NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 10 of 18
4.7 Inspecting the chamber before use
1. Inspect the planetary for any “real” wafers belonging to other users. If any are
found, keep them in a labeled box.
2. Press “SH1” button on touch screen panel for shutter open.
3. Press “POCKET” button to entry E-Gun Pocket Control page and toggle
yellow button “OFF/ON” for crucible select and verify each source is
sufficient for process.
4. During toggle “OFF/ON” button to rotate the crucible to each position and
inspect for splattering, contamination, cracking or other problems. Be sure the
crucible assembly rotates freely. Don’t use crucibles in poor condition. Report
any problems to NFF staff.
5. Inspect the chamber for peeling, particles, and material splatters. Vacuum and
wipe if necessary. Thorough cleaning of the equipment every time will aid in
reproducible results long term.
6. Make sure the view port is clear, if not; please clean it firstly before close the
chamber door.
7. Load source into the correct crucible position posted on the front of the control
panel. NOTE: some materials are allowed in multiple crucibles. Making sure
they are clean and fit with the correct height and shape (snug not tight).
Correct height would be 60% to 100% of the crucibles original Height or
original weight.
8. If more pellets are needed, be careful not to overfill. Pellets must not protrude
above crucible or Hearth may get stuck or jam.
9. Return the shutter to the closed position.
10. If a new crystal monitor is needed (80% or less), change it now.
