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Agilent Technologies TPS-compact X3580-64000, User Manual

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Agilent Technologies TPS-compact X3580-64000 User Manual Download Page 144

9 

Instruksjon Manual

 

Bruk

 

 

144/312 

TPS-compact User Manual / 87-901-010-01 (F

)

 

Bruk 

Alle instruksjoner for korrekt bruk finnes i dette avsnittet. 

Les nøye gjennom denne manualen før systemet tas i bruk. Hvis 
vakuumkammeret varmes opp, skal temperaturen på inngangsflensen 
ikke overskride 120 °C med ConFlat inngangsflens eller 80 °C med 
ISO inngangsflens. 
 

ADVARSEL! 

 

 

Ikke start pumpesystemet hvis inngangsflensen ikke er koplet til 

vakuumkammeret, eller ikke er lukket med lukkeflensen. 

 

ADVARSEL! 

 

 

Ikke berør turbopumpen eller noe av tilleggsutstyret under oppvarmingen. De 

høye temperaturene kan føre til brannskader. 

 

ADVARSEL! 

 

 

Unngå støt eller brå bevegelser av turbopumpen når den er i bruk. Lagrene 

kan kunne skades og det kan kunne oppstå skade på personer eller 

gjenstander. 

 

Summary of Contents for TPS-compact X3580-64000

Page 1: ...64020 X3580 64021 X3580 64022 X3580 64023 X3580 64024 X3580 64025 X3580 64026 X3580 64027 Manuale di istruzioni Instruksjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l...

Page 2: ...e furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime con...

Page 3: ...TPS compact TPS compact User Manual 87 901 010 01 F 3 312 TPS compact...

Page 4: ...TPS compact 4 312 TPS compact User Manual 87 901 010 01 F...

Page 5: ...ecolari 14 Informazioni Generali 15 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Uso22 Manutenzione 25 Smaltimento 26 2 Gebrauchsanleitung27 Sicherheitshinweise f r Turbomo...

Page 6: ...49 Installation 51 Utilisation 53 Entretien 56 Mise au rebut 57 4 Manual de istrucciones 59 Indicaciones de Seguridad para Bombas Turbomoleculares 60 Informaci n general 61 Almacenamiento 64 Preparaci...

Page 7: ...Veiligheidsinstructies voor Turbomoleculaire pompen 92 Algemene informatie 93 Opslag 96 Uitpakken 97 Installatie 99 Gebruik 101 Onderhoud 104 Afvalverwerking 105 7 Istruktionsbog 107 Sikkerhedsanvisni...

Page 8: ...F rberedelser f r installationen 127 Installation 128 Anv nding 130 Underh ll 133 Bortskaffning 134 9 Instruksjon Manual 135 Sikkerhetsanvisninger for Turbomolekyl re pumper 136 Generell informasjon1...

Page 9: ...65 Biztons gi tmutat Turb molekul ris szivatty khoz 166 ltal nos inform ci 167 T rol s 170 El k sz t s telep t sre 171 Telep t s 173 Haszn lat 175 Karbantart s 178 Megsemmis t s 179 12 Podrecznik Inst...

Page 10: ...n informace 197 Uskladn n 200 P prava k instalaci 201 Instalace 202 Pou it 204 dr ba 207 Likvidace 208 14 N vod na Obsluhu 209 Bezpe nostn n vod pre Turbomolekul rne v vevy 210 V eobecn inform cie 211...

Page 11: ...38 16 Instructions for Use 239 Safety Guideline for Turbomolecular Pumps 240 General Information 241 Storage 244 Preparation for Installation 245 Installation 246 Use248 Maintenance 251 Disposal 252 1...

Page 12: ...Contents 12 312 TPS compact User Manual 87 901 010 01 F Window Protocol 289 Service Options 299 Orderable Parts 305...

Page 13: ...Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Simboli usati 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Uso 22 Accensione ed Uso del TP...

Page 14: ...ata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o...

Page 15: ...azioni di alto e ultra alto vuoto integrata dal relativo controller e dalla pompa primaria Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di li...

Page 16: ...enza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE I messaggi di attenzione s...

Page 17: ...arti calde ON Avviamento Alimentazione Pericolo rischio di scossa elettrica OFF Arresto Alimentazione AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioat...

Page 18: ...te le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e...

Page 19: ...compact e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente ATTENZIO...

Page 20: ...5 C a 35 C umidit relativa 0 95 non condensante In presenza di campi elettromagnetici il sistema di pompaggio deve essere protetto tramite opportuni schermi Il TPS compact pu essere installato in qua...

Page 21: ...one dell aria Tab 1 FLANGIA TIPO DI MORSETTO N COPPIA DI SERRAGGIO ISO 63 Morsetto doppio con filettatura M10 4 22 Nm ISO 100 K Morsetto doppio con filettatura M10 4 22 Nm ISO 160 K Morsetto doppio co...

Page 22: ...n deve essere superiore a 120 C con flangiatura ConFlat e a 80 C con flangiatura ISO AVVERTENZA Non far funzionare mai il sistema di pompaggio se la flangia di ingresso non collegata alla camera a vuo...

Page 23: ...ettere in posizione ON l interruttore esterno Il controller incorporato riconosce automaticamente la presenza dell alimentazione ed avvia la pompa Alla prima accensione bene adottare la modalit Soft S...

Page 24: ...mation Arresto del TPS compact Per arrestare il TPS compact sufficiente mettere in posizione OFF l interruttore esterno Il controller incorporato arresta immediatamente il sistema di pompaggio Arresto...

Page 25: ...ere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent NOTA Pri...

Page 26: ...che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utent...

Page 27: ...bomolekularpumpen 28 Allgemeine Informationen 29 Verwendete Symbole 31 Vor der Installation 33 Installation 35 Gebrauch 37 Einschaltung und Gebrauch von Modell TPS compact 38 Stoppen von Modell TPS co...

Page 28: ...hen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und S...

Page 29: ...henden Controller und der Prim rpumpe besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festparti...

Page 30: ...hinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshi...

Page 31: ...tart Versorgung Gefahr von Stromschl gen OFF Stopp Versorgung WARNUNG Wird die Pumpe zum Pumpen von giftigen brennbaren oder radioaktiven Gasen verwendet die entsprechenden Verfahren f r das jeweilige...

Page 32: ...ht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus...

Page 33: ...compact ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar...

Page 34: ...312 TPS compact User Manual 87 901 010 01 F HINWEIS Modell TPS compact kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben u...

Page 35: ...em atmosph rischen Druck Temperatur von 5 C bis 35 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist das Pumpensystemdie Pumpe entsprechend abz...

Page 36: ...reier Raum von mindestens 20 cm bleibt damit die Luft frei zirkulieren kann Tab 1 FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT ISO 63 Doppelschelle mit Gewinde M10 4 22 Nm ISO 100 K Doppelschelle mit Gewinde...

Page 37: ...r 120 C und bei einem ISO Flansch nicht ber 80 C steigen WARNUNG Das Pumpensystem darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit...

Page 38: ...s TPS compact ist der Netzstecker anzuschlie en und der externe Schalter auf die Schaltstellung ON zu stellen Der eingebaute Controller erfa t automatisch das Anliegen der Spannung und startet die Pum...

Page 39: ...pact siehe im Anhang Technical Information Stoppen von Modell TPS compact Zur Stillsetzung des TPS compact ist der externe Schalter auf die Schaltstellung OFF zu schalten Der eingebaute Controller sor...

Page 40: ...Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service HINWEIS Bevor Fa Agilent ein Syst...

Page 41: ...l nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer s...

Page 42: ...2 Gebrauchsanleitung Entsorgung 42 312 TPS compact User Manual 87 901 010 01 F...

Page 43: ...culaires 44 Indications g n rales 45 Symboles utilis s 46 Pr paration pour l installation 49 Installation 51 Utilisation 53 Mise en marche et utilisation du TPS compact 54 Arr t du TPS compact 55 Arr...

Page 44: ...une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupt...

Page 45: ...ations de vide pouss et ultrapouss et dot e d un contr leur et d une pompe primaire Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liqu...

Page 46: ...ions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements import...

Page 47: ...s inflammables ou radioactifs respectez les proc dures sp cifiques chaque gaz N utilisez pas la pompe en pr sence de gaz explosifs La pompe est con ue pour pomper de l azote de l argon et des gaz plus...

Page 48: ...vement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre...

Page 49: ...nt l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TPS compact et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la...

Page 50: ...ompact User Manual 87 901 010 01 F NOTE Le TPS compact ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garde...

Page 51: ...la pression atmosph rique temp rature de 5 C 35 C humidit relative 0 95 non condensante En pr sence de champs magn tiques le syst me de pompage doit tre prot g e l aide d crans appropri s Le TPS comp...

Page 52: ...une bonne circulation de l air Tab 1 BRIDE TYPE DE COLLIER N COUPLE DE SERRAGE ISO 63 Collier double filet M10 4 22 Nm ISO 100 K Collier double filet M10 4 22 Nm ISO 160 K Collier double filet M10 4...

Page 53: ...ConFlat et 80 C en cas de bridage ISO AVERTISSEMENT Ne jamais faire fonctionner le syst me de pompage si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de...

Page 54: ...l interrupteur ext rieur sur ON Le contr leur incorpor reconna t automatiquement la pr sence de l alimentation et met la pompe en marche Lors de la premi re mise en marche il est conseill d adopter l...

Page 55: ...ppendice Technical Information Arr t du TPS compact Pour arr ter le TPS compact il suffit de placer l interrupteur ext rieur sur OFF Le contr leur incorpor arr te imm diatement le syst me de pompage A...

Page 56: ...complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent NOTE Avant de renvoyer une p...

Page 57: ...produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les...

Page 58: ...3 Mode d emploi Mise au rebut 58 312 TPS compact User Manual 87 901 010 01 F...

Page 59: ...urbomoleculares 60 Informaci n general 61 S mbolos usados 63 Almacenamiento 64 Preparaci n para la instalaci n 65 Instalaci n 67 Uso 69 Encendido y Uso del TPS compact 70 Parada del TPS compact 71 Par...

Page 60: ...na elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el...

Page 61: ...ultra alto vac o integrada por el respectivo controlador y la bomba primaria El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part cu...

Page 62: ...advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podr a provocar graves lesiones personales ATENCI N Los mensajes de ate...

Page 63: ...lientes ON Arranque Alimentaci n Peligro riesgo de descarga el ctrica OFF Parada Alimentaci n ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radiactivos seguir los pro...

Page 64: ...ura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por p...

Page 65: ...local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TPS compact y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material e...

Page 66: ...mpact User Manual 87 901 010 01 F NOTA El TPS compact no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta el momento de la in...

Page 67: ...atmosf rica temperatura de 5 C a 35 C humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos el sistema de bombeo ha de protegerse mediante pantallas adecuadas El TPS compact p...

Page 68: ...ara permitir una adecuada circulaci n de aire Tab 1 BRIDA TIPO DE MORDAZA N PAR DE APRIETE ISO 63 Mordaza doble con rosca M10 4 22 Nm ISO 100 K Mordaza doble con rosca M10 4 22 Nm ISO 160 K Mordaza do...

Page 69: ...n con brida ConFlat y a 80 C con una fijaci n con brida ISO ADVERTENCIA No hacer funcionar nunca el sistema de bombeo si la brida de entrada no est conectada a la c mara de vac o o no est cerrada con...

Page 70: ...isponer el interruptor externo en posici n ON El controlador incorporado reconoce autom ticamente la presencia de la alimentaci n y pone en marcha la bomba Al efectuar el primer encendido conviene ado...

Page 71: ...p ndice Technical Information Parada del TPS compact Para detener el TPS compact basta disponer el interruptor externo en posici n OFF El controlador incorporado detiene inmediatamente el sistema de b...

Page 72: ...la respectiva y esperar hasta que el rotor se pare completamente y que la temperatura superficial de la bomba se reduzca a menos de 50 C En caso de aver a se podr utilizar el servicio de reparaci n Ag...

Page 73: ...licado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se in...

Page 74: ...4 Manual de istrucciones Eliminaci n 74 312 TPS compact User Manual 87 901 010 01 F...

Page 75: ...Turbomoleculares 76 Informa es gerais 77 S mbolos utilizados 79 Armazenagem 80 Prepara o para a instala o 81 Instala o 83 Utiliza o 85 Acendimento e Utiliza o do TPS compact 86 Paragem do TPS compact...

Page 76: ...Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o...

Page 77: ...om os respectivos controller e bomba prim ria O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o apropriado para bombear l quidos ou part culas s lidas O efeito da bomba obt...

Page 78: ...en ao chamam a aten o do operador para um procedimento ou uma pr tica espec fica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de cuidado s o visualizada...

Page 79: ...adas ON Liga o Alimenta o Perigo risco de choque el trico OFF Paragem Alimenta o ATEN AO Quando a bomba for utilizada para a bombagem de gases t xicos inflam veis ou radioactivos seguir os procediment...

Page 80: ...tais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade...

Page 81: ...om o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o TPS compact e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambien...

Page 82: ...312 TPS compact User Manual 87 901 010 01 F NOTA TPS compact n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala...

Page 83: ...m da press o atmosf rica temperatura de 5 C a 35 C humidade relativa 0 95 n o condensante Na presen a de campos electromagn ticos o sistema de bombeamento deve ser protegida atrav s de blindagens ade...

Page 84: ...de ar adequada Tab 1 FLANGE TIPO DE GRAMPO N TORQUE DE APERTO ISO 63 Grampo duplo com rosca M10 4 22 Nm ISO 100 K Grampo duplo com rosca M10 4 22 Nm ISO 160 K Grampo duplo com rosca M10 4 22 Nm A tur...

Page 85: ...or a 120 C com flangeamento ConFlat e a 80 C com flangeamento ISO ATEN AO Nunca activar o sistema de bombeamento se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o...

Page 86: ...a posi o de ON O controller incorporado detecta automaticamente a corrente de alimenta o e acciona a bomba Quando ligar o aparelho pela primeira vez aconselh vel utilizar a modalidade Soft Start activ...

Page 87: ...l Information Paragem do TPS compact Para parar o TPS compact suficiente colocar o interruptor exterior na posi o OFF O controller incorporado p ra imediatamente o sistema de bombeamento Paragem de Em...

Page 88: ...lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent NOTA A...

Page 89: ...produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utiliza...

Page 90: ...5 Manual de Istru es Elimina o 90 312 TPS compact User Manual 87 901 010 01 F...

Page 91: ...bomoleculaire pompen 92 Algemene informatie 93 Gebruikte symbolen 95 Opslag 96 Uitpakken 97 Installatie 99 Gebruik 101 Inschakeling en gebruik van de TPS compact 102 Afzetten van de TPS compact 103 No...

Page 92: ...ebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen d...

Page 93: ...oge en ultrahoge vacu mtoepassingen en een primaire pomp bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deel...

Page 94: ...staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat...

Page 95: ...r risico op elektrische schok OFF Stoppen Voeding WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speci...

Page 96: ...eratuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste...

Page 97: ...verkoopkantoor Zorg er bij het uitpakken voor dat de TPS compact niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal i...

Page 98: ...10 01 F OPMERKING De TPS compact kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systee...

Page 99: ...nwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet het pompsysteem op passende...

Page 100: ...ond het systeem met het oog op een correcte luchtcirculatie Tab 1 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 63 Dubbele klem met M10 schroefdraad 4 22 Nm ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm...

Page 101: ...eer dan 120 C bedragen met flens ConFlat en 80 C met flens ISO WAARSCHUWING Laat het pompsysteem nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesl...

Page 102: ...erkent automatisch de aanwezigheid van stroom en start de pomp Bij de eerste inschakeling wordt aangeraden om de Soft Start modaliteit te gebruiken door deze op de controller te activeren Voor de volg...

Page 103: ...uit te schakelen is het voldoende om de externe schakelaar in de stand OFF te zetten De ingebouwde controller stopt onmiddellijk het pompsysteem Noodstop Om de TPS compact onder noodomstandigheden uit...

Page 104: ...totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent OPMERKING A...

Page 105: ...t waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met...

Page 106: ...6 Bedrijfshandleiding Afvalverwerking 106 312 TPS compact User Manual 87 901 010 01 F...

Page 107: ...opumper 108 Generel Information 109 Anvendte symboler111 Opbevaring 112 Forberedelse f r installation 113 Installation 114 Anvendelse 116 Start og anvendelse af TPS compact 117 Stop af TPS compact 118...

Page 108: ...en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stato...

Page 109: ...nger og aktuel styreenhed og hovedpumpe Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af fas...

Page 110: ...selsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne I modsat fald er der risiko for sv re personskader FORSIGTIG Denne...

Page 111: ...ON Start Forsyning Fare risiko for elektrisk st d OFF Stop Forsyning ADVARSEL N r pumpen anvendes til at pumpe giftige br ndbare eller radioaktive gasser skal de passende standardprocedurer for hver s...

Page 112: ...ring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og...

Page 113: ...es eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse FORSIGTIG Komponenter der skal uds ttes for vakuum m...

Page 114: ...ra 5 C til 35 C relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpeanl gget er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes TPS compact kan installeres i en hvilken som helst...

Page 115: ...nde luftcirkulation Tab 1 FLANGE KLEMMETYPE ANT DREJNINGS MOMENT ISO 63 Dobbelt klemme med M10 gevind 4 22 Nm ISO 100 K Dobbelt klemme med M10 gevind 4 22 Nm ISO 160 K Dobbelt klemme med M10 gevind 4...

Page 116: ...bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen ADVARSEL R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne De...

Page 117: ...gang Dette sker ved at aktivere funktionsm den p kontrolenheden Det anbefales at frakoble funktionsm den Soft Start i forbindelse med de efterf lgende starter Hvad ang r fremgangsm den til tilkobling...

Page 118: ...compact Afbrydelse af TPS compact sker ved blot at indstille den udvendige afbryder i position OFF Den indbyggede styreenhed afbryder straks pumpeanl gget N dstop N dstop af TPS compact sker ved at fj...

Page 119: ...luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontak...

Page 120: ...idder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leveran...

Page 121: ...mpar122 Allm n Information 123 Symboler som anv nds 125 F rvaring 126 F rberedelser f r installationen 127 Installation 128 Anv nding 130 Start och anv ndning av TPS compact 131 Att st nga av TPS comp...

Page 122: ...g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle...

Page 123: ...t h ga vakuumtill mpningar en styrenhet och en huvudpump Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta p...

Page 124: ...ddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna I annat fall finns risk f r sv ra personskador OBSERVER Detta varnings...

Page 125: ...nnskador vid kontakt med varma delar ON Start f rs rjning Fara risk f r elektrisk st t OFF Stopp f rs rjning VARNING N r pumpen anv nds f r en pumpning av giftiga ant ndabara eller radioaktiva gaser...

Page 126: ...ingsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rst...

Page 127: ...ller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd OBSERVER Komponenter som ska uts ttas...

Page 128: ...ktighet 0 95 utan kondens I n rvaro av magnetf lt ska pumpsystemet skyddas med en s rskild sk rm TPS compact kan installeras i valfri position F st pumpen i ett stabilt l ge genom att ansluta pumpens...

Page 129: ...GNINGSMOMENT ISO 63 Dubbel klammer g nga M10 4 22 Nm ISO 100 K Dubbel klammer g nga M10 4 22 Nm ISO 160 K Dubbel klammer g nga M10 4 22 Nm Turbopumparna med intagsfl ns ConFlat ska f stas vid vakuumka...

Page 130: ...turen vid inloppet aldrig verstiga 120 C med fl nsningen ConFlat och 80 Cmed fl nsningen ISO VARNING S tt aldrig ig ng pumpsystemet om intagsfl nsen varken r kopplad till vakuumkammaren eller r blocke...

Page 131: ...er automatiskt av str mtillf rseln och s tter ig ng pumpen Vid den f rsta starten rekommenderas det att aktivera funktionss ttet Soft Start p kontrollenheten F r efterf ljande starter rekommenderas de...

Page 132: ...compact St ng av TPS compact genom att placera den externa brytaren i l ge OFF Den inbyggda styrenheten avbryter omedelbart pumpsystemets funktion N dstopp St ng av TPS compact vid en n dsituation gen...

Page 133: ...as och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad OBSE...

Page 134: ...bolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att sluta...

Page 135: ...olekyl re pumper 136 Generell informasjon 137 Symboler i bruk 139 Lagring 140 Klargj re til installasjon 141 Installasjon 142 Bruk 144 Starte og bruke TPS compact 145 Stoppe TPS compact 146 N dstopp 1...

Page 136: ...Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av e...

Page 137: ...ct systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg en styreenhet og en hovedpumpe Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke bereg...

Page 138: ...EL Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader FORSIKTIG Denne advarselen vises foran...

Page 139: ...mforsyning Fare for elektrisk st t AV stopp str mforsyning ADVARSEL N r pumpen brukes for pumpe giftige brennbare eller radioaktive gasser f lg de passende fremgangsm tene som er typisk riktige for h...

Page 140: ...ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp...

Page 141: ...d eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse FORSIKTIG For unng...

Page 142: ...ver atmosf risk trykk temperatur fra 5 C til 35 C relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpesystemet beskyttes av dertil egnede skjermer TPS compact kan monteres i en valgfri stilling...

Page 143: ...temet slik at luften kan sirkulere Tab 1 FLENS TYPE KLEMME ANT STRAMME MOMENT ISO 63 Dobbel klemme gjenge M10 4 22 Nm ISO 100 K Dobbel klemme gjenge M10 4 22 Nm ISO 160 K Dobbel klemme gjenge M10 4 22...

Page 144: ...e 120 C med ConFlat inngangsflens eller 80 C med ISO inngangsflens ADVARSEL Ikke start pumpesystemet hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen ADVARS...

Page 145: ...r str mforsyningen automatisk og s rger for starte pumpen Ved f rste start svarer det seg aktivere Soft Start modusen p styreenheten For f lgende starter anbefales det deaktivere Soft Start modusen Fr...

Page 146: ...mpact For stoppe TPS compact er det nok dreie den utvendige bryteren til OFF Den innebygde styreenheten stanser pumpesystemet umiddelbart N dstopp For stoppe TPS compact i en n dsituasjon er det n dve...

Page 147: ...pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents MERK F r...

Page 148: ...et europeiske fellesselskap viser at produktet som det st r p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen...

Page 149: ...Turvaohjeet 150 Yleisi tietoja 151 K ytetyt symbolit 153 Varastointi 154 Valmistelut asennusta varten 155 Asennus 157 K ytt 159 TPS compact n k ynnistys ja k ytt 160 TPS compact n pys ytt minen 161 H...

Page 150: ...m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roott...

Page 151: ...ylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pu...

Page 152: ...AROITUS Varoitus merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin HUOMIO Huomio merkit varoittavat toim...

Page 153: ...ON K ynnistys Virransy tt Vaara s hk iskun vaara OFF Pys ytys Virransy tt VAROITUS Kun pumppua k ytet n myrkyllisten palavien tai radioaktiivisten kaasujen pumppaamiseen noudata jokaiselle kaasutyypi...

Page 154: ...avia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun j...

Page 155: ...paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TPS compact n putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaa...

Page 156: ...312 TPS compact User Manual 87 901 010 01 F HUOM TPS compact ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Sit...

Page 157: ...atmosf risen paineen l mp tila 5 C 35 C suhteellinen kosteus 0 95 ei tiivist v Mik li l sn on magneettikentti tulee pumppausj rjestelm suojata t h n tarkoitukseen olevilla suojilla TPS compact voidaa...

Page 158: ...n takaamiseksi Tab 1 LAIPPA KIINNIKE M R KIRISTYS MOMENTTI ISO 63 Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 100 K Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 160 K Kaksoiskiinnike kierteitys M10 4 22...

Page 159: ...ConFlat laipoituksella ja 80 C tta ISO laipoituksella VAROITUS lk k ytt k pumppausj rjestelm ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla VAROITUS lk koskeko...

Page 160: ...asettamalla ulkokatkaisin ON asentoon Sis nrakennettu valvoja tunnistaa automaattisesti s hk virran ja k ynnist pumpun Ensimm isess k ynnistyksess on hyv k ytt Soft Start tapaa K ynnist se s timest Ky...

Page 161: ...compact n pys ytt minen Pys yt TPS compact asettamalla ulkokatkaisin OFF asentoon Sis nrakennettu valvoja pys ytt pumppausj rjestelm n v litt m sti H t pys ytys H t tilassa pys yt TPS compact irrotta...

Page 162: ...i ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua HUOM Ennen j rjeste...

Page 163: ...in j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan k...

Page 164: ...10 Ohjek sikirja H vitt minen 164 312 TPS compact User Manual 87 901 010 01 F...

Page 165: ...szivatty khoz 166 ltal nos inform ci 167 Felhaszn lt jelk pek 169 T rol s 170 El k sz t s telep t sre 171 Telep t s 173 Haszn lat 175 A TPS compact bekapcsol sa s haszn lata 176 A TPS compact kikapcs...

Page 166: ...pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a f...

Page 167: ...ntegr lt rendszer turb molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas foly...

Page 168: ...LY A vesz lyt zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet FIGYELEM A Figyelem zenetek olyan elj r sok el tt j...

Page 169: ...svesz llyel j r ON Bekapcsol s T p Vesz lyjel ram t s vesz lye OFF Kikapcsol s T p VESZ LY Ha a szivatty val m rgez gy l kony vagy r di akt v g zokat szivatty zunk az egyes g zokra vonatkoz speci lis...

Page 170: ...ram tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relat v p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r...

Page 171: ...helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m...

Page 172: ...72 312 TPS compact User Manual 87 901 010 01 F MEGJEGYZ S A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TPS compact ot M gis aj nlatos z rva tartani a rendszerbe val telep t sig gy megaka...

Page 173: ...h m rs klet 5 C t l 35 C ig relat v p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty z rendszert v deni kell ferrom gneses pajzs seg ts g vel A TPS compact ot b rmely helyzetben...

Page 174: ...s szabad ter letet hogy a leveg megfelel en ramolhasson Tab 1 KARIMA R GZ T ESZK Z N R GZ T NYOMAT K ISO 63 M10 kapcsok 4 22 Nm ISO 100 K M10 kapcsok 4 22 Nm ISO 160 K M10 kapcsok 4 22 Nm A ConFlat be...

Page 175: ...e haszn lja a szivatty z rendszert amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva VESZ LY Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folya...

Page 176: ...skor aj nlatos a Soft Start m dot haszn lni ennek a vez rl n val enged lyez s vel A k vetkez ind t sokhoz aj nlatos letiltani a Soft Start m dot A Soft Start m d aktiv l si elj r s hoz l sd a Jelle r...

Page 177: ...zn lat 11 TPS compact User Manual 87 901 010 01 F 177 312 V szle ll t s A TPS compact v szhelyzetben val azonnali le ll t s hoz el kell t vol tani a t pk belt a h l zati dugaszb l vagy a k ls kapcsol...

Page 178: ...tty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n forduljon a Agilent szervizk zponthoz MEGJEGYZ S Miel...

Page 179: ...en megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megse...

Page 180: ...11 Felhaszn l i K zik nyv Megsemmis t s 180 312 TPS compact User Manual 87 901 010 01 F...

Page 181: ...ularnych 182 Og lne informacje183 Zastosdowane symbole 185 Magazynowanie 186 Przygotowanie do instalacji187 Instalacja 188 U ytkowanie 190 W czenie i obs uga systemu TPS compact 191 Zatrzymanie TPS co...

Page 182: ...Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem...

Page 183: ...ch pr ni odpowiedniego sterownika i z g wnej pompy System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko...

Page 184: ...Komunikaty zagrozenie przyci gaj uwag operatora co do danej procedury lub danego post powania kt rego nieprawid owe wykonanie mog oby spowodowa powa ne uszkodzenia cia a UWAGA Komunikaty zwi kszonej...

Page 185: ...anie Niebezpiecze stwo grozi pora eniem elektrycznym OFF Zatrzymanie Zasilanie ZAGROZENIE Kiedy pompa jest stosowana do pompowania gaz w toksycznych palnych lub radioaktywnych nale y post powa zgodnie...

Page 186: ...ne nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w...

Page 187: ...compact ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWA...

Page 188: ...sferycznym temperatura od 5 C do 35 C wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych zesp pompyj cy musi by odpowiednio zabezpieczony przez odpowiednie ekranowanie TPS compact mo e...

Page 189: ...KO NIERZ TYP ZACISKU Nr MOMENT DOKR CENIA ISO 63 Podw jny zacisk z gwintem M10 4 22 Nm ISO 100 K Podw jny zacisk z gwintem M10 4 22 Nm ISO 160 K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z ko n...

Page 190: ...C w przypadku ko nierza ConFlat i 80 C w przypadku ko nierza ISO ZAGROZENIE Absolutnie nie wolno uruchamia zespo u pompuj cego w przypadku gdy ko nierz wej ciowy nie jest pod czony do komory lub nie j...

Page 191: ...tarczy napi cie zasilania i ustawi wy cznik zewn trzny w pozycji On Wbudowany sterownik tzw kontroler automatycznie rozpozna obecno zasilania i uruchomi pomp Przy pierwszym uruchomieniu nale y zastoso...

Page 192: ...z dodatkiem Technical Information Zatrzymanie TPS compact Aby zatrzyma TPS compact wystarczy ustawi wy cznik zewn trzny na pozycji OFF Wbudowany sterownik zatrzyma natychmiast zesp pompuj cy Zatrzyman...

Page 193: ...o ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku uszkodzenia mo liwe jest skorzystanie z serwisu naprawczego firmy Agilent PRZYPIS P...

Page 194: ...nacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki...

Page 195: ...urbomolekul rn v v vy 196 V eobecn informace 197 Pou it symboly 199 Uskladn n 200 P prava k instalaci 201 Instalace 202 Pou it 204 Zapnut a pou v n v v vy TPS compact 205 Vypnut v v vy TPS compact 206...

Page 196: ...opisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo st...

Page 197: ...van syst m pro aplikace vy aduj c vysok a velmi vysok vakuum vybaven hlavn turbomolekul rn v v vou a p slu n m regul torem Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n teku...

Page 198: ...uj c standardn protokol NEBEZPE Nebezpe hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz POZOR Pozor hl en jsou uvedena p ed postup...

Page 199: ...p lenin p i dotyku st s vysokou teplotou ZAP Zapnut Nap jen Nebezpe Riziko z sahu elektrick m proudem VYP Vypnut Nap jen NEBEZPE P i pou it v v vy pro erp n toxick ch ho lav ch nebo radioaktivn ch ply...

Page 200: ...ste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln...

Page 201: ...nad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s odply...

Page 202: ...rick m tlakem teplota od 5 C do 35 C relativn vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se erpac syst m mus chr nit feromagnetick m st n n m V v vu TPS compact lze instalovat v libovoln po...

Page 203: ...enosti 20 cm aby byla umo n na vhodn cirkulace vzduchu Tab 1 P RUBA P CHYTN ZA ZEN PO ET UTAHOVAC MOMENT ISO 63 Spony M10 4 22 Nm ISO 100 K Spony M10 4 22 Nm ISO 160 K Spony M10 4 22 Nm Turbomolekul r...

Page 204: ...ory teplota vstupn p ruby nesm p ekro it 120 C v p pad p ruby ConFlat a 80 C v p pad p ruby ISO NEBEZPE erpac syst m nikdy nepou vejte nebude li vstupn p ruba p ipojen k vakuov komo e NEBEZPE B hem za...

Page 205: ...yp na Vestav n regul tor automaticky rozezn p tomnost s ov ho nap t a spust v v vu P i prvn m uveden do provozu se doporu uje nastavit na regul toru m kk start U dal ch spu t n se doporu uje m kk star...

Page 206: ...TPS compact V v vu TPS compact sta vypnout extern m vyp na em kter p epnete do vypnut polohy Vestav n regul tor erpac syst m okam it zastav Nouzov zastaven Pro okam it zastaven v v vy TPS compact v no...

Page 207: ...tilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte va e m stn servisn st edisko spole nosti Agilent POZN MKA Ne vr t te za z...

Page 208: ...ov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek...

Page 209: ...lekul rne v vevy 210 V eobecn inform cie 211 Pou it symboly 213 Uchov vanie 214 Pr prava na in tal ciu 215 In tal cia 217 Pou itie 219 Zapnutie a pou itie zariadenia TPS compact 220 Vypnutie TPS compa...

Page 210: ...edovne popisovan obsahuj ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora al...

Page 211: ...grovan syst m s turbov vevou pre ur en pre aplik cie pou vaj ce vysok alebo ve mi vysok v kuum spojen s pr slu n m kontroln m modulom a v vevou prim rneho v kua Syst m dok e vy erpa ubovo n typ plynu...

Page 212: ...bsahuje tieto tandardn ozna enia NEBEZPE E Nebezpe e maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedo...

Page 213: ...enia pri kontakte s as ami s vysokou teplotou ZAP Zapnutie Nap janie Nebezpe enstvo Riziko z sahu elektrick m pr dom VYP Vypnutie Nap janie NEBEZPE E Pri pou it v vevy pre erpanie toxick ch hor av ch...

Page 214: ...u pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne skl...

Page 215: ...sa na zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m...

Page 216: ...tal ciu 216 312 TPS compact User Manual 87 901 010 01 F POZN MKA Be n vystavenie okolit m podmienkam nem e TPS compact po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv...

Page 217: ...teplota od 5 C do 35 C relat vna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by erpac syst m chr nen feromagnetick m t tom Zariadenie TPS compact m e by nain talovan v ubovo nej po...

Page 218: ...ti 20 cm aby bola umo nen vhodn cirkul cia vzduchu Tab 1 PR RUBA UPEV OVAC MECHANIZMUS PO ET UPEV OVAC KR TIACI MOMENT ISO 63 Svorky M10 4 22 Nm ISO 100 K Svorky M10 4 22 Nm ISO 160 K Svorky M10 4 22...

Page 219: ...ISO NEBEZPE E Nikdy nepou vajte erpac syst m ak vstupn pr ruba nie je pripojen k v kuovej komore alebo nie je zablendovan NEBEZPE E V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho...

Page 220: ...rolnom module Pre al ie zapnutia sa odpor a re im Soft Start zablokova Viac o aktivovan re imu Soft Start n jdete v odstavci Popis sign lu v kapitole Technical Information Modr LED STATUS umiestnen na...

Page 221: ...S compact User Manual 87 901 010 01 F 221 312 N dzov zastavenie Ak chcete zariadenie TPS compact okam ite vypn v stave n dze mus te alebo vytiahnu k bel nap jania zo z str ky zdroja nap jania alebo pr...

Page 222: ...v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilen...

Page 223: ...y Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skont...

Page 224: ...14 N vod na Obsluhu Likvid cia 224 312 TPS compact User Manual 87 901 010 01 F...

Page 225: ...omolekularne rpalke 226 Splo ne informacije 227 Uporabljeni simboli228 Shranjevanje 230 Priprava za monta o 231 Monta a 232 Uporaba 234 Vklop in uporaba TPS compact a 235 Izklop TPS compact a 236 Zaus...

Page 226: ...ednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja sta...

Page 227: ...soko in ultravisoko vakuumsko uporabo ki je povezana s pripadajo im upravljalcem in primarno rpalko Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delce...

Page 228: ...do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme OPOMBA Opombe vsebujejo pomebne informacije iz besedila Uporabljeni simboli Na...

Page 229: ...i nih vnetljivih ali radioaktivnih plinov vedno upo tevajte ustrezne postopke zna ilne za vsak posamezni plin rpalke nikoli ne uporabljajte ob prisotnosti eksplozivnih plinov rpalka je zasnovana za rp...

Page 230: ...k ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivl...

Page 231: ...te Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj b...

Page 232: ...itiskom atmosfere temperatura od 5 C od 35 C Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje za ite rpalni sistem s feromagnetnim itom TPS compact lahko namestite v poljuben polo a...

Page 233: ...ora tako da omogo ite ustrezno kro enje zraka Tab 1 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR ISO 63 M10 dr ala 4 22 Nm ISO 100 K M10 dr ala 4 22 Nm ISO 160 K M10 dr ala 4 22 Nm Turbo rpaklo z dovodn...

Page 234: ...ra na vhodni prirobnici ne sme presegati 120 C pri prirobnici ConFlate oziroma 80 C pri prirobnici ISO SVARILO rpalnega sistema ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e...

Page 235: ...stikalo v polo aj ON Vgrajen upravljalec samodejno prepozna prisotnost napetosti in za ene rpalko Pri prvem vklopu je priporo ljivo uporabiti na in Soft Start ki ga lahko omogo ite na upravljalcu Za...

Page 236: ...op TPS compact a Za izklop TPS compact a je dovolj da premaknete zunanje stikalo v polo aj OFF Vgrajen kontroler takoj zaustavi rpalni sistem Zaustavitev v sili Za takoj enj izklop TPS compact a v sil...

Page 237: ...e rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru napake kontaktirajte va lokalni Agilent servisni center OP...

Page 238: ...ti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodaja...

Page 239: ...Turbomolecular Pumps 240 General Information 241 Symbols used 243 Storage 243 Preparation for Installation 245 Installation 246 Use 248 Switching on and Use of TPS Compact 249 TPS Compact Switching o...

Page 240: ...ontain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact o...

Page 241: ...ecular pump for high and ultra high vacuum applications associated with its relevant controller and its primary pump The system can pump any type of gas or gas compound It is not suitable for pumping...

Page 242: ...e warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are...

Page 243: ...Danger of burns if hot parts are touched On Power Caution risk of electric shock Off Power WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required p...

Page 244: ...ications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the fi...

Page 245: ...of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to p...

Page 246: ...temperature from 5 C to 35 C relative humidity 0 95 non condensing In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield The TPS compact can be installe...

Page 247: ...imum of 20cm to allow proper air circulation Tab 1 FLANGE FIXING DEVICE N FIXING TORQUE ISO 63 M10 clamps 4 22 Nm ISO 100 K M10 clamps 4 22 Nm ISO 160 K M10 clamps 4 22 Nm The turbopump with ConFlat i...

Page 248: ...must not exceed 120 C with ConFlat flanging and 80 C with ISO flanging WARNING Never use the pumping system when the turboinlet flange is not connected to the vacuum chamber or is not blanked WARNING...

Page 249: ...troller automatically recognizes the mains presence and start up the pump At the first start up it is recommended to use the Soft Start mode by enabling it on the controller For the following start up...

Page 250: ...PS compact it is sufficient to move the external switch to OFF position The integrated controller immediately stops the pumping system Emergency Stop To immediately stop the TPS compact in an emergenc...

Page 251: ...e appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center NOTE...

Page 252: ...an Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end u...

Page 253: ...1 TPS Compact Outline 263 Inlet Screen Installation 267 High Vacuum Flange Connection 269 High Vacuum Flange Connection Configurations 271 Interconnections 272 Input Power Connector 272 P3 Vent 272 Ga...

Page 254: ...Descriptions 288 Window Protocol 289 Description 289 Communication Format 289 Communication Protocol 289 Examples 292 Window Meanings 295 Service Options 299 Cleaning 299 Exterior 299 Interior 299 Tip...

Page 255: ...60 3 6 m3 h Scroll 115V 60Hz X3580 64007 304 FS CFF8 3 6 m3 h Scroll 115V 60Hz X3580 64010 84 FS KF40 3 0m3 h Scroll 230V 50 60Hz X3580 64011 84 FS CFF 2 75 3 0m3 h Scroll 230V 50 60Hz X3580 64012 84...

Page 256: ...17 Technical Information Description of the TPS Compact 256 312 TPS compact User Manual 87 901 010 01 F Figure 2 84 FS or 304 FS...

Page 257: ...pump The static blades of the stator are fabricated in stainless steel These are supported and accurately positioned by spacer rings The TwisTorr stators are in the form of selfpositioning machined di...

Page 258: ...analog and input output section microprocessor and digital section The controller recognizes the mains presence and converts the single phase AC mains supply into a 3 phase medium frequency output wh...

Page 259: ...l the TPS compact J6 SERIAL Serial input output connector to control the TPS compact via an RS 232 or RS 485 connection STATUS Blue LED to show the system operating condition P3 VENT Connector to cont...

Page 260: ...scription The TPS compact internal scroll creates vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other creating moving zones of captured gas Gas enters...

Page 261: ...ional speed 60000 RPM 81000 RPM Start up time 300 s 144 s Operating position Any Operating ambient temperature 5 C to 35 C Bakeout temperature 120 C at inlet flange max CF flange 80 C at inlet flange...

Page 262: ...cation kit RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and software optional Storage temperature 20 C to 70 C Weight kg lbs 20 1 44 3 16 7 36 8 According to stan...

Page 263: ...Technical Information TPS Compact Outline 17 TPS compact User Manual 87 901 010 01 F 263 312 TPS Compact Outline The following figure shows the TPS compact outline Dimensions are in mm Figure 5...

Page 264: ...7 Technical Information TPS Compact Outline 264 312 TPS compact User Manual 87 901 010 01 F TPS compact equipped with 304 FS Pumping speed for Nitrogen Figure 6 Graph of pumping speed vs inlet pressur...

Page 265: ...echnical Information TPS Compact Outline 17 TPS compact User Manual 87 901 010 01 F 265 312 TPS compact equipped with 84 FS Pumping speed for Nitrogen Figure 7 Graph of pumping speed vs inlet pressure...

Page 266: ...17 Technical Information TPS Compact Outline 266 312 TPS compact User Manual 87 901 010 01 F TPS compact 304 FS 15l pumpdown Figure 8 Graph of pressure vs time with a pumpdown volume of 15 litre...

Page 267: ...rmation TPS Compact Outline 17 TPS compact User Manual 87 901 010 01 F 267 312 TPS compact 84 FS 1l pumpdown Figure 9 Graph of pressure vs time with a pumpdown volume of 1 litre Inlet Screen Installat...

Page 268: ...The inlet screens mod 9699300 9699309 9699302 and 9699303 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping spee...

Page 269: ...269 312 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 13 High Vacuum Flange Connection To connect the Turbo pump to the ISO inlet flange rem...

Page 270: ...Agilent hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units...

Page 271: ...Technical Information TPS Compact Outline 17 TPS compact User Manual 87 901 010 01 F 271 312 High Vacuum Flange Connection Configurations Figure 16 Figure 17...

Page 272: ...Interconnections Input Power Connector The following figure shows the input power connector Figure 18 P3 Vent Figure 19 This is a dedicated 24 Vdc connector to control the optional vent valve availab...

Page 273: ...uge FRG 700 The FRG 700 Full Range Gauge is a combined technologies gauge Inverted Magnetron plus Pirani Gauge FRG 700 measure from 5x10 9 mbar to atmosphere 3 8x10 9 Torr to atmosphere and its temper...

Page 274: ...d disconnected from the TPS compact during normal operation Figure 21 Gauge Connector NOTE The FRG700 gauge is intended for high vacuum use so with pressure above 50 mTorr the signal is misinterpreted...

Page 275: ...nical Information Interconnections 17 TPS compact User Manual 87 901 010 01 F 275 312 Pressure Display Module Figure 22 Pressure display module Figure 23 FRG 700 gauge dimension x10 PRESSURE Pa mBar T...

Page 276: ...etailed in the table the following para graphs describe the signal characteristics and use Tab 5 Pin N Signal name Input Output 1 START STOP IN 2 START STOP IN 3 INTERLOCK IN 4 INTERLOCK IN 5 SPEED SE...

Page 277: ...D pin this is the default configuration of the cover connector INTERLOCK input signal to control the pump rotation With the supplied cover connector the IN TERLOCK signal is connected to the 24 Vdc pi...

Page 278: ...tional to a reference quantity frequency or power or Temperature or Pressure set by the user The de fault setting is the frequency see the following example diagram Figure 26 1050 1100 1150 1200 1250...

Page 279: ...er Manual 87 901 010 01 F 279 312 Figure 27 Figure 28 Output Power setting 0 10 20 30 40 50 60 70 80 90 100 0 1 2 3 4 5 6 7 8 9 10 Voltage V Power W Output Temperature setting 0 10 20 30 40 50 60 70 8...

Page 280: ...can be high level active that is the output is normally OFF and becomes ON when activated or low level active that is the output is normally ON and becomes OFF when activated Moreover if the referenc...

Page 281: ...following default settings reference quantity frequency thereshold 867 Hz hysteresis 2 activation type high level delay time 0 second NOTE The Navigator Software optional allows the operator to set al...

Page 282: ...312 TPS compact User Manual 87 901 010 01 F 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 30 mA a GROUND signal and the open...

Page 283: ...Technical Information Interconnections 17 TPS compact User Manual 87 901 010 01 F 283 312 Figure 32 Case 2 with relay utilisation...

Page 284: ...17 Technical Information Interconnections 284 312 TPS compact User Manual 87 901 010 01 F Figure 33 Case 2 with transistor utilisation...

Page 285: ...nection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on...

Page 286: ...Software is available optional RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector J6 The communication protocol is the same see the struc...

Page 287: ...scription 17 TPS compact User Manual 87 901 010 01 F 287 312 Figure 36 RS 232 Connection Figure 37 RS 485 Connection 5 2 3 5 2 3 Connector examples PC CNT TPS COMPACT PC HOST 0 TPS compact 1 A A A 6 6...

Page 288: ...t the host computer s instruction manual for its serial port connections NOTE Agilent cannot guarantee compliance with FCC regulations for radiated emissions unless all external wiring is shielded wit...

Page 289: ...nication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the contr...

Page 290: ...iable according to the data type as per the following table Tab 7 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON Numeric N 6 0 9 right justified with 0 Alphanumeric A 10 from blank to _...

Page 291: ...byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has been failed Unknown Window 1 byte 0x32 The specified window in the command is not a valid win...

Page 292: ...ation Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80...

Page 293: ...Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller...

Page 294: ...DR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command REAL SERIAL TYPE Source PC Des...

Page 295: ...ult 1 100 R W L Soft Start write only in Stop condition YES 1 NO 0 101 R W N R1 Set Point type 0 Frequency 1 Power 2 Time 3 Normal 4 Pressure default 0 102 R W N R1 Set Point valve expressed in Hz W o...

Page 296: ...perature 3 Pressure 117 R W N Low Speed frequency Hz 1100 to Maximum rotational frequency win 120 default 1100 120 R W N Rotational frequency setting Hz 1100 to 1350 default 1350 122 R W L Set vent va...

Page 297: ...ivates the pump speed reading after Stop command 0 disable 1 enable 200 R N Pump current in mA dc 201 R N Pump voltage in Vdc 216 R N Controller Air Temperature C 224 R A Pressure reading Format X X E...

Page 298: ...04 R W L Serial type select 0 RS 232 1 RS 485 default 0 NOTE 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts t...

Page 299: ...ears after 5000 h of operation If your TPS compact exhibits humming or grinding noises from the scroll pump a major overhaul should be done by Agilent Vacuum Technologies Advance exchange TPS compact...

Page 300: ...1 F Tip Seal Replacement The parts and tools required to replace Tip Seals are listed below Tip Seal Replacement Kit P N IDP3TS 4 mm Allen wrench Razor blade or side cutting pliers Compressed air opti...

Page 301: ...ect the TPS compact from electrical power Unlock the scroll pump support by unscrewing the screws A see the Tip Seal replacement Figure A 1 Lift the TPS compact in order to access the Scroll pump site...

Page 302: ...oove 3 Install the correct tip seal into the groove of the outboard housing scroll as in step 3 4 Place the new main O ring into the groove in the frame 5 Ensure that the groove is clean 6 Ensure the...

Page 303: ...stem 1 Run the TPS compact for about 5 seconds Verify that the front fan is running If you hear loud noises from the Scroll pump this indicates that the tip seal or main O ring are possibly out of pla...

Page 304: ...mp Flush the system with air or dry nitrogen Install trap or filter Scroll Pump seals worn out Replace tip seals Poor conductance to TPS compact Replumb with shorter and or larger diameter tubing Hamm...

Page 305: ...essories DIY Full Range Gauge Kit 9699190 9699199 9699192 9699193 Wheels accessory kit 9698233 9698233 9698233 9698233 Mains cable NEMA plug 3m 9699958 9699958 9699958 9699958 Mains cable EU plug 3m 9...

Page 306: ...95 9699202 Wheels accessory kit 9698233 9698233 9698233 9698233 Mains cable NEMA plug 3m 9699958 9699958 9699958 9699958 Mains cable EU plug 3m 9699957 9699957 9699957 9699957 Inlet screen 9699302 969...

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Page 312: ...K Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 China Agilent Technologies China Co Ltd No 3 Wang Jing Bei Lu Chao Yang District Beijing 10...

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