Agilent Technologies VHS-4 Instruction Manual Download Page 10

VHS-4 Diffusion Pump 

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DRAFT 8/7/02

Explosion

Operation of the diffusion pump without continuous 
evacuation below 0.5 Torr (0.67 mbar), or without 
coolant and introducing a strong oxidizer (such as 
air) or explosive vapors or powders or materials 
which may react with pumping fluids in a hot pump 
(above 300 °F or 150 °C) can cause an explosion. 
Such an explosion can violently expel valves and 
other hardware, slam open doors that are not 
designed for appropriate pressure relief, or burst other 
components of the vacuum system. Serious injury or 
death may result from expelled parts, doors, shrapnel, 
and shock waves.

Three elements are required for explosion: fuel, oxi-
dizer, and an ignition. A combination of temperature 
and pressure can be a source of ignition. Most diffu-
sion pump fluids, except mercury, are fuels. Hydro-
carbon oils are more prone to oxidize and explode 
than synthetic silicone-based oil. The oxidizer can be 
air, which is a strong oxidizer that is introduced by a 
leak, deliberately brought in via a process, or inad-
vertently admitted by operator or by a process con-
troller error. 

Explosion and Fire from Acetone and Alcohol: Diffu-
sion pumps are typically cleaned with acetone and 
alcohol. When combined with air, oxygen, and other 
oxides, alcohol and most other solvents are very 
flammable and explosive. Never permit any trace of 
these cleaners to remain in or on the pump. Always 
remove all traces of alcohol and acetone and other 
cleaners with clean, dry, oil-free compressed air.

Oxygen and other strong oxidizers are even more
dangerous than air. Certain conditions of temperature
and pressure can cause a combustible mixture to
explode. The larger the diffusion pump, the greater
the risk of explosion and the greater the risk of dam-
age and injury. Never operate large diffusion pumps
utilizing hydrocarbon oils without a complete safety
analysis for the entire system and for the application. 

Never operate a large diffusion pump under the condi-
tions listed in Table 2. Any of these situations increases
the probability of an explosion.

Table 2

Explosive Conditions

Prohibited Action

Explosion-Causing Condition

Do not run pump without 
cooling water 

Overtemperature

Do not run pump with low 
level of pump fluid

Overtemperature

Do not run pump without 
proper backing or holding 
pump

Overpressure

Do not run pump when 
not evacuated below 
0.5 Torr (0.38 mbar)

Overpressure

Do not admit air to, or 
rough through, a pump 
with hot boiler

Overpressure plus strong 
oxidizer

Do not open drain or fill 
plug while pump is under 
vacuum, especially when 
it is hot

Overpressure plus strong 
oxidizer

Do not contaminate pump 
with explosive vapors

Lower explosive threshold 
of gas mixtures

Do not remove, defeat, or 
override safety 
counter-measures such as 
pressure and thermal 
switches and valve 
sequencer interlocks

Overtemperature, 
overpressure, more 
combustible mixtures

Do not machine or weld 
any part of the pump 
without removing all oil or 
solvent residue in pump in 
large pumps

Source of ignition

Do not use unsuitable 
pumping fluid, especially 
hydrocarbon oil

Lower explosive threshold 
of gas mixture

Summary of Contents for VHS-4

Page 1: ...m technologies VHS 4 Diffusion Pump Part No 699901021 Rev No D Date October 2000 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Page 2: ...D R A F T 8 7 0 2 Copyright 2000 Varian Vacuum Technologies VHS 4 Diffusion Pump ...

Page 3: ...ng standard s or other normative documents auf das sich diese Erklärung bezieht mit der den flogenden Norm en oder Richtlinie n übereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn...

Page 4: ...serious risk It is the responsibility of the user to maintain safe operating conditions at all times Varian assumes no liability for personal injury or damage resulting from operation or service of the equipment Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazar...

Page 5: ... improper use by untrained persons non authorized interference with the equipment or any action contrary to that proved for by specific national standards This manual uses the following standard safety protocol WARNING The warnings are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The cautions...

Page 6: ...VHS 4 Diffusion Pump This page intentionally left blank D R A F T 8 7 0 2 ...

Page 7: ... 4 Unpacking 4 Pump Oil Installation 4 Vacuum System Connections 4 Cooling Water Connections 5 Electrical Connections 5 Thermal Switch 6 Section II Operation 7 Startup Procedure 7 Shutdown Procedure 8 Section III Maintenance and Service 9 General 9 Periodic Inspection 9 Cleaning 9 Cold Cap Removal Installation 10 Jet Assembly Removal Installation 11 Heater Replacement 12 Adding Pump Fluid 12 Secti...

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Page 9: ...vide an interlock to ensure that the power supply to the pump heater cannot be activated if the foreline pump is not running and or the pressure in foreline is above 0 5 Torr 0 38 mbar Overtemperature Fit temperature sensors and pump fluid level sensors with feedback to an interlock on the heater power supply Insufficient water flow through the main cooling coils Use water flow sensor and feedback...

Page 10: ...s with clean dry oil free compressed air Oxygen and other strong oxidizers are even more dangerous than air Certain conditions of temperature and pressure can cause a combustible mixture to explode The larger the diffusion pump the greater the risk of explosion and the greater the risk of dam age and injury Never operate large diffusion pumps utilizing hydrocarbon oils without a complete safety an...

Page 11: ...nous and Corrosive Compounds When pump ing poisonous reactive and or corrosive gas vapors or chemicals proper operation and regeneration do not always ensure that all hazardous materials have been totally removed If hazardous gas vapors chemicals or combustible mixtures are pumped suf ficient quantities may exist during operation or remain after regeneration to cause severe injury or death Pump Fl...

Page 12: ...oils from previous use turns to steam when the pump is reheated This steam must be allowed to escape with out contacting personnel Whenever possible design the water system with interlock valves so that power cannot be applied to the pump unless water is flow ing in the main cooling coils not Quick Cool coils High Voltages Diffusion pump heaters operate at voltages high enough to kill Design syste...

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Page 32: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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