ATTOTECH GR020 Manual Download Page 5

 

5

Introduction 

The GR020 pulse valve is designed to precisely inject gas in a vacuum chamber. Both the timing 
and the amount of gas released can be finely tuned. 
 

Applications: 

- High Order Harmonic generation 
- Attophysics 
- Molecular alignment 
- Cluster science 
- Electron spectrometers 
- Gas phase spectroscopy 
 

Principle of operation 

The pulse valve is driven by a piezo electric disc (PZD) on which a small poppet is tightened. It 
opens and closes a 1 mm diameter hole where thhe gas flows. The moving parts are kept as light 
as possible, which makes opening times as short as 30

μ

s feasible.

 The PZD and the poppet are 

mounted inside the valve body where backing pressures up to 5 bars can be applied.  The valve 
opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through 
the body. The amount of gas is controlled by the voltage applied to the PZD. At the end of this 
pipe the target is tightened to the body by two screws. The target is decoupled from the moving 
parts; this makes the switch between targets very easy, and allows for custom-made target 
designs. The valve can is driven by a voltage gate produced by our piezo valve drive unit, 
together with a delay generator, or other pulsed high voltage power supplies. A 120

μ

s electrical 

gate corresponds to a mechanical opening time down to 30

μ

s.* 

The body of the valve is cooled by a water cooling circuit. 

                                                 

 

The opening time is estimated from how much the valve-trigger must be temporally detuned 

from a laser pulse to completely cancel the high harmonic yield from the laser-gas-interaction.

 

Summary of Contents for GR020

Page 1: ...Manual GR020 PIEZO DRIVEN PULSED VALVE Attotech handelsbolag Gull kra Byav g 18 245 35 Staffanstorp Sweden...

Page 2: ...2...

Page 3: ...3...

Page 4: ...Operation 10 Turning on off procedure 10 Turning on off procedure with the Attotech Driver Option 10 Settings 11 Target change 11 Piezo instructions 11 Trouble shooting 12 Gas leak diagnosis 12 Atten...

Page 5: ...applied The valve opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through the body The amount of gas is controlled by the voltage applied to the PZD At the end of...

Page 6: ...n this drawing 4 5 8 7 9 6 16 14 11 13 12 10 2 1 3 15 1 Body front piece 10 M2 5 slotted screw 2 Body back piece 11 Piezo electric disc PZD 3 M3 hex screw 12 Clamping screw 4 Cooling tube 13 Clamping...

Page 7: ...turn is enough The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W A flow of 4 5 l min of 15 C tap water provides sufficient cooling The piezo electric...

Page 8: ...ative operating voltage must not exceed 350 V Keep in mind that in high pressure atmosphere discharges occur at lower electric fields hence the voltage limit A delay box with microsecond resolution tr...

Page 9: ...6 Low voltage monitor connector high Z 7 Control input connector high Z 8 Gate input connector high Z 9 High voltage offset disabled 10 Control input disabled 11 High voltage output Electrical connect...

Page 10: ...high voltage Note that the opening voltage depends on the gas used see table in the specifications section Scan the delay controlling when the valve starts to open to find temporal overlap of the rele...

Page 11: ...er switch 1 Close the cooling and close the backing gas bottle Settings The gas flow when the valve is open is dependent on the backing pressure Stable operation of the pulsed valve requires the backi...

Page 12: ...k and front of the valve body Check if the gas feed through is mounted according to the instructions in the Installation Gas section If the gas feed through is mounted according to the instructions pr...

Page 13: ...leak remains repeat the procedure step 3 Note that locking the position of the poppet with the poppet nut tends to retract the poppet hence the leak might reappear In that instance repeat the procedur...

Page 14: ...rn the screw in the threaded hole The screws should be tightened in a cross tightening sequence Add a small amount of torque for every iteration Pay attention not to damage the threads Thanks to the l...

Page 15: ...ons External input voltage range 0 to 350 V Electrical capacitance 65nF Electrical Power 50 W Repetition rate 0 1 kHz Electrical opening time 120 s to 500 s Heat removal power 2 W 4 5 L min of water O...

Page 16: ...rranty Except as thus provided we disclaim all warranties express or implied including any warranty of fitting for a particular purpose Attotech HB will not assume responsibility for contingent liabil...

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