PRO225LM Hardware Manual
Overview
Table 1-4:
PRO225LM Series Specifications (-0500 to -1500)
PRO225LM
-0500
-0600
-0800
-1000
-1200
-1500
Travel
500 mm
600 mm
800 mm
1000 mm
1200 mm
1500 mm
Accuracy
(1)
Standard
±14 μm
±15.5 μm
±17 μm
±18 μm
±21 μm
±22 μm
Calibrated
±1 μm
±1 μm
±1.5 μm
±1.5 μm
±2 μm
±2 μm
Resolution (Minimum
Incremental Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability
(1)
±0.4 μm
±0.4 μm
±0.5 μm
±0.5 μm
±0.5 μm
±0.5 μm
Horizontal Straightness
(1)
±5.5 μm
±6.5 μm
±8 μm
±9.5 μm
±11 μm
±12.5 μm
Vertical Straightness
(1)
±5.5 μm
±6.5 μm
±8 μm
±9.5 μm
±11 μm
±12.5 μm
Pitch
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
130 μrad
(26.8 arc
sec)
140 μrad
(28.9 arc
sec)
Roll
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
130 μrad
(26.8 arc
sec)
140 μrad
(28.9 arc
sec)
Yaw
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
130 μrad
(26.8 arc
sec)
140 μrad
(28.9 arc
sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
3 g
Maximum Force, Continuous
153 N – Standard
251.6 N – With Air Cooling (20 psig)
Load Capacity
(3)
Horizontal
100 kg
Side
100 kg
Moving Mass
8.4 kg
Stage Mass
36.5 kg
39.7 kg
46.1 kg
52.5 kg
58.9 kg
68.5 kg
Material
Anodized Aluminum
Mean Time Between Failure
20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).
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Chapter 1
15
