Azbil Micro Flow MQV0002, User Manual

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Safety Precautions
WARNING
Never allow gases that are within explosive limits to pass through this device. Doing so might
result in an explosion.
If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use.
Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used
for some other gas even once. Oil contained in another gas may be deposited on the gas-
contacting parts and ignite upon reacting with oxygen.
CAUTION
If the device is used for burner air-fuel ratio control, take the necessary countermeasures
with the equipment to prevent the occurrence of backfire and to avoid any influence to the
device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of
the burner could damage the controller.
This device cannot be used for measurement or control of hydrogen or helium gas. Use a
model specially designed for hydrogen and helium gases. For information on whether this
device can be used for gases other than the standard compatible gases, be sure to contact
the azbil Group in advance.
Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the
pipes enters the device, measurement or control error or damage might occur.
If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist
trap capable of eliminating foreign matter 0.1 µm or greater in diameter at the upstream. Be
sure to inspect and replace the filter at regular intervals.
Use this device within the operating differential pressure range. Not doing so may cause
hunting. Continuous hunting could damage the valve.
Do not subject this device to pressure above its pressure resistance. Doing so might damage
it.
Be sure to use within the flow-rate range stipulated in the product specifications.
To prevent excessive flow, use a suitable means to control the supply pressure or use a
throttle valve or the like to control the flow rate.
If the flow rate exceeds the upper limit, both the flow rate display and the output voltage/
current may indicate considerably lower values than the actual flow rate.
If damage could result from the abnormal functioning of this device, include appropriate
redundancy in the system design.