ATTOTECH GR020 Manual Download Page 8

 

8

Gas 

The gas connection on the valve body-back is a 6 mm Swagelok positionable elbow. Instructions 
on how to mount the tube in the connector can be downloaded from, 
 

“An Installer’s Pocket Guide for Swagelok Tube Fittings (MS-13-151, R3)” page 10 

http://www.swagelok.com/downloads/webcatalogs/EN/MS-13-151.PDF

 

The elbow can be oriented to face any direction, instructions on page 14 in the Swagelok pocket 
guide.  
 
For stable operation the backing pressure inside the body must be well regulated. A good quality 
passive regulator is usually sufficient. 
 
 

Electrical connections 

The high voltage amplifier driving the pulsed valve is connected to the Lemo connector on the 
valve body-back. Make sure that the cables and connectors are specified for 500 V rms. At 5 
Bars backing pressure, the negative operating voltage must not exceed -350 V. Keep in mind that 
in high pressure atmosphere discharges occur at lower electric fields, hence the voltage limit. 
 
 

 

 
 
A delay box with microsecond resolution triggered by the laser directly or a photo diode can be 
used to feed the high voltage amplifier.  

 
If you ordered the Attotech amplifier, go directly to section “connection of Attotech amplifier”.

  

 
Otherwise, we recommend the E470-00 amplifier from PI, though other types might work as well. 
Be aware that the piezo disc requires a power up to 50 W from the amplifier for kHz operation.  
The shape of the electrical signal should be checked on an oscilloscope with a high voltage probe 
prior to operation. Input and output impedances of the equipment must be set correctly to 
preserve the signal shape. 
Recommended values for the opening gate are 120-500

μ

s.  

 

 

 

Delay box

Pulse valve

HV amplifier

0 to -350 V

120-500

s

opening

Trigger

0

1V - 3.5 V

T

0

T

1

T

2

time

0

-100 V to

- 350 V

T

0

T

1

T

2

time

G = -100

Summary of Contents for GR020

Page 1: ...Manual GR020 PIEZO DRIVEN PULSED VALVE Attotech handelsbolag Gull kra Byav g 18 245 35 Staffanstorp Sweden...

Page 2: ...2...

Page 3: ...3...

Page 4: ...Operation 10 Turning on off procedure 10 Turning on off procedure with the Attotech Driver Option 10 Settings 11 Target change 11 Piezo instructions 11 Trouble shooting 12 Gas leak diagnosis 12 Atten...

Page 5: ...applied The valve opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through the body The amount of gas is controlled by the voltage applied to the PZD At the end of...

Page 6: ...n this drawing 4 5 8 7 9 6 16 14 11 13 12 10 2 1 3 15 1 Body front piece 10 M2 5 slotted screw 2 Body back piece 11 Piezo electric disc PZD 3 M3 hex screw 12 Clamping screw 4 Cooling tube 13 Clamping...

Page 7: ...turn is enough The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W A flow of 4 5 l min of 15 C tap water provides sufficient cooling The piezo electric...

Page 8: ...ative operating voltage must not exceed 350 V Keep in mind that in high pressure atmosphere discharges occur at lower electric fields hence the voltage limit A delay box with microsecond resolution tr...

Page 9: ...6 Low voltage monitor connector high Z 7 Control input connector high Z 8 Gate input connector high Z 9 High voltage offset disabled 10 Control input disabled 11 High voltage output Electrical connect...

Page 10: ...high voltage Note that the opening voltage depends on the gas used see table in the specifications section Scan the delay controlling when the valve starts to open to find temporal overlap of the rele...

Page 11: ...er switch 1 Close the cooling and close the backing gas bottle Settings The gas flow when the valve is open is dependent on the backing pressure Stable operation of the pulsed valve requires the backi...

Page 12: ...k and front of the valve body Check if the gas feed through is mounted according to the instructions in the Installation Gas section If the gas feed through is mounted according to the instructions pr...

Page 13: ...leak remains repeat the procedure step 3 Note that locking the position of the poppet with the poppet nut tends to retract the poppet hence the leak might reappear In that instance repeat the procedur...

Page 14: ...rn the screw in the threaded hole The screws should be tightened in a cross tightening sequence Add a small amount of torque for every iteration Pay attention not to damage the threads Thanks to the l...

Page 15: ...ons External input voltage range 0 to 350 V Electrical capacitance 65nF Electrical Power 50 W Repetition rate 0 1 kHz Electrical opening time 120 s to 500 s Heat removal power 2 W 4 5 L min of water O...

Page 16: ...rranty Except as thus provided we disclaim all warranties express or implied including any warranty of fitting for a particular purpose Attotech HB will not assume responsibility for contingent liabil...

Reviews: