TABLE OF CONTENTS
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T A B L E O F C O N T E N T S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
T A B L E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I I I
F I G U R E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I I I
A B O U T T H I S M A N U A L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V
1 .
I N T R O D U C T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1
PRODUCT OVERVIEW ...........................................................................................................................1
1.2
LOCATION AND DESCRIPTION OF THE COMPONENTS ....................................................................2
1.2.1
AMH-38 ..........................................................................................................................................................2
1.2.2
AMH-100 ........................................................................................................................................................3
1.3
SPECIFICATIONS ...................................................................................................................................4
2 .
P R E P A R A T I O N F O R O P E R A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1
UNPACKING AND INSPECTION ............................................................................................................5
2.2
SITE REQUIREMENTS............................................................................................................................7
2.2.1
SITE................................................................................................................................................................7
2.2.2
GAS SUPPLIES .............................................................................................................................................7
2.2.2.1
DRIVE AIR SUPPLY ..................................................................................................................................7
2.2.2.2
VACUUM SUPPLY (AMH-38 ONLY) .........................................................................................................8
2.3
SETTING UP THE AMH FOR OPERATION ............................................................................................8
2.3.1
GENERAL CONSIDERATIONS.....................................................................................................................9
2.3.2
SETTING UP THE AMH.................................................................................................................................9
2.3.2.1
CONNECTING THE DRIVE AIR SUPPLY .................................................................................................9
2.3.2.2
CONNECTING THE DRIVE VACUUM SUPPLY (AMH-38 ONLY) ..........................................................11
2.3.2.3
CONNECTING ELECTRICAL POWER....................................................................................................11
2.3.2.4
CONNECTING PG7000 PLATFORM COMMUNICATIONS ....................................................................12
2.3.2.5
CONNECTING A REFERENCE VACUUM SUPPLY (AMH-38 ONLY)....................................................12
2.3.2.6
CONNECTING AN EXTERNAL REFERENCE VACUUM GAUGE (AMH-38 ONLY) ..............................13
2.4
PREPARING THE PG7000 PLATFORM ............................................................................................... 13
2.4.1
PREPARING PG7102, PG7202, PG7302 PLATFORM HARDWARE FOR AMH-100 ................................13
2.4.2
PREPARING PG7601 PLATFORM HARDWARE FOR AMH-38 ................................................................13
2.4.3
VERIFYING PG7000 EMBEDDED SOFTWARE VERSION FOR AMH SUPPORT....................................14
2.5
CHECKING THE PG7000 PISTON-CYLINDER MODULES FOR AMH OPERATION.......................... 14
2.5.1
CHECKING THE PISTON CAP ...................................................................................................................14
2.5.2
CHECKING THE PISTON STOP BUSHING ..............................................................................................15
2.6
INSTALLING THE AMH MASS SET...................................................................................................... 15
2.7
INITIAL START UP/VERIFICATION ...................................................................................................... 17
3 .
O P E R A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 9
3.1
GENERAL OPERATING PRINCIPLES ................................................................................................. 19
3.2
OPERATION .......................................................................................................................................... 22
3.2.1
INSTALLING THE AMH MASS HANDLER ON THE PG7000 PLATFORM ...............................................22
3.2.1.1
INSTALLING AMH-38 ..............................................................................................................................23
3.2.1.2
INSTALLING AMH-100 ............................................................................................................................24
3.2.2
REMOVING THE AMH MASS HANDLER FROM THE PG7000 PLATFORM ............................................25
3.2.2.1
REMOVING AMH-38................................................................................................................................25
3.2.2.2
REMOVING AMH-100..............................................................................................................................25
3.2.3
REGULAR MASS TO PRESSURE OR PRESSURE TO MASS OPERATION ...........................................26
3.2.4
DIRECT CONTROL OF AMH FUNCTIONS ................................................................................................26
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