BESTEM – D01R
【
Orient Flat check
】
When
「
Orient Flat
」
tab is clicked, a screen as on the right will be displayed.
1.
“Orient flat check parameter setting”
①
“Orient flat check”
---
Sets orient flat check
“Execute/No execute” when set the wafer.
②
“3 level scale setting”
---
Sets “3 level setting” to
extract the orientation flat. When the scroll bar is
scrolled, the image will display the detection in green
color. The level is set when the orientation flat is already
covered in green color
2.
“Orient flat check tolerance”
---
Set orientation flat
check allowable range. If the detected pixel is over the
white pixel count or black pixel count, orientation flat is
detected.
P
．
9
