NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 5 of 18
3. Contact List and How to Become a User
3.1 Emergency Responses and Communications
Security Control Center: 2358-8999 (24hr) & 2358-6565 (24hr)
Safety Officer: Mr. Wing Leong CHUNG 2358-7211 & 64406238
Deputy Safety Officer: Mr. Man Wai LEE 2358-7900 & 9621-7708
NFF EC Technician: Mr. Peter Yiu Cheong PUN 2358-7225 & 2358-7218
NFF Phase 2 Technician: Mr. Wilson Pui Keung YIP 2358-7894
3.2 Training to Become a Qualified AST Peva-450I User
Please follow the procedure below to become a qualified user of the AST Peva-450I.
1. Read all materials on the NFF website concerning the AST Peva-450I.
2. Send an e-mail to NFF requesting AST Peva-450I safety operation training.
Scheduling can take up to several weeks due to the many requests coming in
for this tool.
4. Operating Procedures
4.1 System Description
AST Peva-450I is consisted of a single vacuum chamber for METAL evaporation
processes that use an electron beam to heat the metal sources. There are 4-pocket
E-Beam evaporator used for depositing Ti, Al, Au and Ni. The materials are put into
crucible liners for better heat uniformity throughout the source material and to allow
