R·I·T
Title: ASML Stepper
Semiconductor & Microsystems
Fabrication Laboratory
Revision: B Rev Date: 12/21/2010
RIT SMFL
Page 5 of 11
6.2
Loading the Reticles
6.2.1 To remove the reticle box from the machine, under select Mat Hdl from the top of
the screen and then 3 – Exchange Reticle Box. Click the Unlock button in the
middle of the screen to unlock the reticle box.
6.2.2 Remove the box by lifting straight up 2 cm, tilting the front up and moving it away
from the stepper at a 45 degree angle. Always support the reticle box on the bottom
to prevent reticles from falling out.
6.2.3 Carefully open the reticle box. The clear top is released from the base by sliding
the 4 clamps underneath the base. Load the reticles chrome side down with the pre-
alignment stars facing out. Never touch the surface of a reticle. Close the reticle
box and make sure it is secured before lifting. Do not remove the Combi Reticle
from the top slot.
6.2.4 To load the reticle box, lower it straight down without tilting it. The open side of
the internal cassette should be towards the stepper.
6.2.5 Select the Read 1 button to read the barcodes and display the reticle IDs.
