Installation
High Capacity Helium Compressor
Introduction
Manual
8040600
Brooks Automation
4-2
Revision A
Introduction
The components listed in
Table 4-1
are required for High Capacity Helium
Compressor installation.
Figure 4-1
highlights the major tasks for High Capacity Helium Compressor
installation and refers to the appropriate installation procedures within this
section.
Table 4-1: Required Components for High Capacity Helium Compressor Installation
Item
number
Description
Quantity
1
Input power cable as described in
.
length as
required
2
Input power cable strain relief
1
3
1/4 inch ring tongue terminal lugs
4
4
3/4 inch female ORS water supply and return fittings
2
5
Connectors for EMO circuit
2
