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T17+ Server Installation Guide
2.2 Requirements of Corrosive Gas
Corrosive Gas
Unit
Concentration
H
2
S
ppb
< 3
SO
2
ppb
< 10
Cl
2
ppb
< 1
NO
2
ppb
< 50
HF
ppb
< 1
NH
3
ppb
< 500
O
3
ppb
< 2
Note: ppb (part per billion) refers to the unit of concentration
,
1ppb stands for the volume ratio of
part per billion.