
Red
The different process parameters are recorded by means of the sensors used in the
PCU LED. These are shown in the final screen in the user level.
Summary of Contents for PCU LED
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