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EXACTUS

®

OPTICAL THERMOMETER

Manufactured By BASF Corp

USER’S MANUAL

Single or Multi-Channel System

Version 5.04

BASF Corp

Temperature Sensing Group

46820 Fremont Blvd.

Fremont, CA 94538-6540

Phone: (510) 490-2150

Fax: (510) 252-1871

http://www.catalysts.basf.com/Main/temperature_sensing

Additional support available:

BASF Temperature Sensing, Portland, Oregon

4011 SE International Way, Suite 604

Portland, OR 97222

Phone: (503) 794-4073

Fax: (503) 794-5591

Copyright© 2001 BASF Catalysts, LLC. All rights reserved.

Exactus is a registered trademark for which BASF Catalysts LLC has rights. The data contained in this publication are based on our
current knowledge and experience. In view of the many factors that may affect processing and application of our product, these data
do not relieve processors from carrying out their own investigations and tests; neither do these data imply any guarantee of certain
properties, nor the suitability of the product for a specific purpose. Any descriptions, drawings, photographs, data, proportions,
weights, etc. given herein may change without prior information and do not constitute the agreed contractual quality of the product. It
is the responsibility of the recipient of our products to ensure that any proprietary rights and existing laws and legislation are observed
(08/2007). BF-8807

Although all statements and information in this publication are believed to be accurate and reliable, they are presented gratis and for
guidance only, and risks and liability for results obtained by use of the products or application of the suggestions described are
assumed by the user. NO WARRANTIES OF ANY KIND, EITHER EXPRESS OR IMPLIED, INCLUDING WARRANTIES OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE MADE REGARDING PRODUCTS DESCRIBED
OR DESIGNS, DATA OR INFORMATION SET FORTH. Statements or suggestions concerning possible use of the products are
made without representation or warranty that any such use is free of patent infringement and are not recommendations to infringe any
patent. The user should not assume that toxicity data and safety measures are indicated or that other measures may not be required.
©2007 BASF Catalysts LLC.

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Summary of Contents for EXACTUS

Page 1: ...awings photographs data proportions weights etc given herein may change without prior information and do not constitute the agreed contractual quality of the product It is the responsibility of the recipient of our products to ensure that any proprietary rights and existing laws and legislation are observed 08 2007 BF 8807 Although all statements and information in this publication are believed to...

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Page 3: ...probe 7 4 Software Interface 8 18 Software Installation 8 Starting up TemperaSure 8 Installation Troubleshooting 8 Using TemperaSure Software Functions 9 12 Probe and TemperaSure Software Setup 12 16 Advanced Probe Features 16 18 All Probes 18 Analog Output 18 Graph Setup 20 Tips and Shortcuts 20 21 5 Warnings 22 6 Troubleshooting 23 7 Glossary of Terms 24 31 8 Specifications 31 32 9 Appendices 32...

Page 4: ... 16 Figure 11 Advanced Probe Functions Tab 17 Figure 12 Menu for All Probes 19 Figure 13 Analog Output Setup 19 Figure 14 Drawing of Probe with Lens Collection Optics Pyrometer 33 Figure 15 Drawing of Probe with Lightpipe 34 Figure 16 Lightpipe Detail 35 Appendices Figures Figure A 15 Analog Output Digital Interface Module Connections 37 Figure A 16 External Power Jumper 38 Figure A 17 External Po...

Page 5: ...Over 90 000 employees Business contacts in 170 countries 8000 product manufactured Sales of over 65 Billion Euro in 2007 EXACTUS optical thermometers are developed manufactured and supported at BASF facilities in Portland Oregon Fremont California and Rome Italy 1 2 Theory of Operation The following is a quick introduction to the field of Optical Thermometry also known as Pyrometry or Radiation Th...

Page 6: ...m narrow band detector 4 Amplifier The amplifier takes the small electrical signal from the photo detector and amplifies it before sending it to the signal processor The amplifier circuit is extremely sensitive and allows signals as small as 10 15 amps to be detected and measured 5 Signal Processor The signal processor converts the amplified signal into a temperature reading This processing is a c...

Page 7: ...conversions internally so each instrument provides a digital signal output BASF also offers an analog output module for applications where a proportional to temperature current or voltage output is desired 4 The ability to read a wide range of temperatures from 25 C to 4 000 C The electronics design also allows a wider range of temperatures to be measured Typically hot objects from about room temp...

Page 8: ...er 4 5 long 25 4mm 114 3mm Interface module for conditioning power and communicating with a PC Single Channel 4 6 2 8 1 118mm 72mm 25mm Multi Channel 10 Channel 17 625 x 12 5 2 447 7mm 317 5mm 50 8mm Optional analog output 0 to 10 volts or 0 to 20ma 4 to 20ma analog output same size as Single Channel Power supply 12 volt 4 2 1 4 101 6mm 50 8mm 35 6mm Figure 2A Single Channel System ...

Page 9: ...ge of angles which can help decrease emissivity or roughness errors Lens systems allow the user to view a small collection spot on a hot object from greater distances and they can be used to look through a window or view port when direct access to the hot object is not available Lightpipes are more efficient at collecting light than lens systems therefore they are better suited for low temperature...

Page 10: ... the connection for power from the power supply The interface box has a green LED that indicates when power is being supplied The probe can communicate with a host computer using either RS 232 or RS 422 serial communication If it is configured for RS 232 than the interface box should be placed within 2 meters of the PC or digital data logger BASF also offers an Analog Output Option which can be co...

Page 11: ...grasp the grooved part of the plug and slide it back before pulling to unplug the cable The other end of this cable has a RJ45 connector which plugs into the interface box 5 Connect the interface module to the power supply 6 Connect the interface module to your PC or host computer 7 The probe head and interface box each have a green LED to indicate power is being supplied 8 Multi Channel Systems P...

Page 12: ...ent The bottom horizontal area displays time in seconds minutes or hours 4 3 Installation Troubleshooting Connect the probe per Figure 2A or 2B and then launch the TemperaSure software by double clicking on TemperaSure exe The user interface screen Figure 3 will appear The COM ports may need to be selected first To configure COM ports go to the Options menu and choose Connection and select the COM...

Page 13: ... menu for common tasks The File menu has the following options Open Use to open an existing bin binary data file to view data graphically The data can also be saved to a txt file from any open bin file Temperature Readings Status Graph and Measurement Rate Y Axis Zoom Control Annotation Box Mouse Coordinates Start and Stop Logging Time Scale Zoom Data Zoom and Track Control Y Axis Quick Buttons ...

Page 14: ...ent files being saved The annotation entry will be added to each file saved until it is removed edited or TemperaSure program is exited Exit Exits the software program The exit function will give you the option to save your data 4 4 2 Run Use the Run menu to control the data logging Start Starts the data acquisition If you have more than one probe the software will force all probes to run and log ...

Page 15: ...to control the probe s settings The Option menu has the following choices Connection Allows the communication port s to be selected The PC often already uses COM 1 2 and 3 TemperaSure can utilize any unused COM port TemperaSure can also talk to probes through a USB port and serial converter box like those from Inside Out Networks Graph Allows the graph to be customized see section 4 7 and Figure 6...

Page 16: ...ect the response and resolution of the measurements the detail of the temperature changes the time over which measurements are averaged and the size of data files created Graph rate is displayed and adjusted via the pull down selection menu at the top left of the screen see Figure 3 the current value is also displayed at the bottom left of the screen The instrument will measure and log temperature...

Page 17: ... common area at the bottom which allows a user to select which probe they are viewing or editing via the Change Probes buttons or either Save or Apply the probe settings Important Note The difference between Save and Apply is important Apply should be used for short term changes or testing a change Save should be done when the change is to be maintained for future measurements Applied changes are ...

Page 18: ...different operating modes please see Sections X XX for details Not all probes ship from the factory with these modes activated please contact the factory for assistance if you are interested in activating these modes Below is a brief description of the available modes Peak Temperature Outputs a calculated peak temperature Once a lower threshold temperature is reached the probe will begin to seek a...

Page 19: ...the probe parameters Users can activate the analog output select whether the output is to be 0 10 VDC or 4 20mA and set the minimum and maximum temperatures The minimum and maximum temperatures can be any value within the calibrated range of the instrument Figure 9 Analog output configuration menu ...

Page 20: ...ignal averaging Averaging Buffer and heat transfer Transfer Function These features can also be entered in table form with corresponding temperatures for each table entry so the parameter will automatically adjust the target temperature changes These features are set up for each instrument using the Advanced tab in the Probe Parameters menu Emissivity This feature allows the user to type in a sing...

Page 21: ...the Hold or Extrapolate buttons below the table the user can select whether the Transfer Function correction will be held at the last entries or linearly extrapolated beyond the last entries the user should verify the extrapolation makes physical sense Averaging Buffer Bandwidth Table The Averaging Buffer allows the user to average several raw readings into the temperature that is displayed and st...

Page 22: ...f one 1 0 is entered The temperature will increase for values less than one Low Temperature Signal Averaging The bottom end of the temperature range for an Exactus instrument is usually the temperature at which the instrument will measure a blackbody with a resolution of 1 0ºC at one reading per second If a user would like to measure at a higher measurement rate but still achieve maximum resolutio...

Page 23: ... 19 Figure 12 All Probes display Figure 13 Analog Output Setup Window ...

Page 24: ...n Box to change the text Graph Options Right click on the graph area to open an option box that allows changes to the display appearance Other graph options can be accessed through the Options menu at the top edge of TemperaSure 4 8 1 Graph rate Logging rate is one of the most important selections in the user interface Graph rate is set with the top tool bar window or under Options Graph Setup Fig...

Page 25: ... ambient temperature of that probe is shown The ambient temperatures can also be logged to the saved files for later graphing with programs like Microsoft Excel 4 9 1 Right Click Menus Right clicking on the graph will give you the following options Find Data Finds the data real time and centers it in the graph Find Data is like a beam finder on an oscilloscope View auto scales both time and temper...

Page 26: ...ved before using Reset The Reset feature of the TemperaSure software may cause loss of any unsaved data Make sure all probe settings are saved to the probes before the system is powered off The Apply button will not save the settings if power is turned off Only the Save button will save probe settings under power cycling conditions Be certain that you Save your data in either binary files bin for ...

Page 27: ...orrect COM ports on the computer are being used In the Options menu select Connections to view which COM port s are available and which are checked Try unplugging the cable s at the probe s or interface box and reconnecting the cable If necessary please contact BASF Temperature Sensing for additional help 6 2 Data Does Not Agree With Expectations The most common sources of measurement errors are l...

Page 28: ...ect emitter By definition a blackbody has an emissivity of exactly one 1 0 A blackbody emits light solely as a function of its own temperature The amount of light absorbed α α α α equals the amount emitted ε ε ε ε for steady state no change in temperature An ideal blackbody absorbs 100 of the light impinging on it Also see Kirchhoff and Planck Emissivity The measure of how well an object emits lig...

Page 29: ... these cables BASF does manufacture high performance flexible fiber optic cables for measurement applications where cables are needed Freeze Point Furnaces Carefully designed furnaces that hold a double walled closed bottom graphite cylinder filled with ultra pure metal The pure metal freezes at exactly the same temperature every time anywhere in the world BASF uses five different freeze points to...

Page 30: ...used as reference point Micron One millionth of a meter 10 6 meters µm Often used to describe the wavelength of light that is being measured The human eye can see from about 0 38µm to 0 77µm EXACTUS instruments typically measure at longer wavelengths from about 0 6µm to 2µm also see Wavelength Noise An unwanted electrical interference to the signal Noise can be expressed in terms of resolution als...

Page 31: ...physics εC1 λ5 eC2 λΤ 1 W m3 where M is spectral radiance energy emitted ε is the emissivity equal to 1 for the blackbody λ is the wavelength T is temperature absolute and C1 and C2 are the first and second radiation constants which are equal to 3 742 10 16 W m2 and 1 4388 10 2m K respectively Planck s equation describes the blackbody emission curves below Power Supply The small transformer that c...

Page 32: ...200 C to 1 300 C using a lightpipe and 0 9µm wavelength 65ºC to 1150ºC using a pyrometer and a 1 6um wavelength 280ºC to 2200ºC using a pyrometer and a 0 9um wavelength 120ºC to 3000ºC using a pyrometer and a 1 6um wavelength 350ºC to 3000ºC using a pyrometer and a 0 9um wavelength Repeatability The ability to reproduce the same output readings when measuring the same temperature under ideal condi...

Page 33: ...mitted digitally Resolution The smallest detectable increment of measurement Resolution is usually limited by electrical noise and the number of bits of the Analog to Digital conversion Resolution is always a function of the measurement speed bandwidth and the temperature being measured Generally the slower the measurement the higher the resolution Also the higher the temperature the higher the re...

Page 34: ...on so use with care Transmission The amount percentage of light that passes through an object such as a window viewport or wafer BASF recommends using quartz or sapphire viewports BASF can calibrate probes to work with any viewport material chosen Transmission Factor can correct for viewport transmission losses Transmission Factor This probe set up feature allows the user to compensate for viewpor...

Page 35: ...ecommended References The most comprehensive coverage of the basic physics can be found in Theory and Practice of Radiation Thermometry by David DeWitt and Gene Nutter 1988 John Wiley Sons The best coverage of wafer temperature measurement is found in Advances in Rapid Thermal and Integrated Processing Chapters 2 3 and 4 edited by F Roozeboom Kluwer Academic Publisher the Netherlands 1996 ...

Page 36: ...Optional User Configurable 0 10V 4 20mA 0 20mA Ambient range 10 C to 60 C for Electronics Dimensions Lightpipe 1 0 diameter x 4 length 25 4mm x 100mm Pyrometer 1 375 diameter x 7 length 35mm x 178mm See Figures 15 16 Weight Lightpipe Probe 160 grams 5 6oz Lens Probe 375 grams 13 2oz CE Mark Fully certified Power 12 28VDC 3W Product Specific Performance Instrument temperature must be below target t...

Page 37: ... 33 Figure 14 Lens Collection Optics Pyrometer ...

Page 38: ... 34 Figure 15 Probe with Lightpipe ...

Page 39: ... NUT FERRULE SLEEVE WIDE RANGE OF OPTIONS LIGHTPIPE SHEATH SAPPHIRE 4 5mm OD 5 5mm OD 6 5mm OD OPEN AND CLOSED ENDS FERRULE O RING LIGHTPIPE SAPPHIRE DIAMETER 2mm 3mm 4mm LENGTH 1 TO 18 C Fremont CA Phone 510 490 2150 Portland OR Phone 503 794 4073 ...

Page 40: ... analog outputs Default Parameters The Exactus Industrial Mux ships with the following default parameters Analog output is enabled Note Not all Industrial Mux units will include analog outputs Only those with the Model number IFM8 IA will include the analog output ports Ambient alarm is set to power down all pyrometers when any pyrometer electronics temperature drops below 0ºC 32ºF or goes above 7...

Page 41: ...A 1 Selecting Properties of My Network Places b Double click on the connection If there is more than one connection you can determine which connection to use by unplugging the LAN cable from the Mux and the Status will change to Network Cable Unplugged See Figure A 2 Figure A 2 Network Connections Screen ...

Page 42: ...c The following screen Figure A 3 will appear click the Properties button Figure A 3 d Double click the Internet Protocol TCP IP line Figure A 4 this will bring up the screen shown in Figure A 5 Figure A 4 ...

Page 43: ...P address must not be the last number of the Industrial Mux e g if the Default Address is used this would be 80 iii The last number of the Default Gateway must be 1 iv The Subnet Mast must be 255 255 255 0 as shown above f Click OK on all the dialog boxes that are up Eventually the Network Connections dialog shown in Figure 2 will report that the Status is Connected 3 Configure the Mux using Windo...

Page 44: ...Choose a name such as i MUX and an icon as shown in Figure A 7 and click OK Figure A 7 c Select the TCP IP Winsock option from the Connect using drop down box then enter the Mux s IP address and click OK See Figure A 8 ...

Page 45: ...ndustrial Mux configuration be sure the select 9 Save Changes As noted this will reboot the Industrial Mux f HyperTerminal may not automatically display user keystrokes to the screen To turn on the echo feature press the Properties button circled in red in Figure A 10 below and select the Settings Tab and press the ASCII Setup button ...

Page 46: ... radio button for Echo typed characters locally Check the Echo typed characters locally check box and close the dialog windows User Interface Menu The User Interface Menu is shown in Figure A 9 above Below is a description of each menu item Figures A 10 and A 11 ...

Page 47: ...ry Defaults but you must follow this with Save Changes Save Changes Saves all settings to their current values and reboots the Industrial Mux After saving a message will be displayed saying rebooting You may now end the HyperTerminal session If more changes are needed you will have to click the disconnect icon followed by the connect icon to reestablish the connection these icons are located at th...

Page 48: ...vated the Industrial Mux will watch for missed readings from the pyrometer an indication that the pyrometer has failed in some way If missed readings occur the analog output will be forced to the Analog Safe Value and if programmed to do so energize one of the relays When the Pyrometer Analog Watchdog Item 2 in Figure A 13 is enabled then item 3 Pyrometer Watchdog Alarm Configuration appears offer...

Page 49: ...ternally Many data logging systems are configured to supply this voltage if yours is not you can use the same power supply driving the Industrial Mux to provide the power This is outlined in the schematic shown in Figure A 14 Figure A 15 Schematic for providing power to analog output loops only use if plant data system does not already provide the loop power ...

Page 50: ...f patents pending Exactus and TemperaSure are trademarks of Exactus Inc All rights reserved Overview Using the IFD 5 interface box the BASF Exactus pyrometer can communicate digitally selectable for either RS 232 or RS 485 line levels The IFD 5 provides power to the pyrometer and isolation of the communication lines To connect the pyrometer to a standard PC serial port using the IFD 5 make sure th...

Page 51: ...dbus command can be sent to switch the pyrometer into the Exactus Protocol mode NOTE For an example Modbus message to switch the pyrometer into the Exactus Protocol mode see Example 2 below Modbus Protocol The Modbus Protocol is an open serial interface standard which is often used to communicate between sensors and controllers in industrial environments Modbus is a polled protocol which means tha...

Page 52: ...nication mode the host can send commands to the pyrometer to start and stop sending readings or to change operational parameters of the pyrometer such as the readings data type and transmit frequency Data Packet Format The pyrometer can transmit the following four types of data packets Temperature Photodiode Current Dual Temperature and Current and Ambient Temperature The data values are represent...

Page 53: ...perature Header 0x84 occurs in the binary data and is escaped with the ESC character 0x80 Message 83 43 80 84 1F 32 22 7F 9E Data Message Descriptions Temperature Message Header Byte 0x81 Message Format 0x81 Temperature 32 bit IEEE Description Target temperature in degrees C Example Target temperature of 674 05 C Message 81 44 28 80 83 00 Note the insertion of an ESC character 0x80 due to the pres...

Page 54: ... Data Link Escape NAK 0x15 Negative Acknowledge Command Escape Sequence The host must use the DLE Data Link Escape character 0x10 to escape any command framing characters that occur in messages sent to the pyrometer Note that the DLE character is NOT included in the LRC calculation Example 1 The following command sets the User Rate Index to 0x3 The value of the ETX character 0x03 occurs in the dat...

Page 55: ...tes that the pyrometer is running in application mode Version 4 4 Prom Code E25F502B10101673FF factory use only Stop Conversions Description Commands the Pyrometer to stop sending temperature readings Command Byte 0x30 Format STX 0x30 0x30 ETX Response ACK valid NAK invalid Command Example 02 30 30 03 Example Response 06 Start Conversions Description Commands the Pyrometer to start sending tempera...

Page 56: ...ting point number that is represented according to the following formula N sign 1 F 2 E 127 Where N floating point number F fractional part in binary notation E exponent in bias 127 representation A sign bit 31 of 0 indicates a positive number and a 1 is negative The exponent field is represented by excess 127 notation The 23 fraction bits actually represent 24 bits of precision as a leading 1 in ...

Page 57: ...at Modbus register address 0x1011 This setting is called the Graph Rate in the TemperaSure software If the Update Rate is slower than the rate at which data is polled from the probe by the host computer or PLC repeat readings will result Too high of an update rate will lead to noisy measurements at the bottom end of the measurement range If high polling rates are required and noise at the lower en...

Page 58: ...cations the Save command must be executed using the Command Register in order to make the change permanent See the Command Register section below Calibration Factors and Tables Calibration factors and table entries are accessed at register address block 2000h 3FFFh see the Modbus Register Address Map All are 32 bit floating point values with the exception of the sizes for the Emissivity Fit and Av...

Page 59: ... range 5 Reserved 7 6 Dual Channel Ranging Mode 01 Channel 1 10 Channel 2 11 AUTO Using Modbus Coil Functions with Configuration Register Bits The Modbus protocol function 01h Read Coil Status and 05h Force Single Coil can be used to read and write individual bits in the pyrometer Configuration Registers The Modbus Coil addresses and their corresponding Configuration Register bits are shown in the...

Page 60: ... 2015 Channel 2 Calibration Factor Dual channel models only 2016 2017 Channel 2 Transmission Factor Dual channel models only 2018 2019 Channel 2 Current Offset Dual channel models only Emissivity Table 3000 300F Emissivity Table X Entries 0 through 7 Each entry is a 32 bit floating point 3010 301F Emissivity Table Y Entries 0 through 7 Each entry is a 32 bit floating point 3020 Emissivity Table Si...

Page 61: ...Mode Max Current Analog current output at maximum temperature 3114 3115 Current Mode Min Temp Current Mode Minimum Temperature 3114 3117 Current mode Max Temp Current Mode Maximum Temperature Auxiliary Registers 8000 Command Register 8001 RESERVED 8002 RESERVED 8003 Manual Range Register Manual ranging mode must be enabled by setting bit 4 in Configuration Register 2 ...

Page 62: ...ade connector designed for use when the two modules are stacked When the two modules are stacked vertically the power input and digital communications connections are pin for pin directly above one another These connections are labeled D D Vs and GND on both modules To connect the two modules wire D on the Analog Output Module directly to D on the Digital Interface Module and do the same for D Vs ...

Page 63: ...le will drive the current output through a resistance of up to 500 ohms The module can drive up to 1050 ohms if an external 24VDC power source is used The Analog Output Module is supplied configured for internal power To configure for external power a jumper inside the module must be moved The Analog Output Module and the Digital Interface Module are similar in appearance so make sure you are work...

Page 64: ...e The last section of this file contains the header Main 2 Just below the header insert the line hasanalog 1 This section of the file should read similar to the following example userRate 5 Main hasAnalog 1 WinMax 1 Top 75 Left 92 Width 718 3 Save the file and exit Configuration With all the connections made open the TemperaSure software program Wait a few seconds for the instrument to start displ...

Page 65: ...tep four above The minimum and maximum temperatures entered can be the minimum and maximum temperature the probe will read or they could be just a few degrees from each other When the Analog Output Module is configured the first time the default value for minimum temperature will be 0 00 C The maximum temperature will be the same as the maximum temperature of the probe connected values larger than...

Page 66: ... disconnected from any process system or tool that could be affected by readings from the Analog Output Module or the probe itself 2 Verify that the voltage or current meter being used to calibrate the Analog Output Module is properly calibrated and its calibration is up to date 3 Connect the probe to a computer capable of running the TemperaSure software under the Windows operating system Open th...

Page 67: ...ting Calibration of Analog Output Module To adjust the calibration of the Analog Output Module follow the steps outlined in the previous section Adjustments are made by the up and down arrows on the calibration menu box Adjust the calibration so the output from the module is either 10 000 volts or 20 000mA depending on the mode selected Once the output is correct press the Lock In button on the ca...

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