Azbil Micro Flow MQV0002, User Manual

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7-11
Chapter 7. SPECIFICATIONS
„  Gas type and control range
The controllable flow rate range may vary depending on the type of gas.
For details, see the tables below.
Model No.
Gas type
MQV9005 MQV9020
Control flow
rate range
mL/min(standard)
Setup/display
resolution
mL/min(standard)
Control flow rate
range
mL/min(standard)
Setup/display
resolution
mL/min(standard)
Air/nitrogen 0.10 to 5.00 0.02 0.2 to 20.0 0.1
Oxygen 0.10 to 5.00 0.02 0.2 to 20.0 0.1
Argon 0.10 to 5.00 0.02 0.2 to 20.0 0.1
Model No.
Gas type
MQV9200 MQV9500 MQV0002
Control flow
rate range
mL/min(standard)
Setup/display
resolution
mL/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Air/nitrogen 2 to 200 1 0.004 to 0.500 0.002 0.02 to 2.00 0.01
Oxygen 2 to 200 1 0.004 to 0.500 0.002 0.02 to 2.00 0.01
Argon 2 to 200 1 0.004 to 0.500 0.002 0.02 to 2.00 0.01
Carbon dioxide 1.0 to 120.0 0.5 0.003 to 0.300 0.001 0.010 to 1.200 0.005
Natural gas 13A
(LNG) (1) 2 to 200 1 0.004 to 0.500 0.002 0.02 to 1.60 0.01
Natural gas 13A
(LNG) (2) 2 to 200 1 0.004 to 0.500 0.002 0.02 to 2.00 0.01
100 % methane 2 to 200 1 0.004 to 0.500 0.002 0.02 to 2.00 0.01
100 % propane 0.6 to 60.0 0.2 0.002 to 0.160 0.001 0.006 to 0.600 0.002
100 % butane 0.4 to 50.0 0.2 (1.0 to 120.0)
*
(0.5)
*
0.004 to 0.400 0.002
Model No.
Gas type
MQV0005 MQV0020 MQV0050(B, C)
Control flow
rate range
L/min(standard)
Setup/display
resolution
L/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Air/nitrogen 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
Oxygen 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
Argon 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
Carbon dioxide 0.03 to 3.00 0.01 0.10 to 12.00 0.05 0.3 to 30.0 0.1
Natural gas 13A
(LNG) (1) 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
Natural gas 13A
(LNG) (2) 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
100 % methane 0.04 to 5.00 0.02 0.2 to 20.0 0.1 0.4 to 50.0 0.2
100 % propane 0.02 to 1.60 0.01 0.06 to 6.00 0.02 0.2 to 16.0 0.1
100 % butane 0.010 to 1.200 0.005 0.04 to 4.00 0.02 0.10 to 10.00 0.05
Model No.
Gas type
MQV0050(J, K) MQV0200 MQV0500
Control flow
rate range
L/min(standard)
Setup/display
resolution
L/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Control flow rate
range
L/min(standard)
Setup/display
resolution
L/min(standard)
Air/nitrogen 0.4 to 50.0 0.2 2 to 200 1 4 to 500 2
Oxygen 0.4 to 50.0 0.2 2 to 200 1 4 to 500 2
Argon 0.4 to 50.0 0.2 2 to 200 1 4 to 500 2
Carbon dioxide 0.3 to 30.0 0.1 1 to 120 0.5 4 to 400 2
Natural gas 13A
(LNG) (1) 0.4 to 50.0 0.2 2 to 200 1 4 to 400 2
Natural gas 13A
(LNG) (2) 0.4 to 50.0 0.2 2 to 200 1 4 to 500 2
100 % methane 0.4 to 50.0 0.2 2 to 200 1 4 to 500 2
100 % propane 0.2 to 16.0 0.1 0.6 to 60.0 0.2 2 to 200 1
100 % butane 0.10 to 12.00 0.05 0.4 to 40.0 0.2 2 to 160 1
* When the gas type is set at “100 % butane” on the MQV9500, the unit of flow rate display is mL/min.