ATTOTECH GR020 Manual Download Page 9

 

9

Connection of the Attotech amplifier (option) 

Warning 

Make sure that your wall power socket delivers the voltage that has been pre-set for the driver 
unit and that is indicated on the back of the rack (see picture below, #11).  

 

Description of the driver unit 

The front panel of the drive unit is divided vertically in two parts corresponding to inputs, 
adjustment knob and monitoring devices grouped in the left part, and the high voltage unit located 
on the right part. 

 
 

 

 

1.

  Main power switch 

2.

 Peak 

voltage 

indicator 

3.

  Control voltage select 

4.

  Voltage adjustment knob 

5.

  Low voltage to high voltage connect 

6.

  Low voltage monitor connector, high Z 

7.

  Control input connector, high Z 

8.

  Gate input connector, high Z 

9.

  High voltage offset (disabled) 

10.

 Control input (disabled) 

11.

  High voltage output 

 

Electrical connections 

 
A delay box with microsecond resolution triggered by the laser directly or a photo diode should be 
used to feed the piezo drive unit through its gate input connector (#8). It should be a 

positive

 

TTL. Recommended values for the opening gate are 120-500

μ

s. 

 
The high voltage output (#11) is connected to the Lemo connector on the piezo valve. If you use 
vacuum feedthroughs and extensions, make sure that the cables and connectors are specified for 
500 V rms. The control input (#7) can be used to control the output voltage of the device with an 
external DC voltage source, for instance a PC with a DAC card. 
 
 
 
 

Summary of Contents for GR020

Page 1: ...Manual GR020 PIEZO DRIVEN PULSED VALVE Attotech handelsbolag Gull kra Byav g 18 245 35 Staffanstorp Sweden...

Page 2: ...2...

Page 3: ...3...

Page 4: ...Operation 10 Turning on off procedure 10 Turning on off procedure with the Attotech Driver Option 10 Settings 11 Target change 11 Piezo instructions 11 Trouble shooting 12 Gas leak diagnosis 12 Atten...

Page 5: ...applied The valve opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through the body The amount of gas is controlled by the voltage applied to the PZD At the end of...

Page 6: ...n this drawing 4 5 8 7 9 6 16 14 11 13 12 10 2 1 3 15 1 Body front piece 10 M2 5 slotted screw 2 Body back piece 11 Piezo electric disc PZD 3 M3 hex screw 12 Clamping screw 4 Cooling tube 13 Clamping...

Page 7: ...turn is enough The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W A flow of 4 5 l min of 15 C tap water provides sufficient cooling The piezo electric...

Page 8: ...ative operating voltage must not exceed 350 V Keep in mind that in high pressure atmosphere discharges occur at lower electric fields hence the voltage limit A delay box with microsecond resolution tr...

Page 9: ...6 Low voltage monitor connector high Z 7 Control input connector high Z 8 Gate input connector high Z 9 High voltage offset disabled 10 Control input disabled 11 High voltage output Electrical connect...

Page 10: ...high voltage Note that the opening voltage depends on the gas used see table in the specifications section Scan the delay controlling when the valve starts to open to find temporal overlap of the rele...

Page 11: ...er switch 1 Close the cooling and close the backing gas bottle Settings The gas flow when the valve is open is dependent on the backing pressure Stable operation of the pulsed valve requires the backi...

Page 12: ...k and front of the valve body Check if the gas feed through is mounted according to the instructions in the Installation Gas section If the gas feed through is mounted according to the instructions pr...

Page 13: ...leak remains repeat the procedure step 3 Note that locking the position of the poppet with the poppet nut tends to retract the poppet hence the leak might reappear In that instance repeat the procedur...

Page 14: ...rn the screw in the threaded hole The screws should be tightened in a cross tightening sequence Add a small amount of torque for every iteration Pay attention not to damage the threads Thanks to the l...

Page 15: ...ons External input voltage range 0 to 350 V Electrical capacitance 65nF Electrical Power 50 W Repetition rate 0 1 kHz Electrical opening time 120 s to 500 s Heat removal power 2 W 4 5 L min of water O...

Page 16: ...rranty Except as thus provided we disclaim all warranties express or implied including any warranty of fitting for a particular purpose Attotech HB will not assume responsibility for contingent liabil...

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