Azbil Micro Flow MQV0002, User Manual

Page: 84 / 94

7-16
Chapter 7. SPECIFICATIONS
„ z
Models with integrated display
MQV0050J/0200J/0500J
Unit: mm
Jack for
loader
Jack for
AC adapter
Digital
Mass Flow
Controller
L/min
m
PV
SP
OK ALM EV1 EV2
M4 screw (4) depth 5 min.
3
5.9
18
3.4
7.3
5.2
44
22
50
25
23.2
h1
(150)
h3
h2
150
2-3/4-16UNF
MQV0500
MQV0050
MQV0200
Model
h1 h2 h3 h4
151 145 102 45
152 146 103 46
RUN ENT DISP
h4
25.3
±0.5 110
±0.5
11.5
±0.5
27
±0.5
Pipe coupling made by Swagelok (2)
SS-810-1-8ST
Applicable pipe: outside diameter 1/2"
material SUS316
3/4-16UNF connection type
Rc 1/2" connection type
1/2" Swagelok connection type
Rc 1/2" pipe coupling (2)
25 25 (150)
HEX 26
(30.7) (30.7) (150)
1/2" VCR connection type
(31.5) (31.5) (150)
1/2" VCR pipe coupling made by Swagelok (2)
SS-8-VCR-1-8STSC11 or equivalent
4
Digital
Mass Flow
Controller
1 :
2 :
3 :
4 :
5 :
6 :
7
:
8 :
9 :
10 :
11 :
12 :
13 :
14 :
15 :
16 :
17 :
18 :
19 :
20 :
POWER(24V)
POWER(24V)
POWER GND
POWER GND
TEST
D.GND
DA
DB
D.GND
ALM OUT
EV1 OUT
EV2 OUT
DI 1
DI 2
DI 3
MODE INPUT
FLOW SP INPUT
A.GND
FLOW OUT
+5V(5mA max)
Pin Assign
MADE IN JA PAN