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MPS75SL/SLE Hardware Manual

Revision History

Appendix B: Revision History

Revision

General Information

1.03.00

Updated vacuum baking temperature:

Section 1.4.

1.02.00

General revision / Product redesign

New configuration (SL and SLE)

Model numbers and ordering options updated:

Table 1-1

Basic specifications updated:

Section 1.3.

1.01.00

Updated Standard Motor Wiring

Updated Electrical Specifications

Updated Dimensions

Updated Basic Specifications

Updated safety information

1.00.00

New Manual

www.aerotech.com

Appendix B

Summary of Contents for MPS75SL

Page 1: ...Revision 1 03 00 MPS75SL SLE Hardware Manual...

Page 2: ...vice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81...

Page 3: ...g the Stage to the Mounting Surface 22 2 3 1 For XY Assemblies and Special Cases 24 2 4 Attaching the Payload to the Stage 25 Chapter 3 Electrical Specifications and Installation 29 3 1 Motor and Feed...

Page 4: ...lity of MPS75SL SLE Series Stages 25 Figure 2 11 Stage Orientations 26 Figure 2 12 Torque Required to Turn Ball Screw in Vertical Orientation 27 Figure 3 1 Motor and Feedback Wiring M1 Option 36 Figur...

Page 5: ...Pin D Motor and Feedback Connector Pinouts M1 with HV Option SL Only 32 Table 3 4 25 Pin D Motor and Feedback Connector Pinouts M2 Motor only for SLE 33 Table 3 5 25 Pin D Motor Mating Connector M2 3...

Page 6: ...Table of Contents MPS75SL SLE Hardware Manual 6 www aerotech com This page intentionally left blank...

Page 7: ...nt parts must be restricted while connected to a power source 2 Do not connect or disconnect any electrical components or connecting cables while connected to a power source 3 Disconnect electrical po...

Page 8: ...Electrical Safety MPS75SL SLE Hardware Manual 8 www aerotech com This page intentionally left blank...

Page 9: ...rther more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to...

Page 10: ...Declaration of Conformity MPS75SL SLE Hardware Manual 10 www aerotech com This page intentionally left blank...

Page 11: ...cremental linear encoder 0 05 m digital TTL output Travel Required 025 25 mm travel stage 050 50 mm travel stage 075 75 mm travel stage 100 100 mm travel stage Vacuum Preparation SL Only Optional HV H...

Page 12: ...sive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your spe cific application Protection Rating The MPS75SL SLE is not suited for dusty or wet...

Page 13: ...3 0 m 3 0 m Flatness 2 0 m 2 0 m 3 0 m 3 0 m Maximum Speed 1 0 mm rev Ball Screw DC Motor M1 50 mm s 50 mm s 50 mm s 35 mm s Stepper Motor M2 30 mm s 30 mm s 30 mm s 30 mm s Load Capacity 4 Horizontal...

Page 14: ...mm rev Ball Screw DC Motor M1 50 mm s 50 mm s 50 mm s 35 mm s Stepper Motor M2 30 mm s 30 mm s 30 mm s 30 mm s Load Capacity 4 Horizontal 15 kg 15 kg 15 kg 15 kg Side 15 kg 15 kg 15 kg 15 kg Vertical...

Page 15: ...is ready for use 2 Always handle the MPS75SL SLE in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the MPS75SL SLE 3 During ins...

Page 16: ...Overview MPS75SL SLE Hardware Manual 16 Chapter 1 www aerotech com This page intentionally left blank...

Page 17: ...tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Set the MPS75SL SLE on a smooth flat and clean surface Each MPS75SL...

Page 18: ...tech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product...

Page 19: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 2 MPS75SL SLE with Bellows Dimensions www aerotech com Chapter 2 19...

Page 20: ...ardware Manual Figure 2 3 MPS75SL SLE 025 Mounting Plate Dimensions Figure 2 4 MPS75SL SLE 050 Mounting Plate Dimensions Figure 2 5 MPS75SL SLE 075 Mounting Plate Dimensions Figure 2 6 MPS75SL SLE 100...

Page 21: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 7 MPS75SL SLE HDZ Angle Bracket Dimensions www aerotech com Chapter 2 21...

Page 22: ...performed on the mounting surface rather than the MPS75SL SLE Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Mount the s...

Page 23: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 8 MPS75SL SLE Mounting Hole Locations www aerotech com Chapter 2 23...

Page 24: ...age if it is connected to a power source 1 Manually move the stage to one end of travel revealing two of the hidden mounting holes for the stage 2 Mount the stage to the base with M4 socket head cap s...

Page 25: ...performance N OTE For valid system performance the mounting interface should be flat within 5 m W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowable thread engagement A screw ext...

Page 26: ...tations The approximate amount of torque required to turn the ball screw of an MPS75SL SLE series stage can be found from Figure 2 12 or the following equation Where Lead of Screw see Table 1 3 Effici...

Page 27: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 12 Torque Required to Turn Ball Screw in Vertical Orientation www aerotech com Chapter 2 27...

Page 28: ...Mechanical Specifications and Installation MPS75SL SLE Hardware Manual 28 Chapter 2 www aerotech com This page intentionally left blank...

Page 29: ...d with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the sections that follow for standard motor wiring and connec...

Page 30: ...there are any questions on system configuration The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integr...

Page 31: ...osine N 3 Sine N 4 Marker N 5 Encoder Common 6 Limit Common 7 Negative CCW hardware limit 8 Reserved 9 Reserved 10 Motor 11 Motor 12 Reserved 13 Reserved 14 Cosine 15 Sine 16 Marker 17 Encoder 5 V 18...

Page 32: ...egative CCW hardware limit 8 Limit Common 9 Encoder Common 10 Marker N 11 Sine N 12 Cosine N 13 Reserved 14 Reserved 15 Reserved 16 Motor 17 Motor 18 Reserved 19 Reserved 20 Positive CW hardware limit...

Page 33: ...ware limit 8 Reserved 9 Reserved 10 Motor Return 11 Motor Phase A 12 Motor Phase B 13 Reserved 14 Reserved 15 Reserved 16 Reserved 17 Encoder 5 V 18 Stage ID 19 Positive CW hardware limit 20 Reserved...

Page 34: ...ve CCW hardware limit 8 Limit Common 9 Encoder Common 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved 15 Motor Phase B 16 Motor Phase A 17 Motor Return 18 Reserved 19 Reserved 20 Positive...

Page 35: ...Reserved 4 Marker N 5 Cosine N 6 Sine N 7 Encoder 5 V 8 Encoder 5 V 9 Signal Common 10 CW LMT 11 CCW LMT 12 Marker 13 Cosine 14 Sine 15 Reserved Case Signal shield connection to case Table 3 8 15 Pin...

Page 36: ...ns and Installation MPS75SL SLE Hardware Manual 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring M1 Option 36 Chap...

Page 37: ...MPS75SL SLE Hardware Manual Electrical Specifications and Installation Figure 3 2 Motor and Feedback Wiring M2 Option www aerotech com Chapter 3 37...

Page 38: ...utput Incremental Encoder RS422 485 compatible Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Pol...

Page 39: ...24 V Maximum Terminal Voltage 48 V Motor Constant 0 021 Nm 1 This table specifies the motors themselves The stage has an additional gear ratio as listed in Table 1 3 Table 3 11 Stepper Motor Specifica...

Page 40: ...oder Amplified sine and TTL 50 nm versions available Feedback Rotary Encoder 10 000 lines rev rotary encoder N A Rotary encoder electronic res olution 0 025 um 0 025 um 40 000 steps rev motor resoluti...

Page 41: ...ack and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move...

Page 42: ...ations and Installation MPS75SL SLE Hardware Manual 3 5 Motor and Feedback Phasing Figure 3 4 Analog Encoder Phasing Reference Diagram Figure 3 5 Encoder Phasing Reference Diagram Standard 42 Chapter...

Page 43: ...ch as duty cycle speed and the environment An inspection interval of once per month is recommended until a trend develops for the application Longer or shorter intervals may be required to maintain th...

Page 44: ...actory In addition a laser interferometer is required for post assembly verification to maintain warranties Contact Aerotech for more information Cleaning Before using a cleaning solvent on any part o...

Page 45: ...ation and cleaning if possible 1 Drive the carriage to one end of travel and remove power from the stage If the stage is equipped with the optional bellows the bellows will have to be compressed to ac...

Page 46: ...r from the stage 2 Unbolt the bellows from the stage endplates Figure 4 1 Remove the Bellows Bolts 3 Move the stage carriage to one end of travel and compress the bellows to gain access to the ball sc...

Page 47: ...ews from the bottom of the stage that attach the motor cover Remove the motor cover Figure 4 3 Motor Cover Screw Location 3 Slide the two bellow support rods though the holes in the motor adapter plat...

Page 48: ...cure the Bellows Support Rods 5 Attach the bellows to the ends of the stage and to the carriage using 8 M2 socket head cap screws Ensure that the bellows are aligned to the stage travel Figure 4 6 Att...

Page 49: ...d cap screws Figure 4 8 Attach the Bellows Tabletop 8 Re install the motor cover refer to Figure 4 3 ensuring that no wires are pinched or in the way Do not over tighten the screws that secure the mot...

Page 50: ...tation for polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal...

Page 51: ...t such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate...

Page 52: ...rms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased...

Page 53: ...neral revision Product redesign l New configuration SL and SLE l Model numbers and ordering options updated Table 1 1 l Basic specifications updated Section 1 3 1 01 00 l Updated Standard Motor Wiring...

Page 54: ...Revision History MPS75SL SLE Hardware Manual 54 Appendix B www aerotech com This page intentionally left blank...

Page 55: ...DZ Angle Bracket Dimensions 21 Humidity 12 I Inspection Schedule 43 isopropyl alcohol 44 L Limit Switch Specifications 38 lubricants vacuum operation 15 Lubrication 45 M Mechanical Specifications 13 1...

Page 56: ...Index MPS75SL SLE Hardware Manual V Vacuum 15 vacuum guidelines 15 Vibration 12 W Warranty and Field Service 51 56 Index www aerotech com...

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