Agilent Technologies VHS-4 Instruction Manual Download Page 28 | Manualshive

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Agilent Technologies VHS-4 Instruction Manual Download Page 28

VHS-4 Diffusion Pump

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DRAFT 8/7/02

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Summary of Contents for VHS-4

Page 1: ...m technologies VHS 4 Diffusion Pump Part No 699901021 Rev No D Date October 2000 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Page 2: ...D R A F T 8 7 0 2 Copyright 2000 Varian Vacuum Technologies VHS 4 Diffusion Pump ...

Page 3: ...ng standard s or other normative documents auf das sich diese Erklärung bezieht mit der den flogenden Norm en oder Richtlinie n übereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn...

Page 4: ...serious risk It is the responsibility of the user to maintain safe operating conditions at all times Varian assumes no liability for personal injury or damage resulting from operation or service of the equipment Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazar...

Page 5: ... improper use by untrained persons non authorized interference with the equipment or any action contrary to that proved for by specific national standards This manual uses the following standard safety protocol WARNING The warnings are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The cautions...

Page 6: ...VHS 4 Diffusion Pump This page intentionally left blank D R A F T 8 7 0 2 ...

Page 7: ... 4 Unpacking 4 Pump Oil Installation 4 Vacuum System Connections 4 Cooling Water Connections 5 Electrical Connections 5 Thermal Switch 6 Section II Operation 7 Startup Procedure 7 Shutdown Procedure 8 Section III Maintenance and Service 9 General 9 Periodic Inspection 9 Cleaning 9 Cold Cap Removal Installation 10 Jet Assembly Removal Installation 11 Heater Replacement 12 Adding Pump Fluid 12 Secti...

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Page 9: ...vide an interlock to ensure that the power supply to the pump heater cannot be activated if the foreline pump is not running and or the pressure in foreline is above 0 5 Torr 0 38 mbar Overtemperature Fit temperature sensors and pump fluid level sensors with feedback to an interlock on the heater power supply Insufficient water flow through the main cooling coils Use water flow sensor and feedback...

Page 10: ...s with clean dry oil free compressed air Oxygen and other strong oxidizers are even more dangerous than air Certain conditions of temperature and pressure can cause a combustible mixture to explode The larger the diffusion pump the greater the risk of explosion and the greater the risk of dam age and injury Never operate large diffusion pumps utilizing hydrocarbon oils without a complete safety an...

Page 11: ...nous and Corrosive Compounds When pump ing poisonous reactive and or corrosive gas vapors or chemicals proper operation and regeneration do not always ensure that all hazardous materials have been totally removed If hazardous gas vapors chemicals or combustible mixtures are pumped suf ficient quantities may exist during operation or remain after regeneration to cause severe injury or death Pump Fl...

Page 12: ...oils from previous use turns to steam when the pump is reheated This steam must be allowed to escape with out contacting personnel Whenever possible design the water system with interlock valves so that power cannot be applied to the pump unless water is flow ing in the main cooling coils not Quick Cool coils High Voltages Diffusion pump heaters operate at voltages high enough to kill Design syste...

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Page 32: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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