Brooks SLA5810 Installation And Operation Manual Download Page 14 | Manualshive

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Models SLA5810 and SLA5820

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-PC-eng

Part Number: 541B091AAG

July, 2010

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Summary of Contents for SLA5810

Page 1: ... 2010 Models SLA5810 and SLA5820 Brooks Digital Elastomer Sealed Pressure Controllers Models SLA5810 and SLA5820 Model SLA5810A Analog I O Pressure Controller Model SLA5820D Digital I O DeviceNet Pressure Controller Model SLA5810F Digital I O FOUNDATION Fieldbus Pressure Controller ...

Page 2: ...te flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior to service When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instru...

Page 3: ...ch and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of depe...

Page 4: ...Installation and Operation Manual X PR SLA5800 PC eng Part Number 541B091AAG July 2010 Models SLA5810 and SLA5820 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 5: ... 6 Removal from Storage 2 2 2 7 Gas Connections 2 2 2 8 In Line Filter 2 3 2 9 Installation 2 3 2 10 Electrical Interface 2 4 Section 3 Operation 3 1 Overview 3 1 3 2 Theory of Operation for Flow Measurement 3 1 3 3 Features 3 1 3 4 Analog I O Mode of Operation 3 4 3 5 Communications Features 3 6 3 5 1 DeviceNet Communications Features 3 6 3 5 2 FOUNDATION Fieldbus Communications Features 3 6 Sect...

Page 6: ...Digital I O FOUNDATION Fieldbus Pressure Controllers 1 7 2 1 D Connector Shielded Cable Hookup Diagram Voltage I O Version 2 5 2 2 Common Electrical Hookups Voltage I O Version 2 5 3 1 Model SLA5810 20 Pressure Controller 3 2 3 2 Model SLA5810 20 Silicon Chip Configuration 3 2 3 3 Model SLA5810 20 System Block Diagram Downstream version 3 3 3 4 Externally Accessible Adjustment for all Meters Contr...

Page 7: ...aled pressure measurement and control product line offers unparalleled flexibility and performance The SLA5800 Series of Elastomer Seal pressure measurement and control is the most accurate repeatable and responsive controller on the market today Brooks offers a traditional 0 5 volt analog option Brooks also offers control interface via digital network protocols like DeviceNet a high speed up to 5...

Page 8: ... to 0 30 slpm N2 eq Standard 0 C and 101kPa 760 Torr Accuracy Integral Pressure products 0 5 of F S including linearity and hysteresis Repeatability Integral Pressure products 0 1 of F S RATINGS Temperature Sensitivity Integral Pressure products 0 1 of F S per C Zero Stability Integral Pressure products 0 001 of FS per 30 days Pressure Ratings Maximum Pressure 1450 psia Optional Maximum Pressure 4...

Page 9: ...l Buna N Kalrez Teflon Kalrez Outline Dimensions Refer to Figures 1 3 to 1 5 Process Connections Refer to Figures 1 3 to 1 5 ELECTRICAL CHARACTERISTICS Electrical Connections Analog option 15 pin D Connector male See Figure 1 1 Digital I O DeviceNet 5 pin Micro Connector male FOUNDATION Fieldbus one 4 Pin M8 connector for power and one 4 Pin M12 connector for communications Power Supply Voltage An...

Page 10: ...al Analog I O version only Left floating unconnected instrument controls valve to command setpoint Connected to signal at or above 5 0 Volts valve is forced open Connected to signal at or below 0 0 Volts valve is forced closed 5 Volt Reference Signal Analog I O version only For use with potentiometer command setpoint input 0 2 into 1K ohm minimum load Configuration Select Signal Analog I O version...

Page 11: ...ristics of Vacuum Pump Figure 1 2 Typical Configurations Figure 1 1 D Connector Electrical Pin Connections Analog I O Pin Connections PIN FUNCTION 1 Setpoint Command Input 2 Signal 0 1 5 volt Output 3 Not Connected 4 5 Power Supply 15 Vdc or 24 Vdc 6 7 8 9 Power Supply Common 10 Signal Common Output 11 Reference 5 Vdc Output 12 Valve Override Input 13 Calibration Select Input 14 Chassis Ground 15 ...

Page 12: ...1 95 49 5 5 46 138 8 NORM OPEN VALVE 3 67 93 2 NORM CLOSED VALVE 3 95 100 3 50 12 7 3 07 77 9 X ZERO BUTTON 50 12 7 1 48 37 7 4 56 115 9 99 25 1 NOTES 1 WIRE SIZE AWG 14 24 2 PINS 1 9 10 ARE INTERNALLY CONNECTED ON THE PRINTED CIRCUIT ASSEMBLY 3 VALVE OVERRIDE REFERENCED TO SETPOINT COMMON 18 4 4 2 72 69 0 35 9 0 71 18 0 INCH MM 8 32 UNC X 17 64 DEEP MOUNTING HOLES 2 PLCS STAT 15 PIN MALE D CONNEC...

Page 13: ...TON 4 56 115 9 98 25 0 36 9 1 1 48 37 7 50 12 7 5 55 141 1 NORM OPEN VALVE 3 67 93 2 NORM CLOSED VALVE 3 95 100 3 3 07 77 9 X 1 06 26 8 2 63 66 8 KEY 1 2 3 4 SIGNAL SIGNAL N C DRAIN 1 2 3 4 N C POWER POWER N C 4 56 115 8 50 12 7 35 9 0 71 18 0 18 4 4 2 72 69 0 8 32 UNC X 17 64 DEEP MOUNTING HOLES 2 PLCS FITTING X DIMENSION 1 8 TUBE COMP 4 83 122 7 1 4 TUBE COMP 5 03 127 8 3 8 TUBE COMP 5 15 130 8 ...

Page 14: ...1 8 Models SLA5810 and SLA5820 Section 1 Introduction Installation and Operation Manual X PR SLA5800 PC eng Part Number 541B091AAG July 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 15: ...tfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs BrooksInstrument com Fax ...

Page 16: ...ed to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is required before any Brooks Personnel can begin processing Copies of the form can be obtained from any Brooks Instrument location listed above 2 5 Transit Precautions To safeguard against damage during transit trans...

Page 17: ...ally cleaned Table 2 1 Recommended Filter Size 2 9 Installation Recommended installation procedures a The Digital PC should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a manner that permits easy removal if the instrument requires servicing d The Digital PC can be installed in an...

Page 18: ...hese commons are electrically connected together on the PC board Analog I O Versions Signal Common Signal Output Voltage or Current 15 or 24 Vdc Supply Setpoint Input Voltage or Current Setpoint Common Supply Common Chassis Ground via unit body Refer to Figure 2 1 for pin connections Refer to Figures 2 2 2 3 and 2 4 for electrical I O connections The Brook s Pressure Controller acts as a current s...

Page 19: ... 24 Vdc 6 7 8 9 Power Supply Common 10 Signal Common Output 11 Reference 5 Vdc Output 12 Valve Override Input 13 Calibration Select Input 14 Chassis Ground 15 External Sensor Input Signal 0 4 20 mA Output Not Connected Setpoint 0 4 20 mA Input Setpoint 0 1 5 volt Input Notes 1 The commons for the setpoint and signal output are not isolated from power supply common 2 The cable shields should connec...

Page 20: ...ation and Operation Manual X PR SLA5800 PC eng Part Number 541B091AAG July 2010 Figure 2 3 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 4 Recommended I O Wiring Configuration for Current Signals Isolated Power Supply ...

Page 21: ...lectronics to modulate the control valve to maintain the desired pressure A system block diagram is shown in Figure 3 3 The integration of pressure transducer control electronics and control valve into one unit results in a compact size The mounting dimensions are comparable to a mass flow controller Refer to Figures 1 1 to 1 4 The upstream pressure regulation mode shown in Figure 1 5 places the p...

Page 22: ...out the data contained in the calibration table and how to access the data The DeviceNet Instruction Manual describes further details on specific communication features Calibrations will appear in the calibration table in the same order as they appeared on the customer order unless otherwise specified The first listed gas will appear as calibration 1 the second as calibration 2 and so on Note that...

Page 23: ...5810 and SLA5820 Installation and Operation Manual X PR SLA5800 PC eng Part Number 541B091AAG July 2010 Figure 3 4 Externally Accessible Adjustment for all Controllers Figure 3 3 Model SLA5810 20 System Block Diagram Downstream version ...

Page 24: ...nly one calibration will have that calibration stored in calibration 1 Before operating the PC apply power and warm up the instrument for approximately 15 minutes After warm up apply gas pressure then proceed by following the instructions in the following sections B Analog I O Setpoint MFC Only This input allows the user to establish the PC setpoint Several input types are available as follows C A...

Page 25: ... calibration select pin changes state the device performs any required processing to change the configuration then returns to normal operation If the device determines that the selected configurations is not valid where applicable the valve is driven to the closed state and the output signal is set to zero Typical time required to change configurations is approximately 1 0 second NOTE It is recomm...

Page 26: ...er only Valve Override controller only Calibration Gas Select Soft Start Control controller only 3 5 2 FOUNDATION Fieldbus Communications Features The Brooks SLA5800 Digital Series is supporting FOUNDATION Fieldbus communication protocol FOUNDATION Fieldbus is a digital network allowing usage of existing 4 20mA cables avoiding costly re wiring Fully certified by passing ITK this device has passed ...

Page 27: ...810 and SLA5820 Section 4 Maintenance Troubleshooting 4 1 Overview No routine maintenance is required on the Digital PC If an in line filter is used the filtering elements should be periodically replaced This section provides the following information Troubleshooting Troubleshooting 4 2 Troubleshooting ...

Page 28: ...specially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are reaching and leaving the controller The Break out Board P N S273Z649AAA will make this job much easier 2 Connections may not be secure Check all cable connections 3 If the pressure controller appears to be functioning but cannot achieve set point verify that sufficie...

Page 29: ...ɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ PED ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0 5 bar g ɢ ɫ ɪɚɡɦɟɪ ɩɨ ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1 ɢɧɱ ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ PED x Ƚɥɚɜɚ Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ PED ɢɧɫɬɪɭɤɰɢɢ x ɍɤɚɡɚɧɢɬɟ ...

Page 30: ... nebo k ohrožení zdraví osob Evropská smČrnice pro tlakové zaĜízení PED Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0 5 baru g a velikosti vČtší než 25 mm nebo 1 palec se vztahuje platnost smČrnice o tlakovém zaĜízení PED Kapitola Technické údaje v této pĜíruþce obsahuje dĤležité bezpeþnostní a provozní pokyny související se smČrnicí PED x MČĜicí pĜístroje popsané v této pĜíruþce jsou...

Page 31: ...meudvikling ekspanderer og dette kan forårsage skade på udstyr og personer Det Europæiske direktiv for trykudstyr PED På alt udstyr hvis indgangstryk er større end 0 5bar g og større end 25 mm eller en tomme gælder det europæiske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet x I manualen angives måleinstrumenter der er tilpasset direktivet 97 23...

Page 32: ...zaken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn x In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn x De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG x Alle stroming...

Page 33: ...astusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele mille sisesurve on üle 0 5 baari g ja läbimõõt üle 25 mm või 1 tolli x Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid x Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97 23 EÜ nõuetele x Brooks Instrument i vool...

Page 34: ...hingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan Tekniset tiedot luvusta x Käyttöoppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia x Kaikki Brooks Instrumentin virtaus...

Page 35: ...uropéenne équipements sous pression PED Tous les équipements sous pression dont la pression interne est supérieure à 0 5 bar pression relative et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED La section Spécifications de ce manuel contient les instructions relatives à la directive PED Les appareils de mesure de ce manuel sont conformes à la directive EN 97 23 E...

Page 36: ... von Ein und Auslassventilen komplett entleert werden Europäische Druckgeräterichtlinie PED Alle Druckgeräte mit einem internen Druck von mehr als 0 5 bar g und einer Größe von mehr als 1in 1 in 25 4 mm unterliegen der Druckgeräterichtlinie x Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie x Messge...

Page 37: ...ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ PED ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦĲİȡȚțȒ ʌȓİıȘ ȐȞȦ ĲȠȣ 0 5 bar g țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪĲİȡȠȣ ĲȦȞ 25 mm Ȓ ĲȘȢ 1 ȓȞĲıĮȢ İȝʌȓʌĲİȚ ıĲȚȢ įȚĮĲȐȟİȚȢ ĲȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ PED x ȉȠ țİĳȐȜĮȚȠ ȆȡȠįȚĮȖȡĮĳȑȢ ĲȠȣ ʌĮȡȩȞĲȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİĲȚțȐ ȝİ ĲȘȞ ȅįȘȖȓĮ PED x ȅȚ ȝİĲȡȘĲȑȢ ʌȠȣ ʌİȡȚȖȡȐĳȠȞĲĮȚ ıĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝȠȡĳ...

Page 38: ... ami károsíthatja a berendezést és személyi sérüléshez vezethet Nyomástartó berendezésekre vonatkozó európai irányelv PED Minden 0 5 bar nál g magasabb belsĘ nyomású és 25 mm nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv PED hatálya alá tartozik x A gépkönyv MĦszaki adatok fejezete tartalmaz a PED irányelvre vonatkozó utasításokat x A ...

Page 39: ...ovocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e più grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED x Il capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED x Gli strume...

Page 40: ...jumƗ šƷidrums var termiski izplesties pƗrraut ierƯci un radƯt traumas Eiropas spiedieniekƗrtu direktƯva PED Uz visƗm spiedieniekƗrtƗm kuru iekšƝjais spriegums pƗrsniedz 0 5 bar g un ir lielƗkas par 25 mm jeb 1 collu attiecas Eiropas spiedieniekƗrtu direktƯva PED x ŠƯs rokasgrƗmatas tehnisko parametru nodaƺƗ ir sniegtas a PED DirektƯvu saistƯtƗs instrukcijas x ŠajƗ rokasgrƗmatƗ aprakstƯtie mƝrƯtƗji...

Page 41: ...monơs Europos slơginơs Ƴrangos direktyva PED Visa slơginơ Ƴranga kurios vidinis slơgis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama slơginơs Ƴrangos direktyvos PED x Šios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susijĊ su PED direktyva x Šioje instrukcijoje aprašyti matuokliai atitinka Europos Sąjungos direktyvą 97 23 EB x Visi Brooks Instr...

Page 42: ...z ciekáego medium Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych PED Wszystkie urządzenia ciĞnieniowe pracujące przy ciĞnieniu wewnĊtrznym wzglĊdnym wiĊkszym niĪ 0 5 bara i wielkoĞci powyĪej 25 mm lub 1 cala podlegają dyrektywie e...

Page 43: ...à dilatação térmica do líquido a destruição do equipamento e eventuais danos pessoais Directiva Europeia para equipamentos sob pressão PED Os equipamentos sob pressão interior superior a 0 5 bar g e com calibre superior e 25 mm 1 polegada caem sob a vigência da directiva europeia de equipamentos sob pressão PED x O capítulo Dados técnicos do manual contem instruções relativas à Directiva PED x Os ...

Page 44: ...termică a fluidului care poate defecta instalaĠia úi poate produce răniri de persoane Directiva europeană pentru instalaĠiile sub presiune PED Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0 5 mbar g úi au mai mult de 25 mm sau 1 Ġol cad sub incidenĠa normei europene corespunzătoare PED x La capitolul Date tehnice din cartea maúinii se găsesc indicaĠiile c...

Page 45: ...ou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne Európska smernica vzĢahujúca sa na tlakové zariadenia PED x Všetky zariadenia s vyšším vnútorným pretlakom ako 0 5 bar g a väþšieho rozmeru ako 25 mm alebo 1 anglický palec podliehajú pod Európsku smernicu vzĢahujúcu sa na tlakové nádoby PED x Kapitola Technické údaje návodu na obsluhu obsahuje príkazy vzĢahujúce sa na smernicu PED x Meracie...

Page 46: ...kodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom veþ od 0 5 bara g in veþjim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED x Poglavje priroþnika Tehniþni podatki vsebuje navodila ki se nanašajo na smernice PED x Merilni instrumenti navajani v priroþniku ustrezajo smernicam EU številke 97 23 EK x Vsaki ...

Page 47: ...do lo que puede dañar al equipo y conducir a daños personales Directriz Europea de los Equipos de Presión PED Todos los equipos de presión con una presión interna que supere a 0 5 bar g con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión PED x El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x Los i...

Page 48: ... transportabla tryckbärande anordningar Alla utrustning för tryck med ett tryck över 0 5 Bar g bar och större demensioner än 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbärande anordningar PED x Den här Instruktionsbokens Sektion Specifikation innehåller anvisningar gällande PED Direktivet x Mätare som beskrivs i denna Instruktionsbok är i ö...

Page 49: ...Installation and Operation Manual X PR SLA5800 PC eng Part Number 541B091AAG July 2010 Models SLA5810 and SLA5820 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 50: ...ds repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive t...

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