EO2K, EO4K and EO6K Diffusion Pumps
INT
R
ODUCTI
ON
PAGE
1
Issue G
1
Aug 06
1
INTRODUCTION
1.1
Scope and definitions
This manual provides installation, operation and maintenance instructions for the BOC Edwards EO2K,
EO4K and EO6K Diffusion Pumps, abbreviated to “EO pump” or “pump” in the remainder of this manual.
You must use the pumps as specified in this manual. Read this manual before you install and operate the
pump.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey
these instructions. The use of WARNINGS and CAUTIONS is defined below.
The units used throughout this manual conform to the SI international system of units of measurement.
The following warning symbols are on the pump:
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment,
associated equipment and process.
Summary of Contents for EO2K
Page 1: ...B304 09 880 Issue G Original Instruction Manual EO2K EO4K and EO6K Diffusion Pumps ...
Page 2: ...This page intentionally blank ...
Page 6: ...EO2K EO4K and EO6K Diffusion Pumps PAGE iv Issue G iv Aug 06 This page intentionally blank ...
Page 14: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 8 Issue G 8 Aug 06 This page intentionally blank ...
Page 22: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 16 Issue G 16 Aug 06 This page intentionally blank ...
Page 36: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 30 Issue G 30 Aug 06 This page intentionally blank ...
Page 52: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 46 Issue G 46 Aug 06 This page intentionally blank ...
Page 54: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 48 Issue G 48 Aug 06 This page intentionally blank ...
Page 58: ...EO2K EO4K and EO6K Diffusion Pumps PAGE 52 Issue G 52 Aug 06 This page intentionally blank ...
Page 61: ...This page intentionally blank ...