Agilent Technologies FRG-700, Short Operating Instructions

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Inverted Magnetron Pirani Gauge FRG-700 FRG-702
10
2 Technical Data
Measuring range (air, N
2
) 5×10
-9
… 1000 mbar
Accuracy

±30% (in the range
1×10
-8
… 100 mbar)
Repeatability

±5% (in the range
1×10
-8
… 100 mbar)
Output signal (measuring signal)
Voltage range 0
… +10.5 V
Measurement range 1.82
… 8.6 V
Voltage vs. pressure logarithmic , 0.6 V/decade
Error signal <0.5 V no supply
>9.5 V Pirani sensor de-
fective (filament rupture)
Output impedance 2×10

Minimum loaded impedance 10 k

, short-circuit proof
Response time
p > 10
-6
mbar
(pressure dependent)
<10 ms
p = 10
-8
mbar

1000 ms
Identification gauge
85 k

, referenced to
supply common
Status pin 6
p > 10
-2
mbar
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode not ignited
Pirani-only mode Low = 0 V
p < 10
-2
mbar
Cold cathode ignited
Combined Pirani / cold
cathode mode
High = 15
… 30 VDC
LED High voltage on (LED on)