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Agilent Technologies 9499225, User Manual

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Gebrauchsanleitung 

Wartung

 

2 

MS40+ Single Stage Rotary Vane Pumps User Manual / 87-901-008-01 (

H.00

) 

30/104 

WARNUNG! 

Bei eingeschaltetem Gerät ist auf Bewegungs- und Hochspannungsteile zu 

achten. 

WARNUNG! 

Falls die Pumpe im Anschluß an den Betrieb gewartet werden soll, ist 

abzuwarten, bis sie abgekühlt ist, da ihre Oberfläche eine Temperatur von 

60 °C überschreiten kann. 

WARNUNG! 

Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten. Am 

Netzschalter sind spezielle Warnschilder “INSTANDHALTUNG AM GERÄT – 

NICHT EINSCHALTEN” anzubringen. Nach Abschluss der Arbeiten sind die 

Sicherheitseinrichtungen wieder zu aktivieren. 

WARNUNG! 

Keine Ölwechsel unmittelbar nach Stillsetzung des Gerätes vornehmen, da 

die Öltemperatur sehr hoch sein kann. 

Summary of Contents for 9499225

Page 1: ...MS40 Single Stage Rotary Vane Pumps Models 9499225 9499240 9499241 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 901 008 01 H 00 02 2021...

Page 2: ...n this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Go...

Page 3: ...MS40 Single Stage Rotary Vane Pumps MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 3 104 MS40 Single Stage Rotary Vane Pumps...

Page 4: ...MS40 Single Stage Rotary Vane Pumps MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 4 104...

Page 5: ...Istruzioni per l uso 9 Informazioni Generali 10 Immagazzinamento 12 Preparazione per l installazione 12 Installazione 14 Uso17 Manutenzione 17 Smaltimento 20 2 Gebrauchsanleitung21 Allgemeine Hinweise...

Page 6: ...n pour l installation 37 Installation 39 Utilisation 42 Maintenance 42 Mise au rebut 45 4 Instructions for Use 47 General Information 48 Storage 50 Preparation for Installation 50 Installation 52 Use5...

Page 7: ...to the Electric Supply69 Inlet and exhaust connections 69 Starting and Running the Pump 71 Stopping the Pump 72 Safety Rules 72 Warning Notes 73 Caution Notes 75 Maintenance Actions 76 Oil and Filter...

Page 8: ...Contents MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 8 104...

Page 9: ...s User Manual 9 104 1 Istruzioni per l uso Informazioni Generali 10 Simboli usati 11 Immagazzinamento 12 Preparazione per l installazione 12 Installazione 14 Uso 17 Manutenzione 17 Smaltimento 20 Trad...

Page 10: ...he Le MS40 Single Stage Rotary Vane Pumps sono delle pompe rotative monostadio a palette a tenuta in bagno d olio controllate da un unit elettronica Nei paragrafi seguenti sono riportate tutte le info...

Page 11: ...ti simboli sono utilizzati in modo coerente in tutte le illustrazioni Simboli Descrizione Superficie calda Pericolo di scottature se vengono toccate le parti calde Pericolo Vedere istruzioni di instal...

Page 12: ...ersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa al massimo di circa 35 kg Durante l operazione di disimballaggio prestare particol...

Page 13: ...ge Rotary Vane Pumps User Manual 87 901 008 01 H 00 13 104 NOTA La pompa fornita con alcuni accessori standard 1 connettore sub D a 9 contatti per I O femmina escluso il modello 9499241 1 connettore s...

Page 14: ...i olio lubrificante poich la pompa viene fornita scarica NOTA importante che il livello dell olio rimanga tra i valori MIN e MAX visualizzati dall indicatore di livello posto sul lato della pompa ATTE...

Page 15: ...camera da evacuare e che la flangia di scarico non sia tappata vedere la figura seguente La pompa non deve essere usata come compressore L inosservanza di queste precauzioni pu causare danni alla mac...

Page 16: ...al 87 901 008 01 H 00 16 104 AVVERTENZA La pompa deve essere installata in modo tale da permettere una facile interruzione della linea d alimentazione elettrica La pompa dev essere utilizzata con il c...

Page 17: ...pa da remoto mediante comunicazione seriale AVVERTENZA La pompa progettata per operare con gas inerti o non corrosivi assolutamente vietato l impiego con sostanze potenzialmente esplosive o infiammabi...

Page 18: ...rcizio necessario lasciarla raffreddare poich la temperatura esterna pu superare i 60 C AVVERTENZA Escludere sempre l alimentazione della pompa prima di compiere operazioni di manutenzione Apporre spe...

Page 19: ...ioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Health and Safety Certification allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nel...

Page 20: ...ropea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita per...

Page 21: ...ry Vane Pumps User Manual 21 104 2 Gebrauchsanleitung Allgemeine Hinweise 22 Verwendete Symbole 23 Lagerung 24 Vor der Installation 24 Installation 26 Gebrauch 29 Wartung 29 Entsorgung 32 bersetzung d...

Page 22: ...0 Single Stage Rotary Vane Pumps sind lbadgeschmierte dichte einstufige Fl gelzellenpumpen die von einer elektronischen Steuereinheit bet tigt werden In den folgenden Abschnitten sind alle erforderlic...

Page 23: ...3 104 Verwendete Symbole Folgende Symbole wurden durchg ngig in allen Illustrationen verwendet Symbole Beschreibung Hei e Oberfl che Verbrennungsgefahr bei Ber hrung Gefahr siehe Installations und Geb...

Page 24: ...n sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht betr gt einschlie lich der Pumpe maximal 36 kg Beim Auspacken ist darauf zu achten dass die Pumpe nicht fallengelassen o...

Page 25: ...otary Vane Pumps User Manual 87 901 008 01 H 00 25 104 HINWEIS Die Pumpe wird mit einigen Standardzubeh rteilen geliefert 1 9 Stift Stecker sub D f r I O Steckbuchse au er Modell 9499241 1 9 Stift Ste...

Page 26: ...nbetriebnahme mit Schmier l zu f llen da sie leer geliefert wird HINWEIS Es ist wichtig dass der lstand zwischen der MIN und MAX Werte auf der F llstandsanzeige auf der Seite der Pumpe angezeigt bleib...

Page 27: ...n ist und der Ablassflansch nicht verschlossen ist siehe nachstehende Abbildung Die Pumpe darf nicht als Verdichter verwendet werden Bei Nichtbeachtung dieser Anweisungen besteht Schadensgefahr f r da...

Page 28: ...Rotary Vane Pumps User Manual 87 901 008 01 H 00 28 104 WARNUNG Die Pumpe muss so installiert werden dass die Stromversorgung leicht unterbrochen werden kann Die Pumpe muss mit dem mitgelieferten Net...

Page 29: ...ber die serielle Kommunikation ferngesteuert werden WARNUNG Die Pumpe ist f r den Betrieb mit Inertgas oder nicht korrosiven Gasen konzipiert Der Einsatz mit potenziell explosions oder feuergef hrlich...

Page 30: ...abzuwarten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 60 C berschreiten kann WARNUNG Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten Am Netzschalter sind spezielle W...

Page 31: ...r zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Handbuch auszuf llen und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenve...

Page 32: ...t Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der...

Page 33: ...Gebrauchsanleitung Entsorgung 2 MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 33 104...

Page 34: ...User Manual 34 104 3 Mode d emploi Indications g n rales 35 Symboles utilis s 36 Emmagasinage 37 Pr paration pour l installation 37 Installation 39 Utilisation 42 Maintenance 42 Mise au rebut 45 Tradu...

Page 35: ...ge Rotary Vane Pumps sont des pompes rotatives mono tages palettes tanches en bain d huile contr l es par une unit lectronique Les paragraphes suivants fournissent toute l information n cessaire pour...

Page 36: ...oles utilis s Les symboles suivants sont utilis s dans les diff rentes illustrations Symboles Description Surface chaude Risque de br lure en cas de contact Danger Voir instructions d installation Mod...

Page 37: ...ter aussit t le bureau de vente local Le poids total de l emballage avec la pompe est d environ 35 kg maximum Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisse...

Page 38: ...Rotary Vane Pumps User Manual 87 901 008 01 H 00 38 104 NOTE La pompe est quip e de certains accessoires standard 1 connecteur sub D 9 broches pour E S femelle exclus le mod le 9499241 1 connecteur s...

Page 39: ...sage en huile de lubrification car elle est livr e vide NOTE Il est important que le niveau d huile reste entre les valeurs MIN et MAX affich e sur l indicateur de niveau sur le c t de la pompe ATTENT...

Page 40: ...ride de vidange ne soit pas bouch e voir la figure ci apr s La pompe ne doit pas tre utilis e comme un compresseur Le non respect de ces pr cautions peut entra ner un danger pour l op rateur et endomm...

Page 41: ...87 901 008 01 H 00 41 104 AVERTISSEMENT La pompe doit tre install e de mani re permettre une interruption facile du circuit d alimentation lectrique La pompe doit tre utilis e avec le c ble d aliment...

Page 42: ...rie AVERTISSEMENT La pompe est con ue pour fonctionner avec des gaz inertes ou non corrosifs L emploi de substances potentiellement explosives ou inflammables est strictement interdit Maintenance Le...

Page 43: ...sable de la laisser refroidir car sa temp rature ext rieure peut tre sup rieure 60 C AVERTISSEMENT Avant toute op ration de maintenance il est imp ratif de toujours couper l alimentation de la pompe P...

Page 44: ...our r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche Health and Safety Certification jointe la pr sente notice Une copie de celle ci devra tre mise dans l emb...

Page 45: ...indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s av...

Page 46: ...Mode d emploi Mise au rebut 3 MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 46 104...

Page 47: ...e Rotary Vane Pumps User Manual 47 104 4 Instructions for Use General Information 48 Symbols used 49 Storage 50 Preparation for Installation 50 Installation 52 Use 55 Maintenance 55 Disposal 58 Origin...

Page 48: ...s MS40 Single Stage Rotary Vane Pumps are single stage oil sealed rotary vane pumps controlled by an electronic module These high vacuum pumps are suitable for pumping non corrosive gases The followin...

Page 49: ...used The following symbols are used consistently throughout in all illustration Symbols Description Caution hot surface Danger of burns if hot parts are touched Warning see installation operating mode...

Page 50: ...ns of damage which may have occurred during transport contact your local sales office Total weight of the pack including the pump is approx 35 kg When unpacking the pump be sure not to drop it and avo...

Page 51: ...ngle Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 51 104 NOTE The pump is provided with some standard accessories 1 9 pin sub D connector for I O female excluding model 9499241 1 9 pin sub D...

Page 52: ...il as the pump is delivered empty NOTE It is important that the oil level stays within the range MIN and MAX that is indicated by the level gauge on the side of the pump CAUTION It is mandatory to lea...

Page 53: ...ted to the vacuum chamber and the exhaust flange is not closed see the following figure The pump must not be used as a compressor Non observance of these precautions may be dangerous for the machine a...

Page 54: ...otary Vane Pumps User Manual 87 901 008 01 H 00 54 104 WARNING The pump must be installed in a way that allows an easy interruption of the line voltage The pump must be used with the power supply cabl...

Page 55: ...pping can be controlled remotely over a serial connection WARNING The pump is designed to operate with inert or non corrosive gases It is categorically forbidden to use it with potentially explosive o...

Page 56: ...onsiderable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 C WARNING Always disconnect the power supply to the pump before starting maintenance work Plac...

Page 57: ...p to the constructor for repairs the Health and Safety Certification sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted...

Page 58: ...of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection sys...

Page 59: ...Instructions for Use Disposal 4 MS40 Single Stage Rotary Vane Pumps User Manual 87 901 008 01 H 00 59 104...

Page 60: ...lation 66 Preliminary Operations 68 Section II 69 Connection to the Electric Supply 69 Inlet and exhaust connections 69 Starting and Running the Pump 71 Stopping the Pump 72 Safety Rules 72 Warning No...

Page 61: ...ications 83 Input Output Communications 85 P1 I O 85 RS 232 RS 485 Communication Description 87 J1 Serial Port 87 Communication Format 87 Window Protocol Description 88 Examples 90 Window Meanings 91...

Page 62: ...osive gases The main features are all parts in direct contact with the fluid pumped are free of copper alloys all materials are carefully selected to provide extended life due to its design features a...

Page 63: ...sealed by mean of OR gaskets Anti Suckback Device The pump is equipped with a special anti suckback device to avoid air pressure rises and or oil back flow towards the evacuated chamber when the pump...

Page 64: ...l 1 1 1 ROTATIONAL FREQUENCY min max Hz 40 60 40 60 40 60 NOISE LEVEL dB A 62 62 62 IP Value 20 Installation category II Pollution degree 2 OPERATING TEMPERATURE RANGE C 12 40 12 40 12 40 WEIGHT Kg 3...

Page 65: ...H 00 65 104 Dimensions The following figure shows the pumps layout and dimensions Figure 4 MS40 Single Stage Rotary Vane Pumps layout Figure 5 MS40 Single Stage Rotary Vane Pumps dimensions Electroni...

Page 66: ...xternal surface temperature may be in excess of 60 C Transport and Installation The pumps are shipped to the customer inside cardboard boxes Total weight of the pack including the pump is about 35 Kg...

Page 67: ...ws also vibrations to and from the pump are greatly reduced by the use of rubber feet Pump off the ground In this case the user must design a suitable support structure remembering the following point...

Page 68: ...e pump check for oil level CAUTION Oil must be poured into the casing through the special threaded plughole and NOT through the suction line WARNING Take out the protective caps on the suction and exh...

Page 69: ...stem to be evacuated to the inlet flange using a centering ring with OR and a clamp flange NOTE For guaranteed reliable sealing use an OR gasket in FKM The inlet duct is equipped with a sieve filter p...

Page 70: ...t is good practice to use a flexible joint in order to avoid undue forcing of the connection on the pump The exhaust duct must be connected to a pipe that will take away the pumped out gases NOTE An i...

Page 71: ...s started with cold oil initially more than normal noise will be heard this will last for a few minutes only until the oil reaches its working temperature There are no special instructions for normal...

Page 72: ...intenance must be well trained and must be aware of the accident prevention rules The accident prevention precautions contained in this section must be respected at all times during operation and main...

Page 73: ...When cleaning the pump and its component parts avoid the use of flammable or toxic solvents such as benzin benzol ether or alcohol The recommendation is to use a soap and water solution preferably in...

Page 74: ...or act as conductors chains bracelets etc k Ensure that the tools to be used are in perfect working condition and have insulating grips where necessary Check that the insulating material of the cables...

Page 75: ...d that it is properly distributed through the pump inadequate lubrication may damage the pump seriously d Give the parts some form of marking as you strip them down to ensure that you reassemble them...

Page 76: ...tronic controller available only on controllers equipped with serial interface After 8000 h of operation the status led starts blinking orange To switch off the alarm it s necessary to use the serial...

Page 77: ...cians must be aware of all applicable local directives concerning accident prevention during work on motor driven pumps and should know how to apply them have read and understood all the sections on S...

Page 78: ...it anti clock wise using a 10mm hex key Let the oil flow out In the meantime clean the inside of the drain plug 3 After closing the drainage hole with its plug make the pump perform a number of turns...

Page 79: ...Replace the cartridge filter as per following slide 8 The seam of the filter material must be oriented downwards Filter Cartridge Replacement Procedure 1 Unscrew the cap rotating it anti clock wise b...

Page 80: ...product Clean the skin carefully after contact with the lubricants by washing freely with water and soap Apply a skin cream after washing Take off and change clothes or shoes on which oil has been sp...

Page 81: ...le quality will guarantee safe operation of the pumps CAUTION Mineral oils and the PFPE oil are incompatible To change from one type to another the pump must be stripped down completely and all parts...

Page 82: ...r tension and thus suitable for use on high vacuum pumps Resistance to aging under the effect of atmospheric agents ozone water light Chemical and physiological inertia of primary importance and extre...

Page 83: ...y Vane Pumps User Manual 87 901 008 01 H 00 83 104 Pump Electronic Controller Figure 8 Technical Specifications Input voltage 200V 240V 50 60 Hz Max input power 1200 VA Maximum ambient temperature 40...

Page 84: ...00 84 104 CE mark Tab 4 EN55011 cat B EN61000 4 5 EN61000 3 2 RF EN61000 4 6 EN61000 3 3 EN61000 4 8 ESD EN61000 4 2 EN61000 4 11 EN61000 4 3 EN61010 1 EN6100 4 4 CSA mark EN61010 1 Installation cate...

Page 85: ...level relay contact out 4 Start command 24V in 5 Ground out 6 Interlock Status N O relay contact out 7 Oil level relay contact out 8 Start command 24 in 9 24V out Interlock N O Relay contact It is clo...

Page 86: ...n under the minimum level Start stop If the inverter is managed by remote port it manage the pump starting if you are operating in serial mode it enables the starting using a 24V external source or co...

Page 87: ...out 2 TX RS232 3 RX RS232 4 Spare 5 GND 6 A RS485 7 Spare 8 B RS485 9 Spare The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to en...

Page 88: ...h an ANSWER CRC to the host The MESSAGE is a string with the following format STX ADDR WIN COM DATA ETX CRC Where NOTE When a data is indicated between two quotes it means that the indicated data is t...

Page 89: ...me structure of the MESSAGE NOTE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the AD...

Page 90: ...temporarily disabled for example you can t write the Soft Start when the Pump is running NOTE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interfac...

Page 91: ...0 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Window Meanings Tab 9 WIN TYPE R W DESCRIPTION 000 L RW START STOP 1 START 0 STOP 008 L RW REMOTE SERIAL CONFIGURATION 1 Remote 0 Se...

Page 92: ...rpm 300 N R CYCLE TIME min 301 N R CYCLE NUMBER 302 N R PUMP LIFE h 305 N R TIME WITH OIL UNDER LEVEL min 306 N R TIME WITH DIRTY FILTER min 307 N R TIME CONTROLLER STAND BY 319 A R CONTROLLER MODEL N...

Page 93: ...t yet reached its nominal speed The pump is decreasing its speed due to a gas load that needs power over the available limit Green Normal The pump is running at its nominal speed Red Fail The pump is...

Page 94: ...pply is between 200 240 V and there are not voltage drops 4 Controller overtemp Temperature sensor inside the controller unit over the temperature limit Occluded controller grids Check if the controll...

Page 95: ...s connected to the exhaust line 32 Supply undervoltage or overvoltage With the pump in stop or in a running status the voltage level is out of the valid voltage range Voltage drop or overvoltage cause...

Page 96: ...utton you must wait at least 10 seconds but it is strongly recommended to wait about 10 minutes if the pump is hot If after the actions described in the table above and after the reset the fail status...

Page 97: ...t is operated in remote or serial mode Rotor Lock Test The rotational frequency is checked continuously If the rotor remains still for more than 60 sec the pump status is changed to Fail Oil Level Che...

Page 98: ...008 01 H 00 98 104 Accessories Tab 13 PART NUMBER DESCRIPTION 9499201 MS40 Exhaust filter 9499202 MS40 1 Litre Oil Tank 9499203 Maintenance kit 9499396 Power cable EU 9499400 208Vac US Power cable 94...

Page 99: ...lve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necess...

Page 100: ...ivision Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial...

Page 101: ...to return the defective product o Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit o Include a copy of the...

Page 102: ...re to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part o Returns for credit toward the purchase of new or refurbished Products are...

Page 103: ...CAS Number Toxic YES NO Harmful YES NO Corrosive YES NO Reactive YES NO Flammable YES NO Explosive YES NO Radioactive YES NO Biological YES NO Oxidizing YES NO Sensitizer YES NO Other dangerous substa...

Page 104: ...Barueri Sao Paulo CEP 06460 040 Toll free 0800 728 1405 Singapore Agilent Technologies Singapore Pte Ltd 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Toll free 1 800 2762622 vp...

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